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Dr. Chen Yang

Mechanical Engineering
Advisor: Prof. Lin
(510) 642-8983
chenyang@berkeley.edu
Research Interests: MEMS gyro, RF passive devices, High-f magnetism
Job Interests: Industry R&D

BIOGRAPHY
received the PhD degree from Tsinghua University, Beijing, China, 2008, in Microelectronics. He is currently a Assistant Project Scientist at the Berkeley Sensor & Actuator Center, University of California, Berkeley. His research interests include MEMS gyro, RF passive devices, high-frequency magnetic material and integrated devices. Dr. Yang received the IEEE Electron Devices Society (EDS) Early Career Award in 2010, and the IEEE EDS¡¡PhD Student Fellowship Award in 2007.

Materials for High Quality-Factor Resonating Gyroscopes [BPN655]
This project will investigate new materials suitable for achieving Q-factors in excess of 1
million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and
surface losses will be performed using resonator test structures. The effect of doping and
microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined double
ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and
microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels
of Boron doping. Higher boron doping resulted in reduced Q due to defect losses. Moreover, thermal
conductivities of diamond films were measured using TDTR technique for further mapping of theory and
experiment.


Current Active Projects:
BPN655
BPN675
BPN603
 

     Last Updated: Fri 2014-Jan-31 15:38:12

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