Fall 2010 IAB
September 15 to 17

Prof. Bernhard Boser

Electrical Characterization of MEMS

Readily available relatively low-cost test equipment, high automation, and compatibility with standard test and packaging flows are some of the advantages of electrical characterization of MEMS structures. Traditionally the testing is performed on the factory floor with specialized test equipment. Increasingly characterization circuits are integrated with the device itself, enabling a host of new possibilities such as built-in test or self-calibration to increase the robustness or functionality of a device. We look at circuit solutions for in-device measurement of MEMS resonant frequency with application to strain and inertial sensors.