Research Interests: MEMS Inertial Sensors,
Material for High-Q MEMS resonators,
Mixed Signal Integrated Circuits (IC),
BioMEMSJob Interests: Academic, post-doc, industry R&D
received the B.A.Sc. and the M.A.Sc. degrees in electrical and computer engineering from the University of British Columbia, Vancouver in 2008 and 2010, respectively. He joined the MEMS Lab at the University of California, Davis in 2010 working under supervision of Prof. Horsley. He is currently pursuing his PhD at UC Davis.
Materials for High Quality-Factor Resonating Gyroscopes [BPN655]
This project will investigate new materials suitable for achieving Q-factors in excess of 1 million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and surface losses will be performed using resonator test structures. The effect of doping and microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined double ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels of Boron doping. Higher boron doping resulted in reduced Q due to defect losses. Higher surface loss was observed in both MCD and NCD as doping increased. Observed Q-factors were almost the same for MCD and NCD at frequencies near 10 MHz.