Fall 2010 IAB
September 15 to 17

Plenary 4: Yang Lin

Micromechanical Charge Pump

A micro-scale mechanical charge pump comprising a circuit of micromechanical resonant switches (a.k.a., resoswitches) has been demonstrated that generates 2V from a 1V power supply while avoiding the diode voltage drop and breakdown voltage limitations of CMOS-based conventional charge pumps. The use of resonance operation lowers the needed drive and dc-bias voltages to below the supply voltage. This mechanical charge pump now obviates the need for special high voltage CMOS for applications where large voltages are needed, e.g., MEMS-based timing references, thereby allowing the use of virtually any CMOS process for many MEMS-based products.