Fall 2010 IAB
September 15 to 17

Plenary 6: Sarah Nitzan

Epitaxially-Sealed Polysilicon Disk Resonator Gyroscope

We present a 0.6 mm diameter, 20 um thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed- loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(‹/s) and Angle Random Walk (ARW) of 0.006 (‹/s)/ăHz. Without precise control of temperature, the minimum Allan deviation is 3.29 ‹/hr.