Fall 2010 IAB
September 15 to 17

Ernest (Ting-Ta) Yen


Aluminum Nitride RF Components for Wireless Harsh Environment Telemetry

Aluminum nitride Lamb wave resonators operating in air from room temperature up to 600°C are demonstrated. Temperature coefficients of frequency (TCF) of both uncompensated and compensated devices were measured. Silicon oxide layers were used for temperature compensation and reduced the total frequency variation by over 90%. This supports the use of piezoelectric AlN in a material platform for radio-frequency (RF) components and sensing applications in harsh environments.