BIOGRAPHY

High Frequency Piezoelectric Micromachined Ultrasound Transducers [BPN628]
The goal of the current research is to design and fabricate high frequency (40MHz) Aluminum
Nitride (AlN) piezoelectric micromachined ultrasound transducers (pMUTs) to be used in photoacoustic
and pulse echo imaging, such as real time three dimensional medical imaging and biometric fingerprint
authentication. Piezoelectric membranes are to be fabricated and tested in annular arrays which
enable acoustic focus control and/or phased array beam. These will then be integrated above CMOS on a
silicon substrate.