Fall 2010 IAB
September 15 to 17

David A. Horsley

Piezoelectric Micromachined Ultrasonic Transducers

Bulk piezoelectric ultrasonic transducers are widely used in industrial applications and medical imaging. The situation is somewhat analogous to the state of inertial sensors some ten to twenty years ago before the widespread commercialization of MEMS gyros and accelerometers. Micromachined ultrasonic transducers are poised to enter existing applications and introduce entirely new applications that take advantage of their small size, low cost, low power consumption, and compatibility with IC manufacturing methods. In this talk, I will discuss some of the challenges faced in the design and manufacture of piezoelectric micromachined ultrasonic transducers (PMUTs) for consumer electronics, medical imaging, and biometrics.