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Berkeley Sensor & Actuator Center
Fall 2012 IAB & Research Review
and MIG Workshop
September 19-21, UC Berkeley, CA
     Project Abstracts: PUBLIC | PRIVATE
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Invited Speakers

Angelo Assimakopoulos, Vice President of Global Sales, Elliptic Labs
Mr. Assimakopoulos has been with Knowles Electronics since 2001 and has held several strategic growth positions. He is currently the Corporate Director of New Business and Technology Development, in charge of Research and Investigation of New Technologies and preparing associated Business and Marketing Plans for the introduction new producs. He has also been in the forefront of new MEMS product research and development at Knowles, directing the engineering team along the development path.

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Hui Fang, Postdoctoral Research Associate, University of Illinois at Urbana-Champaign
Dr. Hui Fang is currently a postdoctoral researcher working with Prof. John Rogers at UIUC. Dr. Fang was born in Auhui, China. He received his B.S. from Tsinghua University (Beijing) in 2009 and achieved his Ph.D. with Prof. Ali Javey at University of California, Berkeley in 2014.
His research interests include understanding and controlling the properties of engineered functional nanomaterials while adopting materials innovation for technological applications, including electronics and sensors. He enjoys unraveling new materials science mysteries and seeking optimal solutions for grand technological challenges.
Dr. Fang has authored and co-authored 22 journal papers (total citations: 629, h-index: 12), most of which are published in high impact journals including Nature, Proceedings of the National Academy of Sciences, Nano Letters, Advanced Materials and Journal of the American Chemical Society. He also serves as the reviewer for Nature Communications, ACS Nano, Nano Research, and MRS Proceedings.

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Marcellino Gemelli, Senior Manager, Bosch Sensortec
Marcellino Gemelli received the ‘Laurea’ degree in Electronic Engineering at the University of Pavia, Italy in 1994, while in the Italian Army and an MBA from
MIP, the Milano (Italy) Polytechnic business school. He is currently based in Palo Alto (CA) responsible for business development of Bosch Sensortec's MEMS product portfolio. He previously held various engineering and product management positions at STMicroelectronics from 1995 to 2011 in the fields of MEMS, electronic design automation and data storage. He was contract professor for the Microelectronics course at the Milano (Italy) Polytechnic from 2000 to 2002.

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Peter Himes, General Manager & Vice President, Shanghai Industrial µTechnology Research Institute (SITRI)
Peter Himes is a 30 year veteran of Silicon Valley and international business. Graduating from the University of Connecticut with a BSEE in solid state devices, he spent 16 years with National Semiconductor, first in wafer fab and product engineering, and then transitioning to Analog marketing where he headed up product and market segment efforts in audio/video, automotive, displays and power management before heading up Strategy Development for the company’s Analog Products division. Since leaving NS, he has headed up sales and BD for two startups, in power management (Impala Linear) and early-stage wireless internet services (iDini) before joining Winbond as VP of Marketing and, later, VP Sales for US and Europe. After 2 years at SiTime as VP sales he joined Silex as VP of Marketing and Strategic Alliances, where he worked with SITRI to create the business model we are launching this year. Peter also holds an MBA from Santa Clara University.

Kosuke Iwai
M.S. 2009 -The University of Tokyo (Mechano-Informatics)
B.S. 2007 -The University of Tokyo (Mechano-Informatics)

Mitchell Kline, Sensing Hardware Engineer, Chirp Microsystems
Dr. Kline joined Chirp Microsystems in 2016. His research interests include sensor interface circuits, MEMS inertial sensors, signal processing, and controls. He previously worked on power electronics, specifically capacitive power transfer for contactless charging and LED lighting applications. He was an intern at National Instruments in Austin, Texas in 2007 and Intrinsity in Bee Cave, Texas in 2008.
He received his PhD and worked as a postdoctoral researcher at UC Berkeley until 2014, advised by Prof. Bernhard E. Boser. He received his BS from Texas A&M University in 2008 and his MS from the UC Berkeley in 2010. Mitchell was born in Temple, TX in 1986.

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Karen Lightman, Managing Director, MEMS & Sensors Industry Group
Karen Lightman became MEMS Industry Group (MIG) managing director in 2007 and promoted to Executive Director in 2013. Formerly director of special projects, Karen played a pivotal role in launching MIG in January 2001. Karen is active on the worldwide MEMS conference circuit as a keynote speaker and panelist promoting MIG’s role as the leading trade association advancing MEMS across global markets. Karen manages the operations of MIG; spearheads strategic growth; and oversees sales, public relations, marketing and outreach. Karen plays a critical role in creating the content for all MIG and MIG-partner conferences, events and programming. She is instrumental in establishing and maintaining partnerships with other international organizations to advance the MEMS industry.
Karen joined MIG from Carnegie Mellon University's Center for Economic Development where she was senior policy analyst. Prior to Carnegie Mellon, Karen was senior associate at Cleveland Tomorrow, a public-private partnership, and before that, she was a program associate with the Ford Foundation.
Karen has a BA from the University of Vermont (UVM) and a MS in Public Policy from Carnegie Mellon University. Karen is a board member and chair of the Board Development Committee of the National Council of Jewish Women (NCJW), Pittsburgh and in 2012 received the NCJW National Award for Emerging Leaders. Karen is secretary for her UVM alumni class; mentor at UVM’s Honors College; and volunteers at the Environmental Charter School at Frick Park. Karen and her family reside in Pittsburgh, PA.

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Chih-Ming Lin, MEMS Design Engineer, Silicon Labs Inc.
Chih-Ming Lin received the B.S. degree in civil engineering and the M.S. degree in applied mechanics from the National Taiwan University, Taipei, Taiwan, in 2001 and 2003, respectively, and the M.S. degree in electrical engineering and computer sciences and the Ph.D. degree in mechanical engineering from the University of California at Berkeley in 2012 and 2013, respectively.
From 2004 to 2005, he was a MEMS R&D engineer at the BenQ Corporation, Hsinchu, Taiwan, where he was involved in the development of the fully CMOS-integrated MEMS inkjet print heads. Since July 2013, he is a MEMS design engineer at the Silicon Labs Inc. and develop the high-performance CMOS-compatible MEMS oscillators based on the CMEMS platform. His research interests include acoustic wave devices, piezoelectirc and electrostatic devices, RF N/MEMS resonators, oscillators and filters, and CMOS-compatible N/MEMS technologies.

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David J. Monk, MEMS Automotive Sensor Product Manager, Freescale Semiconductor
Dr. Monk received his B.S. in chemical engineering from the University of Iowa in 1989. During that time, he worked at Rockwell International doing research with polyimide interlayer dielectrics for a silicon-on-silicon multichip module development project. He received his Ph.D. in chemical engineering in 1993 from the University of California, Berkeley through joint work between chemical engineering and the Berkeley Sensor & Actuator Center in EECS. His research emphasis was modeling the sacrificial layer etching and subsequent rinsing processes for surface micromachining - one of the Micro-Electro-Mechanical Systems (MEMS) fabrication processes.

Dave joined Motorola in 1993 and worked for the first three years in the Packaging Technology Center within Motorola Semiconductor Product Sector's Sensor Products Division. His work during that time focused on media compatible packaging of pressure sensor devices. He also has led projects on tungsten silicide electronic trimming for pressure sensors, low-pressure sensors for washing machine applications, and the recent development of a CMOS integrated, surface-micromachined, absolute pressure sensor for tire pressure monitoring applications. This most recent project developed into a true microsystem effort that included a MEMS-based pressure sensor, a temperature sensor, CMOS interface ASIC, MCU, and RF/LF transmitter/receiver chipset for the tire pressure monitoring application.

In 1997, Dave completed an MBA with a technology emphasis at Arizona State University. From 2001 through 2005, he managed the sensor R&D group including system engineering, transducer (MEMS) design, ASIC design, CAD, test development, and package development for MEMS-based products (inertial and pressure sensors) for Motorola's Sensor Products Division. After the spinout of Freescale Semiconductor from Motorola, Dave was the Silicon Technology and Microsystem Technical Competency Center manager within the Freescale Sensor and Analog Products Division. Most recently, he has been the Automotive Sensor Operations/Product Manager for the Sensor & Actuator Solutions Division within Freescale. This includes work in airbag and low-g accelerometers, engine management and tire pressure sensors, as well as the development of capacitive sensors and a gyro/combo sensor.

Dave has been active in the MEMS/MST academic community as a participant in the technical committees for the International Conference on Solid-State Sensors and Actuators (Transducers '99 in Sendai, Transducers ’03 in Boston), the Solid-State Sensors and Actuators Workshop (Hilton Head '96, '98, and ‘06), MEMS 2001, and the IMAPS Sensor Division (1995 through 2005). He was the Technical Program Chair for the Hilton Head 2010 Workshop and will be the General Chair for the Hilton Head 2012 Workshop. He has published more than 50 technical conference papers, 10 refereed journal papers, and has 12 issued patents in the MEMS/MST field.

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Hadi Najar, Texas Instruments
received the B.A.Sc. and the M.A.Sc. degrees in electrical and computer engineering from the University of British Columbia, Vancouver in 2008 and 2010, respectively. He joined the MEMS Lab at the University of California, Davis in 2010 where he received his PhD in 2014 with Prof. Horsley. He is currently working as a Post-Doc scholar at MEMS lab in UC DAvis

Albert P. Pisano, Dean, Jacobs School of Engineering, University of California, San Diego
In his role as Dean of the Jacobs School of Engineering, Albert P. Pisano is responsible for strategic planning and programmatic development. His responsibilities include School-wide research initiatives, space plans, academic affairs, strategic planning and operations, and UC San Diego-wide cooperative initiatives.
As Dean of the Jacobs School, Pisano holds the Walter J. Zable Chair in Engineering. He is an active researcher who serves on the faculty of the departments of mechanical and aerospace engineering and electrical and computer engineering.
Prior to September 2013, Pisano served on the UC Berkeley faculty. The FANUC Endowed Chair of Mechanical Systems, he held faculty appointments in mechanical engineering and in electrical engineering and computer sciences. Pisano served as senior co-Director of the Berkeley Sensor & Actuator Center (an NSF Industry-University Cooperative Research Center), Director of the Electronics Research Laboratory (UC Berkeley’s largest organized research unit), and Faculty Head of the Program Office for Operational Excellence, among other leadership positions.
In 2001, Pisano was elected to the National Academy of Engineering for contributions to the design, fabrication, commercialization, and educational aspects of MEMS. From 1997 to 1999, Pisano served as a program manager for the MEMS Program at the Defense Advanced Research Projects Agency (DARPA).
He is a Fellow of the American Society of Mechanical Engineers, and an awardee of the Thomas Egleston Medal forDistinguished Engineering Achievement by notable alumni of Columbia University.
Pisano earned his undergraduate (’76) and graduate degrees (’77, ’80, ’81) in mechanical engineering at Columbia University. Prior to joining the faculty at UC Berkeley, he held research positions with Xerox Palo Alto Research Center, Singer Sewing Machines Corporate R&D Center and General Motors Research Labs.

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Tae Joon Seok, Assistant Professor, Gwangju Institute of Science and Technology (GIST)
Tae Joon Seok has been a Postdoctoral Scholar at the University of California, Berkeley since 2013. His research interests include optoelectronics, nanophotonics, plasmonics, and silicon photonics. He has published more than 30 papers in leading technical journals and conferences, and holds one U.S. patent.
Dr. Seok is a member of the Optical Society (OSA), and he received the Tingye Li Innovation Prize from OSA in 2015. He also won the Bronze Medal of 2015 Collegiate Inventors Competition sponsored by the United States Patent and Trademark Office. Dr. Seok received the B.S. degree in Electrical Engineering from Seoul National University, Seoul, South Korea, in 2007, and the Ph.D. degree in Electrical Engineering and Computer Sciences from the University of California, Berkeley, CA, USA, in 2012.

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Lingqi Wu, Apple
Lingqi Wu received his B.S. and M.S. degree at Tsinghua University, Beijing, in Mechanical Engineering (2007) and Instrument Science (2009), respectively. Currently, he is a 4th year PhD student in EECS department at UC Berkeley, working with prof. Clark Nguyen. Lingqi’s research interests are high power wideband MEMS filters and channel select filters. He has won the BSAC Best Poster Award with project titled “Temperature Stable Micromechanical Resonators and Filters” in spring 2011 and the Best Presentation Award with project titled "Hollow Stems for Hihger Micromechanical Disk Resonator Quality Factor" in Fall 2012.

Mark Zdeblick, Co-Founder & Chief Technical Officer, Proteus Digital Health, Inc.
Prior to co-founding Proteus Digital Health, Mark Zdeblick served as the chief technology officer for the optical switch group at K2 Optronics. Dr. Zdeblick is also founder, director and past chief technical officer of Redwood Microsystems, developer of the world’s highest performance microfabricated valves and electro-fluidic integrated circuits. While working in Professor Calvin Quate’s engineering group at Stanford, Dr. Zdeblick co-invented the microfabricated cantilever beam with an atomically sharp tip that enabled atomic force microscopy. He holds a B.S. in civil engineering (Tau Beta Pi, Phi Eta Sigma) and a B.A. in architecture, both from the University of Illinois, and an M.S. in aeronautics and astronautics and Ph.D. in electrical engineering from Stanford University. Author of over 100 issued and 350 pending patents worldwide.

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John M. Huggins, Former Executive Director, University of California, Berkeley
Former Executive Director, Berkeley Sensor & Actuator Center, UC Berkeley (since September 2002). MS, Electrical Engineering, University of Minnesota (1973); Stanford High Tech Executive Institute. Founder & CEO of TDK Systems Inc; VP, Advanced Development, Silicon Systems Inc; Telecom development manager, Intel Corporation. Guest Editor and Associate Editor, IEEE Journal of Solid State Circuits; Technical Program Committee, International Solid State Circuits Conference 5 years. Chair, PCMCIA communications standards subcommittee. Five U.S. Patents. Research and professional interests: mixed signal CMOS integrated circuits, electronic communications, and telecommunications high tech business development.

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Jim Chih-Min Cheng, Research Specialist, University of California, Berkeley
Jim received his B.Eng. in Electrical Engineering from McMaster University, Canada in 2004. He received his M.S. and Ph.D. degrees from University of California, Berkeley in Electrical Engineering in 2006 and 2009, respectively. His research interests are in NEMS/MEMS and their applications to energy and medicine. Thus far, his research has focused on rapid, energy efficient nanomanufacturing processes, next-generation thermal management devices, biologically-inspired MEMS sensors and next-generation energy storage utilizing nanocomposites. Outside of research he enjoys exploring the Bay Area, music, backpacking and swimming.

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Matilda Yun-Ju Lai, Graduate Student Researcher, University of California, Berkeley
received her B.S. degree in mechanical engineering from National Taiwan University, Taipei, Taiwan, in 2006 and the M.S. degree from UC Berkeley in 2008, where she is a current Ph.D. student in mechanical engineering working with Prof. Albert P. Pisano. Her research interests include piezoelectric energy harvesters, RF MEMS resonators and harsh environment sensors.


Leslie Field, Consultant, Manager and Founder, SmallTech Consulting
Dr. Leslie Field is the Founder and Managing Member of SmallTech Consulting, LLC and the Founder and CEO of MEMS Insight, Inc. She also serves as a Consulting Professor in Electrical Engineering at Stanford University. Leslie has a background in Electrical Engineering, Chemical Engineering, corporate R&D, and consulting. Dr. Field, through her consulting companies, has provided consulting services to a broad spectrum of companies for technical and strategic projects since 2002. Previously, Dr. Field worked in MEMS R&D at Hewlett-Packard Laboratories/Agilent Laboratories and while there, played a key role in starting HP Labs' Micromechanics group and worked on a variety of MEMS projects and devices. Farther back, Leslie's work at Chevron Research Company resulted in improved commercial refining methods for various petroleum-based products. Dr. Field has served on conference technical program committees and as a scientific reviewer for NIH. She is an inventor on thirty-seven patents and an author on fourteen technical publications. Dr. Field earned PhD and MS degrees in Electrical Engineering from UC Berkeley's Sensor & Actuator Center, and MS and BS degrees in Chemical Engineering from MIT.

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Octavian Florescu, President, Xip
Octavian Florescu, PhD, has over 15 years of experience in the semiconductor working with DEC, GE, Nokia, Quake Technologies and Qualcomm. He received a BS in Computer Engineering from the University of Waterloo, Canada, in 2004 and a PhD in Electrical Engineering from the Berkeley Sensor & Actuator Center, Dept. of Electrical Engineering, University of California, in 2010, with a minor in Molecular and Cell Biology. The CMOS biosensor technology used in the Xip products is based on his research, done in conjunction with Prof. Boser, Prof. Beatty and Prof. Harris. Outside of work, Octavian is an avid surfer, despite the cold, powerful and sharky waters of Northern California.

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Christine Chihfan Ho, Co-founder & Head of Technology, Imprint Energy, Inc.
Dr. Ho holds a BS, MS, and PhD in Mateirals Science and Engineering from the University of California, Berkeley where she was the lead inventor of the battery chemistry and printing process leveraged by Imprint Energy. She has extensive experience working with battery chemistries (from lithium to zinc) and has built batteries in a variety of form factors ranging from coin cells to then film to 3D micro-batteries.

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BSAC Directors

Bernhard E. Boser is a professor of Electrical Engineering and Computer Science and a Co-Director of the Berkeley Sensor & Actuator Center and the UC Berkeley Swarm Lab. His current research interests include; analog and digital circuit design and micromechanical sensors and actuators.
Prior to joining BSAC, Professor Boser conducted industrial research as Member of Technical Staff, AT&T Bell Laboratories, Holmdel, NJ (1988-1991) where he worked on adaptive systems, hardware implementations for neural network applications- including special purpose integrated circuits, and digital signal processors-and simulation of neural networks on parallel processors. He was Editor in Chief of IEEE Journal of Solid State Circuits, from 2002-2004. Professor Boser has served on the program committees of the IEEE International Solid-State Circuits Conference, the Transducers Conference, and the VLSI Symposium.
Professor Boser received a B.S. from the Swiss Federal Institute of Technology (ETH Zurich) in 1984 and M.S. and Ph.D. degrees from Stanford University (1985/1988).
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Mike D. Cable has been the Executive Director of the Berkeley Sensor & Actuator Center (BSAC) since January 2016. Before coming to BSAC, Dr. Cable worked at a number of early-stage technology companies commercializing university-based research. These include CEO of Matrix Sensors (MEMS-based biological and environmental sensors), CTO of Xenogen (pre-clinical bioluminescent imaging), and high-level positions at Nanomix, Xradia, Fovi Optics, and Quantum Dot. He has also worked at the Lawrence Livermore National Laboratory (laser fusion) and Lawrence Berkeley National Laboratory (physical biosciences). Dr. Cable has over 40 patents and received his Ph.D. in Nuclear Chemistry from the University of California, Berkeley and his B.S. from Iowa State University.
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David A. Horsley received his PhD in Mechanical Engineering from the University of California, Berkeley, in 1998. From 1998 to 2003, he held research and development positions at Dicon Fiberoptics and Hewlett Packard Laboratories and helped to co-found Onix Microsystems, a manufacturer of fiber-optic switching components. Since 2003, he has been a Professor in the Department of Mechanical and Aerospace Engineering at the University of California, Davis, and he is a Co-Director of the Berkeley Sensor and Actuator Center (BSAC), the National Science Foundation’s Industrial/University Collaborative Research Center (I/UCRC) focused on MEMS research. Professor Horsley is the Co-Founder of Picosense Inc, a developer of low-noise magnetoresistive sensors, and the Co-Founder and CTO of Chirp Microsystems Inc., a manufacturer of ultrasonic sensors using MEMS technology. He is a recipient of the National Science Foundation’s CAREER Award, the Outstanding Junior Faculty Award at UC Davis, the 2016 NSF I/UCRC Association’s Schwarzkopf Award for Technological Innovation, and has authored or co-authored over 150 scientific papers and holds over 20 patents.
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Ali Javey is an associate professor of Electrical Engineering and Computer Sciences at the University of California, Berkeley. He is also a faculty scientist at the Lawrence Berkeley National Laboratory where he serves as the program leader of Electronic Materials (E-Mat). He is an associate editor of ACS Nano and the Bay Area PV Consortium (BAPVC) and a Co-Director of the Berkeley Sensor & Actuator Center.

Professor Javey's research interests encompass the fields of chemistry, materials science and electrical engineering. His work focuses on the integration of nanoscale electronic materials for various technological applications, including novel nanoelectronics, flexible circuits and sensors, and energy generation and harvesting. For his contributions to the field, he has received a number of awards, including the APEC Science Prize for Innovation, Research and Education (2011); IEEE Nanotechnology Early Career Award (2010); Alfred P. Sloan Fellow (2010); Mohr Davidow Ventures Innovators Award (2010); National Academy of Sciences Award for Initiatives in Research (2009); Technology Review TR35 (2009); NSF Early CAREER Award (2008); U.S. Frontiers of Engineering by National Academy of Engineering (2008).
Professor Javey received a Ph.D. in chemistry from Stanford University in 2005, and served as a Junior Fellow of Harvard Society of Fellows from 2005 to 2006.
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Luke P. Lee is the Arnold and Barbara Silverman Distinguished Professor of Bioengineering at the University of California, Berkeley, a Co-Director of the Berkeley Sensor & Actuator Center, and the Director of the Biomedical Institute of Global Healthcare Research & Technology (BIGHEART).
Professor Lee’s current research interests are bionanoscience, nanomedicine for global healthcare and personalized medicine, and Bioinspired Photonics-Optofluidics-Electronics Technology and Science (BioPOETS) for green building with living skin. He was Chair Professor in Systems Nanobiology at the Swiss Federal Institute of Technology (ETH, Zurich) and has more than ten years of industrial experience in integrated optoelectronics, Superconducting Quantum Interference Devices (SQUIDs), and biomagnetic assays.
Professor Lee is a is a 2010 Ho-Am Laureate and has authored and co-authored over 250 papers on bionanophotonics, microfluidics, single cell biology, quantitative biomedicine, molecular diagnostics, optofluidics, BioMEMS, biosensors, SQUIDs, SERS, and nanogap junction biosensor for label-free biomolecule detection.
Professor Lee received his B.A. in Biophysics and Ph.D. in Applied Science & Technology: Applied Physics (major) / Bioengineering (minor) from the University of California, Berkeley.
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Dorian Liepmann is a professor in the Departments of Bioengineering and Mechanical Engineering at UC Berkeley and Co-Director of the Berkeley Sensor & Actuator Center.
Professor Liepmann has been a faculty member for 21 years. He was Chair of the Dept. of Bioengineering from 2004 to 2010 and held the Lester John and Lynne Dewar Distinguished Professorship in Bioengineering from 2001 to 2005. His research interests include BioMEMS, microfluid dynamics, experimental biofluid dynamics, hemodynamics associated with valvular heart disease and other cardiac and arterial flows.
Prior to joining the faculty at the University of California, Berkeley, Professor Liepmann had ten years of industrial research experience at the Jet Propulsion Labs and the Institute for Non-Linear Science at UC San Diego.
Professor Liepmann received his Ph.D. in 1990 from the University of California, San Diego in Applied Mechanics.
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Liwei Lin received PhD degree from the University of California, Berkeley, in 1993. He joined the University of California at Berkeley in 1999 and is now Professor at the Mechanical Engineering Department and Co-Director at Berkeley Sensor and Actuator Center (BSAC), an NSF/Industry/University research cooperative center. His research interests are in design, modeling and fabrication of micro/nano structures, sensors and actuators as well as mechanical issues in micro/nano systems including heat transfer, solid/fluid mechanics and dynamics. Dr. Lin is the recipient of the 1998 NSF CAREER Award for research in MEMS Packaging and the 1999 ASME Journal of Heat Transfer best paper award for his work on micro scale bubble formation. He led the effort to establish the MEMS division in ASME and served as the founding Chairman of the Executive Committee from 2004~2005. He is an ASME Fellow and has 20 issued US patents in the area of MEMS. He was the general co-chair of the 24th international conference on Micro Electro Mechanical Systems at Cancun, Mexico. Currently, he serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems and the North and South America Editor of Sensors and Actuators –A Physical.
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Roya Maboudian is a professor of Chemical and Biomolecular Engineering and a Co-Director of the Berkeley Sensor & Actuator Center at UC Berkeley. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems (JMEMS), as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS (JM3), and as advisory board member to ACS Applied Materials and Interfaces (AMI).

Prof. Maboudian's research interest is in the surface/interface and materials science and engineering of micro/nanosystems, with applications in harsh-environment sensing, health and environmental monitoring, and energy technologies. Prof. Maboudian has coauthored over 260 papers in peer-reviewed archival journals. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is a Fellow of the American Vacuum Society.

Prof. Maboudian received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, D.C., and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena.
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Michel M. Maharbiz is an associate professor with the Department of Electrical Engineering and Computer Science at the University of California, Berkeley and a Co-Director of the Berkeley Sensor & Actuator Center. His current research interests include building micro/nano interfaces to cells and organisms and exploring bio-derived fabrication methods.

Professor Maharbiz’s work on microbioreactor systems under Professor Roger T. Howe (EECS) and Professor Jay D. Keasling (ChemE) led to the foundation of Microreactor Technologies, Inc., which was acquired by Pall Corporation in 2009. From 2003 to 2007, he was an assistant professor at the University of Michigan, Ann Arbor. He is the co-founder of Tweedle Technologies and served as Vice President of Product Development at Quswami, Inc. from July 2010 to June 2011.
Professor Maharbiz was the recipient of a 2009 NSF Career Award for research into developing microfabricated interfaces for synthetic biology. In 2013 He received an Excellence in Engineering Education Award from National Instruments. He has been a GE Scholar and an Intel IMAP Fellow. His group is also known for developing the world’s first remotely radio-controlled cyborg beetles. This was named one of the top ten emerging technologies of 2009 by MIT’s Technology Review (TR10) and was in Time Magazine’s Top 50 Inventions of 2009. Michel’s long term goal is to understand developmental mechanisms as a way to engineer and fabricate machines.
Professor Maharbiz received his Ph.D. from the University of California, Berkeley.
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Richard S. Muller is a professor emeritus in the Department of Electrical Engineering at the University of California, Berkeley and Co-Founding Director of the Berkeley Sensor & Actuator Center. He joined the faculty at the University of California, Berkeley in 1962 where his research focus was on the physics of integrated circuit devices.
Together with Dr. T.I. Kamins of Hewlett-Packard Company, Professor Muller published Device Electronics for Integrated Circuits in 1977. In the late 1970s he began research in the area now known as MEMS, and with R.M. White founded the Berkeley Sensor & Actuator Center in 1986.
He proposed and serves as Editor-in-Chief of IEEE JMEMS. A member of the US National Academy of Engineering and an IEEE Life Fellow, he received the career MEMS Award at TRANSDUCERS ’97, as well as the IEEE Brunetti Award (1998 with R.T. Howe), a Fulbright Professorship, and a von Humboldt Research Award at TU Berlin in 1994. Other awards include the Berkeley Citation, the IEEE Millennium Medal, and the Renaissance Award from Stevens Institute of Technology. Professor Muller served as a Trustee of Stevens Institute of Technology from 1996 to 2005. In 2013, Professor Muller was a co-recipient of the IEEE/RSE/Wolfson, James Clerk Maxwell Award with Professor Richard White.
Professor Muller earned his M.S. and Ph.D. degrees in electrical engineering and physics from the California Institute of Technology.
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Clark T.-C. Nguyen is a professor of Electrical Engineering and a Co-Director of the Berkeley Sensor & Actuator Center. His technical interests focus on microelectromechanical systems and include integrated vibrating micromechanical signal processors and sensors, merged circuit/micromechanical technologies, RF communication architectures and integrated circuit design and technology.
Previously, Professor Nguyen was a professor of Electrical Engineering at the University of Michigan and a DARPA Program Manager in the Microsystems Technology Office (MTO). He managed many DARPA programs including Micro Power Generation (MPG), Chip-Scale Atomic Clock (CSAC), MEMS Exchange (MX), Harsh Environment Robust Micromechanical Technology (HERMiT), Micro Gas Analyzers (MGA), Radio Isotope Micropower Sources (RIMS), RF MEMS Improvement (RFMIP), Navigation-Grade Integrated Micro Gyroscope (NGIMG) and Micro Cryogenic Coolers (MCC).
Professor Nguyen and his students have garnered numerous Best Paper Awards at prestigious conferences including the 1998 and 2003 IEEE International Electron Devices Meetings, the 2004 IEEE Ultrasonics Symposium, the 2004 DARPA Tech Conference, and the 2004 IEEE Custom Integrated Circuits Conference. In 2001, Professor Nguyen founded Discera, Inc., a company established to commercialize communication products based upon MEMS technology, with an initial focus on the vibrating micromechanical resonators pioneered by his research in prior years. He served as Vice President and Acting Chief Technology Officer (CTO) of Discera from 2001 to mid-2002.
Professor Nguyen received B.S., M.S., and Ph.D. degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley, in 1989, 1991, and 1994, respectively.
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Kristofer S.J. Pister is a professor in the Department of Electrical Engineering and Computer Sciences at the University of California, Berkeley and is a Co-Director of the Berkeley Sensor & Actuator Center. From 1992 to 1997 he was an assistant professor of Electrical Engineering at the University of California, Los Angeles.
He created the term "Smart Dust" and pioneered the development of ubiquitous networks of communication sensors, a concept that has since become a vital sector of technology R&D. During 2003 and 2004 he was on industrial leave as CEO and then CTO of Dust Networks, a company that he co-founded to commercialize low-power wireless sensor networks. In addition to wireless sensor networks, his research interests include MEMS-based microrobotics and low-power circuit design.
Professor Pister received a B.A. degree in applied physics from the University of California, San Diego (1982), and M.S. and Ph.D. degrees in electrical engineering from the University of California, Berkeley (1989/1992).
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Richard M. White is a professor emeritus in the Department of Electrical Engineering and Computer Sciences and a Co-Founding Director of the Berkeley Sensor & Actuator Center. Current research interests include wireless microsensors and energy scavenging devices for use in electric power systems and a portable particulate matter monitor for measuring concentrations of airborne aerosols and diesel exhaust particulates.
Professor White conducted microwave device research at General Electric before joining the faculty of the University of California, Berkeley, in 1962.
Professor White also holds numerous U.S. patents and has co-authored texts and reference books on Solar Cells (1983), Acoustic Wave Sensors (1997), and Electronics (2001). In addition to the 2003 Rayleigh Award of the IEEE for seminal contributions to surface acoustic wave technology, Professor White is a member of the National Academy of Engineering, a Fellow of the IEEE and the American Association for the Advancement of Science, and is the recipient of many academic awards including the IEEE Cledo Brunetti Award (1986), U.C. Berkeley Chancellor's Professorship, and the 2003 U.C. Berkeley Community Service citation award. In 2013, Professor White was a co-recipient of the IEEE/RSE/Wolfson, James Clerk Maxwell Award with Professor Richard Muller.
Professor White received his Ph.D. degree from Harvard University in Applied Physics in 1956.
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Ming C. Wu is Nortel Distinguished Professor of Electrical Engineering and Computer Sciences and Co-director of the Berkeley Sensor & Actuator Center at the University of California, Berkeley. He is also the Faculty Director of UC Berkeley Marvell Nanolab.
From 1988 to 1992, he was a Member of Technical Staff at AT&T Bell Laboratories, Murray Hill, New Jersey. From 1992 to 2004, he was a professor in the Electrical Engineering department at the University of California, Los Angeles, where he also served as Vice Chair for Industrial Affiliate Program and Director of Nano-electronics Research Facility. He has been a faculty member at Berkeley since 2004.
His research interests include MEMS (micro-electro-mechanical systems), MOEMS, semiconductor optoelectronics, nanophotonics, and biophotonics. He has published 8 book chapters, over 200 journal papers and 300 conference papers. He is the holder of 22 U.S. patents. Professor Wu is a Fellow of IEEE and was a Packard Foundation Fellow (1992-1997). He received the 2007 Paul F. Forman Engineering Excellence Award from Optical Society of America.
Professor Wu received M.S. and Ph.D. degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley, in 1986 and 1988, respectively.
See also:

BSAC Researcher Speakers
Plenary Speakers for the BSAC Research Review Session



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