Fall 2010 IAB
September 15 to 17
The unique characteristics of MEMS devices pose new challenges for testing and measurement. This Thrust session will address several facets of the MEMS metrology problem, including new commercial testing solutions, as well as novel measurement techniques developed in-house at BSAC. Solutions to measurement problems encountered in the development of physical sensors, RF MEMS and microfluidic devices will be addressed, as well as circuit architectures and algorithms for self-tuning which can eliminate the need for measurement and trimming.