Research Interests: MEMS Inertial Sensors,
MEMS filters and resonators.
Material for High-Q MEMS resonators,
Mixed Signal Integrated Circuits (IC),
Signal ProcessingJob Interests: Academic, industry R&D, post-doc
received the B.A.Sc. and the M.A.Sc. degrees in electrical and computer engineering from the University of British Columbia, Vancouver in 2008 and 2010, respectively. He joined the MEMS Lab at the University of California, Davis in 2010 working under supervision of Prof. Horsley. He is currently pursuing his PhD at UC Davis.
Materials for High Quality-Factor Resonating Gyroscopes [BPN655]
This project will investigate new materials suitable for achieving Q-factors in excess of 1
million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and
surface losses will be performed using resonator test structures. The effect of doping and
microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined
cantilevers and double-ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond
(NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying
levels of Boron doping, Deposition temperature and methane flow rate. Higher boron doping resulted in
reduced Q due to defect losses. Moreover, thermal conductivities of diamond films were measured using
TDTR technique for further mapping of theory and experiment.