Fall 2010 IAB
September 15 to 17

Prof. Ming Wu


Metrology for Optical MEMS

Overview of Optical MEMS products
Metrology for micromirrors
Metrology using position-sensing photodiode (PSD)
Metrology for microlens scanners
Metrology for interferometers
Optical spectroscopy
Surface-enhanced Raman spectroscopy (SERS)