Fall 2010 IAB
September 15 to 17

Prof. David Horsley

Metrology for Acoustic MEMS

This talk concerns modeling and performance verification tools for micromachined ultrasonic transducers (MUTs) and other acoustic MEMS devices such as microphones. An equivalent circuit model spanning three energy domains (electrical, mechanical, and acoustic) is developed to connect the physical characteristics of the transducer to measured performance criteria (such as output sound pressure level and pressure sensitivity). Electrical, mechanical, and acoustic measurements are described which allow the model parameters to be extracted from experimental data. Example measurements from a piezoelectric micromachined ultrasound transducer (pMUT) are presented.