Large-Scale MEMS Silicon Photonics Switch [BPN751] Fast and large scale optical switch is demonstrated in this project. MEMS is integrated with Silicon photonics waveguides to actively route light. MEMS and Silicon photonics wavegudies are integrated in monotonically in SOI platform to make the fabrication easy and robust. We demonstrated 50x50 network with 2us switching time in a chip has area less than 1cmx1cm. Our near goal is to demonstrate scale larger than 200x200 with ~100ns switching time.