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David Monk
Ph.D. 1993

Dr. Monk received his B.S. in chemical engineering from the University of Iowa in 1989. During that time, he worked at Rockwell International doing research with polyimide interlayer dielectrics for a silicon-on-silicon multichip module development project. He received his Ph.D. in chemical engineering in 1993 from the University of California, Berkeley through joint work between chemical engineering and the Berkeley Sensor & Actuator Center in EECS. His research emphasis was modeling the sacrificial layer etching and subsequent rinsing processes for surface micromachining - one of the Micro-Electro-Mechanical Systems (MEMS) fabrication processes.

Dave joined Motorola in 1993 and worked for the first three years in the Packaging Technology Center within Motorola Semiconductor Product Sector's Sensor Products Division. His work during that time focused on media compatible packaging of pressure sensor devices. He also has led projects on tungsten silicide electronic trimming for pressure sensors, low-pressure sensors for washing machine applications, and the recent development of a CMOS integrated, surface-micromachined, absolute pressure sensor for tire pressure monitoring applications. This most recent project developed into a true microsystem effort that included a MEMS-based pressure sensor, a temperature sensor, CMOS interface ASIC, MCU, and RF/LF transmitter/receiver chipset for the tire pressure monitoring application.

In 1997, Dave completed an MBA with a technology emphasis at Arizona State University. From 2001 through 2005, he managed the sensor R&D group including system engineering, transducer (MEMS) design, ASIC design, CAD, test development, and package development for MEMS-based products (inertial and pressure sensors) for Motorola's Sensor Products Division. After the spinout of Freescale Semiconductor from Motorola, Dave was the Silicon Technology and Microsystem Technical Competency Center manager within the Freescale Sensor and Analog Products Division. Most recently, he has been the Automotive Sensor Operations/Product Manager for the Sensor & Actuator Solutions Division within Freescale. This includes work in airbag and low-g accelerometers, engine management and tire pressure sensors, as well as the development of capacitive sensors and a gyro/combo sensor.

Dave has been active in the MEMS/MST academic community as a participant in the technical committees for the International Conference on Solid-State Sensors and Actuators (Transducers '99 in Sendai, Transducers 03 in Boston), the Solid-State Sensors and Actuators Workshop (Hilton Head '96, '98, and 06), MEMS 2001, and the IMAPS Sensor Division (1995 through 2005). He was the Technical Program Chair for the Hilton Head 2010 Workshop and will be the General Chair for the Hilton Head 2012 Workshop. He has published more than 50 technical conference papers, 10 refereed journal papers, and has 12 issued patents in the MEMS/MST field.

Email: dave.monk@freescale.com

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