BIOGRAPHY

Temperature-Stable Micromechanical Resonators and Filters [BPN540]
This project aims to suppress temperature-induced frequency shift in high frequency
micromechanical resonators targeted for channel-select filter and oscillator applications. A novel
electrical stiffness design technique is utilized to compensate for thermal drift, in which a
temperature-dependent electrical stiffness counteracts the resonator’s intrinsic dependence on
temperature caused mainly by Young’s modulus temperature dependence.