Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) [BPN628]
The goal of this project is to design and fabricate a MEMS based ultrasonic fingerprint sensor.
Advantages of this sensor over existing fingerprint sensors include increased biometric security
via imaging the dermis layer and greater insensitivity to finger contamination, such as oil or
perspiration. A 110 X 56 array of high-frequency piezoelectric micromachined ultrasonic
transducers (PMUTs), fully integrated with CMOS ASIC, has been fabricated and characterized to
have a resolution of 75 um in a 500 dpi image. Moreover, imaging fingerprint on both epidermis
and dermis layers has been achieved.