Research Interests: MEMS, Piezoelectric MEMS, ultrasound transducers, magnetoresistive sensors, spintronics, biomedical applications.Job Interests: Post-doc, industry R&D.
received his M.Sc. in Physics Engineering from UTL (Technical University of Lisbon) in 2004 and the Ph.D. in Physics Engineering from UTL in 2010, with the following title: Hybrid devices for ultra low magnetic field detection. He conducted his Ph.D. research at the INESC-MN laboratory where he was responsible for the design, fabrication and optimization of highly sensitive magnetoresistive sensors, namely magnetic spin valves and tunnel junctions. Moreover, he conducted research in the integration of these sensors with MEMS resonators, a hybrid device aimed to improve the field sensitivity of the magnetic sensors, and also to provide on-chip magnetic detection of resonance in MEMS. Currently he is a postdoctoral researcher at UC Davis and BSAC, conducting research in piezoelectric MEMS devices and magnetic sensors.
Micromechanically-Enhanced Magnetoresistive Sensors [BPN539]
Magnetoresistive (MR) sensors are highly sensitive magnetic field sensors but suffer from large 1/f noise. We have developed a new
approach for reducing the 1/f noise in MR sensors by using a MEMS resonator to mechanically modulate the magnetic field signal to
a high frequency, where the 1/f noise vanishes. This mechanism improves the MR element sensitivity by 2-3 orders of magnitude in
the low frequency sensing range. A fully integrated fabrication process was developed, where the MR sensor is fabricated first on the
surface of a SOI wafer and the MEMS actuators are fabricated last. Our first generation device, reported at previous IAB meetings,
integrated electrostatic MEMS and magnetic tunnel junction (MTJs) MR sensors. A second generation device is under development,
consisting of a highly sensitive spin valve (SV) MR sensor and two AlN piezoelectric cantilevers with integrated magnetic flux
concentrators. This new approach should bring the SV sensitivity down to the picoTesla range, making this hybrid device suitable for
use in medical imaging, bionics, and any other application where ultra low magnetic sensing may be required.