Fall 2010 IAB
September 15 to 17

Karl Skucha

Nanowires Integrated on CMOS IC for Molecular and Gas Sensing Applications

We report on a process flow to integrate silicon nanowires directly on top of a CMOS substrate. Then, by carefully designing the underlying circuitry and functionalizing the nanowire transducers, we hope to demonstrate a fully functional integrated sensing platform for various molecular agents and gases. The overall goal and application is to create an easy-to-use CMOS-based sensing system for low-cost and low-power applications.