Fall 2010 IAB
September 15 to 17

Dr. Christian Rembe, Head of Development Optics/Physics, Polytec GmbH


Commercial MEMS Metrology Tools: Microsystems Analyzers

• Measuring Topography and Motions with Light
o White-Light Interferometry and Holography
o Heterodyne Interferometry
o Micro System Analyzer MSA 500
• Measuring MEMS on Wafer Level
o MEMUNITY
o Waferlevel Probe Stations and Optical Sensors
o Fully Automated Production Testing
• Measuring Vibrations at GHz Frequencies with Accuracy
• Outlook