Fall 2011 Conference
September 21 - 23

Plenary 12: Henry Barrow


A Tiny 32-kHz Real-Time Clock Oscillator

While quartz-based clock oscillators can be found in nearly every consumer electronic product sold today, MEMS-based clock oscillators should be able to outperform their quartz counterparts in terms of both form factor and cost. In this talk, the design and fabrication of an ultra-small micromechanical clock resonator will be presented along with a discussion of the scalability and CMOS compatibility of such a device.