Electrical Engineering Advisor: Prof. Nguyen (510) 643-9825
Temperature-Stable Micromechanical Resonators and Filters [BPN540] This project aims to suppress temperature-induced frequency shift in high frequency
micromechanical resonators targeted for channel-select filter and oscillator applications. A
novel electrical stiffness design technique is utilized to compensate for thermal drift, in
which a temperature-dependent electrical stiffness counteracts the resonator’s intrinsic
dependence on temperature caused mainly by Young’s modulus temperature dependence.