Spring 2014 IAB & Research Review
March 5 - 6

Prof. Ming C. Wu


Silicon Photonic MEMS and Micro LIDAR

Chip-scale integration of electronic, photonic, and MEMS circuits on a common silicon substrate can lead to a wide range of new optoelectronic microsystems for communications and sensing. In this talk, I will describe two on-going projects at Berkeley: (1) micro-LIDAR and 3D imaging, and (2) large-scale silicon photonic switch. In micro-LIDAR, we integrate a broadly tunable vertical cavity surface-emitting laser (VCSEL) with silicon photonics and CMOS electronics to produce a swept-frequency source for frequency-modulated continuous-wave (FMCW) LIDAR. Together with a MEMS optical phased array, the micro-LIDAR has potential applications in 3D imaging, indoor 3D mapping. I will also outline a new research area we are starting with fast optical circuit switch using silicon photonic MEMS technology.