Spring 2013 IAB & Research Review
March 6 - 8
Epitaxially-Sealed Polysilicon Disk Resonator Gyroscope
We present a 0.6 mm diameter, 20 um thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed- loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(/s) and Angle Random Walk (ARW) of 0.006 (/s)/ăHz. Without precise control of temperature, the minimum Allan deviation is 3.29 /hr.