Research Interests: Mechanical radio, high-performance MEMS circuits, NEMS for leakage gating in low-power circuit applications.Job Interests: Industry R&D, Entrepreneurial Ventures
High-Voltage MEMS Resonators [BPN541]
The use of high voltages (>100 volts) in MEMS-based resonators presents a pathway towards
achieving low motional resistances while maintaining excellent linearity, as would be required, for
example, in a MEMS-based power amplifier. This research demonstrates the feasibility of creating MEMS
resonators which can withstand such voltages without succumbing to electrical pull-in, focusing on
careful device design informed by FEM simulation.