Fall 2010 IAB
September 15 to 17

Gabriele Vigevani


Thin Film Aluminum Nitride Technology for MEMS Inertial Sensors

MEMS inertial sensors such as accelerometers and gyroscopes are established products in the automotive, aeronautic and defense markets. These type of sensors are now finding new applications in consumer electronics products such as cell-phones, video cameras and videogames. These large volumes consumer markets require more cost effective and integrated type of sensors. Due to its CMOS compatible fabrication process, aluminum nitride (AlN) is widely used for acoustic wave devices and is now gaining increasing interest for sensor applications. The aim of this project is to develop a CMOS compatible inertial sensors based on AlN. The post CMOS fabrication solution offers the advantage of a better integration with the electronics and ultimately cost effective solution.