Fall 2010 IAB
September 15 to 17
Aluminum Nitride Tuning Fork for Inertial Sensing
We will describe the design and fabrication of an Aluminum Nitride-based CMOS compatible Tuning Fork Inertial Measurement Unit (IMU) for position tracking based on three integrated CMOS compatible sensors: a three axis accelerometer, a three axis gyro and a velocity sensor. The IMU also supports a new zero velocity updating or "Zupting" algorithm instead of GPS referencing in order to allow position calculations with minimized accumulated inertial offset and drift errors.