Research Interests: RF MEMS resonators, oscillators, and filters; CMOS/MEMS integration technology; Piezoelectric MEMS device applications.Job Interests: Industry R&D Position
Chih-Ming Lin received the B.S. degree in civil engineering and the M.S. degree in applied mechanics from the National Taiwan University, Taipei, Taiwan, in 2001 and 2003, respectively. He is currently working toward the Ph.D. degree in mechanical engineering at the University of California at Berkeley. From 2004 to 2005, he was a MEMS R&D engineer at the BenQ Corporation, Hsinchu, Taiwan, where he was involved in the development of fully integrated CMOS-MEMS microfluid injecting technology for inkjet print heads. His research interests include acoustic wave devices, piezoelectric RF N/MEMS resonators, oscillators and filters, and CMOS-compatible N/MEMS technologies.
HEaTS: Temperature-Compensated & High-Q Aluminum Nitride Lamb Wave Resonators [BPN441]
The long-range goal of this project is to develop aluminum nitride (AlN) Lamb wave resonators with high Q, small frequency-temperature drift, multiple frequencies, and CMOS compatibility on one single chip.