Research Interests: MEMS, RF passive devices, High-f magnetism
received the PhD degree from Tsinghua University, Beijing, China, 2008, in Microelectronics. He is currently a Assistant Project Scientist at the Berkeley Sensor & Actuator Center, University of California, Berkeley. His research interests include MEMS sensors and high-frequency integrated devices. Dr. Yang received the IEEE Electron Devices Society (EDS) Early Career Award in 2010, and the IEEE EDS¡¡PhD Student Fellowship Award in 2007.
Hemispherical Resonator Gyro [BPN603]
The goal of this project is to realize a micro rate-integrating gyroscope that produces an output signal proportional to rotation angle rather than rotation rate. If successful, this device would eliminate the need of integrating the gyroscope's rate output to obtain the angle. Realizing a micro rate-integrating gyroscope can be achieved by fabricating hemispherical resonating shells with extremely close frequency matching (Δf < 10 Hz) and a very high quality factor (Q > 1 million). Structures must be highly axisymmetric and micro-finished to nanometer scale roughness.