Mechanical Engineering Advisor: Prof. Horsley (530) 752-5180
Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) [BPN628] The goal of this project is to design and fabricate a novel ultrasonic fingerprint sensor. Advantages of this sensor over existing fingerprint sensors include increased biometric security via imaging the dermis layer and greater insensitivity to finger contamination, such as oil or perspiration. A 110 X 56 array of high-frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) has been fabricated and characterized to have a sensitivity of 2 uV/Pa and a beam width of 80 um with one column drive. The PMUT array is integrated with CMOS ASIC and is capable of 150 um resolution which is demonstrated via imaging of line patterns on rubber silicone phantoms.