Fall 2010 IAB
September 15 to 17

Wei-Chang Li


Quality Factor Enhancement of Micromechanical Resonators at Cryogenic Temperatures

Quality factors as high as 362,768 have been measured for 61-MHz polysilicon wine-glass disk micromechanical resonators operated at cryogenic temperatures down to 5 Kelvin. The measured results not only represent a ~2.5× increase in Q over the room temperature value, but also provide important insight into the intrinsic material damping and other loss mechanisms that dominate over certain temperature ranges.