Fall 2010 IAB
September 15 to 17

Stefon Shelton


CMOS-Compatible AlN Piezoelectric Micromachined Ultrasonic Transducers

Ultrasound transducers have a variety of applications including medical imaging, non-destructive testing of materials, and velocity measurement. In this research we are working to fabricate and characterize aluminum nitride piezoelectric micromachined ultrasound transducers (pMUTs) for use in the velocity detection module of a personal navigation unit. Aluminum nitride piezoelectric sensor technology has been chosen to ultimately allow CMOS/MEMS integration on a single chip which will minimize chip size, energy usage, and cost. In this presentation we will be exploring the fabrication, performance and modeling of pMUTs operating at ultrasonic frequencies.