BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Staff
     
 
Dr. Chen Yang

Mechanical Engineering
Advisor: Prof. Lin
(510) 642-8983
chenyang@berkeley.edu
Research Interests: MEMS gyro, RF passive devices, High-frequency magnetism
Job Interests: Industry R&D

BIOGRAPHY
received the PhD degree from Tsinghua University, Beijing, China, 2008, in Microelectronics. He is currently a Assistant Project Scientist at the Berkeley Sensor & Actuator Center, University of California, Berkeley. His research interests include MEMS gyro, RF passive devices, high-frequency magnetic material and integrated devices. Dr. Yang received the IEEE Electron Devices Society (EDS) Early Career Award in 2010, and the IEEE EDS¡¡PhD Student Fellowship Award in 2007.

Materials for High Quality-Factor Resonating Gyroscopes [BPN655]
This project will investigate new materials suitable for achieving Q-factors in excess of 1
million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and
surface losses will be performed using resonator test structures. The effect of doping and
microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined
cantilevers and double-ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond
(NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying
levels of Boron doping, Deposition temperature and methane flow rate. Higher boron doping resulted in
reduced Q due to defect losses. Moreover, thermal conductivities of diamond films were measured using
TDTR technique for further mapping of theory and experiment.


Current Active Projects:
BPN655
BPN574
BPN603
BPN715
 

     Last Updated: Tue 2014-Aug-12 12:31:23

back to Researchers



 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: October 25, 2014, 1:49 am