Fall 2010 IAB
September 15 to 17
HEaTS: Aluminum Nitride Inertial Sensors for Harsh Environments
An approach to building piezoelectric MEMS angular rate sensors (gyroscopes) in Aluminum Nitride is presented. Fabrication process and designs of several types of vibratory gyroscopes are illustrated. Experimental results and challenges arising from switching to this new technology are discussed.