Micro/Nano-Power

Integrated In-Chamber Oxygen Sensor

• The goal of this research is to design, fabricate, and test a wide band oxygen sensor that operates in the combustion zone of a direct injection internal combustion engine. The amperometric sensor is made using microfabrication methods. The sensor will be used to provide feedback current in real time, which is anticipated to enable better adjustment of injector timing resulting in blackuced fuel consumption and emissions.
• Jonathan Rheaume

MEMS Electro-magnetic Valve-Process Development

• The objective of this research is to develop a valve with an actuator for fuel delivery system for a 1500mm3 Wankel engine that operates from 5000 to 35000 RPM. The engine is designed to operate with multi-fuel, such as Kerosene, Methanol, Gasoline and Diesel. This will require flow control over the mass flow rate range of 5 to 20 mg/sec. Integration into a Silicon engine end plate is desiblack for one particular engine application, but the project will deliver a series of prototypes that will be used for testing in other engine applications.
• Eri Takahashi

MEMS Magneto-Static Fuel Valve Actuator

• The goal of this research is to develop a fuel injection system, which delivers the desiblack ratio of air/fuel mixture to 367/1500mm^3 rotary engines. Inkjet is well-developed technology, and is suited for fuel delivery for small scale engines. With proper sensering, very accurate fuel delivery loop can be implemented.
• Sang-Won Park

MEMS Metal Gimbal: Design and Fabrication

• The UC Berkeley MicroGimbal research project strives to parametrically optimize a 2DOF, torsional comb drive actuated gimbal platform that will support and position mm-scale imaging devices. Design parameters to be optimized include but are not limited to: bandwidth, resonant frequency, payload capability, system mass, and degree of rotation. This two-student research team ultimately seeks to attain performance measures of low power consumption (P < 2W), large gimbal deflection (? = +/- 30 deg.), high z-stiffness, high bandwidth, and high resonant frequency (f >1kHz).
• Chris McCoy

MEMS Metal Gimbal: Design and FEM

• The long range goal of this research is to analyze the UC Berkeley MircoGimbal with a finite element method (FEM) simulator, ANSYS, to achieve design optimization. A fundamental design goal of the MicroGimbal is to maximize the rotation angle (current target is +/- 30 degrees) while minimizing the stress. Theortically, it can be obtained by having cross section with low moment of inertia and long length. However, low moment of inertia and long length blackuce the beams ability to support the payload in z-direction. Due to these competing phenomena, optimization of the UC Berkeley MicroGimbal elements is essential.
• Ya-Mei Chen

Polymer & Bio & Nano

Active Filtration and Sensing using Unsupported Bilayer Lipid Membranes

• The goal of this project is to develop a robust, reusable, and automated micro-fluidic platform for the manipulation and use of integral membrane proteins and membrane associated proteins. In particular, the goal will be to use an artificially assembled phospholipid bi-layer membrane as an armature for -hemolysin (a virulence factor?engineeblack integral membrane proteins, such as responsible for the lysis of black blood cells). This functionalized membrane will be tested as an active “filtration?element in a sample preparation system, as a stand alone sensing platform with integrated electronics, and as a tool for examining cellular processes at the occurring at or near the membrane.
• Thomas H. Cauley III

Biomimetic, Polymeric Transistor-based Biosensor Technology

• The goal of this research is the creation of robust, flexible, polymer sensors and circuits fabricated from the polysaccharide, chitosan. The sensors will detect diatomic gases and DNA to more complex macro molecules (e.g. exotoxins) in a fluidic or dry environment. Polymer-nanoparticle (ex. CdS) hybrid films allow for development of robust, polymer thin-film transistors and, with optimization of the hybrid film, sensitive photodetectors. These transistors will be developed into gas or chemical sensors through functionalization of the polymer active layer or dielectric with proteins specific to a target analyte. This technology will enable the development of integrated polymer sensors and electronics which are low-cost, robust and highly versatile due to the replacement of semiconductor, dielectric and possibly metal layers with polymers and minimal thermal budget.
• Jim C. Cheng

Micro/Nano Electrode for Electrophysiological Measurement of Biological Cells

• Our long term goal is to develop an in-vitro intra / extracellular protein analysis system by taking advantage of nanotechnology. Thus far, a variety of methods have been developed for the detection of proteins and biomolecules : flight-of-time mass spectroscopy, electrophoresis, immunofluorescence, etc. However, these existing methods are not yet suitable for in-vitro analysis, require high analyte concentration and large cell population, and do not provide spatial information in cellular level. Our approach is to use a microneedle integrated with silicon nanowire chemical sensor for the extracellular / intracellular protein detection.
• Inkyu Park

Bubble Time-of-Flight Flow Sensor

• As focus has intensified on the miniaturization of bio-analysis and medical devices the problem of measuring sub-nanoliter flows is becoming more prominent. At the same time, the expense of traditional MEMS style manufacturing is an ever larger hurdle to commercialization of MEMS and NEMS products. To this end, this project looks to make an accurate flow sensor/dosimeter of for low Reynolds number and low flow rate flows.
• Julian Lippmann, Nicola Fung

MEMS Biopolymer: Polymer Coated Cantilevers for Infrared Heat Sensing

• The goal of this research is to use biomimetics to develop an uncooled, photomechanic infrared sensor formed from a cantilever bimorph. One side of the bimorph uses chitin (or potentially other polymers) in order to achieve a high thermal mismatch and maximize deflection. The objective is to maximize deflection for a given amount of incidient infrared radiation. Our design is inspiblack by the jewel beetle Melanophila acuminata, which has an IR-sensitive pit organ for the remote detection of forest fires, an evolutionary advantage that allows it to lay eggs in an area free of pblackators. The material found in the pit organ, the polysaccharide chitin, stretches photomechanically in response to select wavelengths of IR radiation. We are developing a fabrication process to integrate chitin into the cantilever bimorphs, in order to transduce the photomechanical stretching due to the IR for use as an infrared imager.
• Michael T. Mueller

MEMS RF-Interrogated Biosensor (MIB): Sensor Design

• An interdisciplinary research program bridging the domains of biochemistry, radiofrequency I.D. tags, telecommunications, and intelligent network interface is outlined. In this proposal is described a MEMS RF-Interrogated Biosensor (MIB). The MIB is a microfabricated structure that can communicate biometric data to a reader a few feet away. The use of a passive device enables to build a cheap, powerless and wireless biosensor.
• Sebastien Payen

MEMS RF-Interrogated Biosensor MIB:Hydrogel Formulation

• The goal of this research project is to make hydrogels fully compatible with microfabrication processes. Hydrogels are polymers whose matrix swell when in contact with water. Our hydrogels will be able to change reversibly and reproducibly their volume by swelling or contracting in response to their environmental changes. In order to achieve this project, we will alter viscosity of the hydrogel solution to make it easier to spin coat, conduct a design of experiment to optimize hydrogel patterning, characterize hydrogel swelling and functionalize hydrogels to respond to different stimuli (like temperature, glucose, and pH). The hydrogel will be used as a transducer in the MEMS RF-Interrogated Biosensor (MIB).
• Supone Manakasettharn

Micro Plastic Injection Molding - Plastic Microfluidic Chip with Thermally Actuated Hydrogel Valves

• The goal of this project is to develop a polymer microfluidic system to test system level performance. The chip will be plastic injection molded with integrated fluidic interconnects. Polymer film with patterned metal traces will be used to enclose the channel. The traces will allow simple control elements such as heaters and electrodes to be integrated into the chip. Previous work at UC Berkeley has developed a thermal sensitive hydrogel valve that can be lithographically patterned. This valve will be incorporated into the chip and actuated via on-chip heaters. A test assay will be performed in this device to measure system level parameters such as frequency, accuracy, and repeatability.
• Emil J. Geiger

Micro Plastic Injection Molding: Microneedle Molding

• This project along with APP79 investigates the manufacturing and integration of um scale plastic parts through injection molding. Emphasis is placed on developing robust, but simple fabrication methods capable of molding microneedles 100um X 100um hollow tubes. The issues to be addressed span the micro and meso regimes. At the microscale effort focuses on creating accurate, robust molds that can deliver MEMS scale needles. On the mesoscale, Plastic injection materials and processes are being investigated to yield optimum results.
• Julian Lippmann

Radar Absorbing Colloidal Suspensions (RACS)

• The development of new technology for narrowband high frequency microwave radiation absorption is described. The proposed technology integrates nanoscale magnetic materials, novel solution phase chemistry, and injection molded microfluidics in a single package for the realization of a circulatory network with tunable microwave energy absorption. Specifically, we will utilize the unique physical properties of colloidal suspensions of superparamagnetic nanoparticles in microfluidic networks to generate high performance, narrow band (multispectral) microwave absorbing systems based on the absorption of magnetic field energy by the suspended particles. Applications include RF modulation for stealth applications, communications interference, biomolecular tagging, nanopatterning and fabrication, and biomagneto-defense.
• Nicola Fung

Harsh Environment MEMS/NEMS

MEMS Strain Gauge on Steel - Miniaturization of Transduction Circuits

• The Research and Development proposed herein will improve the operating characteristics of traditional machine elements and the applications to which they contribute through the development and application of MEMS microstructures in two major categories. First, we will develop low-cost MEMS strain-sensing modules and the means to rapidly bond them to steel and other structures in large quantities. In addition to wire-based solutions, we will also develop modules for wireless data telemetry and power coupling to enable total systems-level solutions for the MEMS sensor modules. This will open the door toward providing low-cost load sensing for many applications. MEMS-based strain sensors offer much smaller gauge length (< 500 mm) than commercially available foil-type gauges.
• Anand Jog, David Myers

MEMS Strain Gauge on Steel: Strain Gauge System Design

• The MEMS silicon strain gage can be oriented and placed on round tubing such that it can be utilized as a torque measurement device. To this extent, a shear strain application system has been designed and is currently being constructed. This device utilizes a common automotive halfshaft, a component which would see fairly high torques during its lifetime and could benefit from torque monitoring systems. Once completed, testing will begin to evaluate strain transfer as well as device performance under high strain.
• David Myers

MEMS Strain Gauge on Steel: Telemetry

• Our long term goal is to prototype and evaluate short-range wireless strain sensors for automobile telemetry. The primary function is to bypass wires connecting individual automobile sensors to the onboard base station. This enables data collection from components traditionally difficult to reach using wires, such as the driveshaft. Other data (i.e. suspension, chassis) may also be analyzed wirelessly. The data can then be collected for future analysis, and/or transmitted off the vehicle via a separate radio.
• Ryan Xie

SiC TAPS Sensors for Extreme Harsh Environments

• The goal of this research program is to deliver a sensor module with MEMS-based silicon carbide TAPS (Temperature, Acceleration, Pressure and Strain) sensors integrated with SiC interface circuits for extreme harsh environment applications.
• Muthu Wijesundara, Robert Azevedo

SiC TAPS: Capacitive Sensor Design and Fabrication

• The main objective of the project is to design and fabricate capacitive gauges capable of performance under harsh environments. The main focus of the project is to develop a strain gauge to measure strain at micron scale to improve the operational characteristics of its substrates in applications such as automotive industry. Contrary to traditional and commercial strain gauges, temperature and aging have a relatively small influence on the sensitivity and precision of this type of sensor. Three major goals have been set for the course of research. The most prior goal is to resolve the cross-axis strain sensitivity using a mechanically compliant design. The next goals are to maintain high sensitivity, resolution and manufacturability for the sensor. This strain sensor is capable of measuring micro-strain (10e-6) with a gauge length less than 1 mm and also operates by in-situ mounting on the substrates. This static gauge maintains enough sensitivity and linearity over a wide range of temperatures and harsh environments. In particular, a differential capacitive method is used to transduce strain into an electrical signal via capacitive sensing. A high-g harsh environment resistant accelerometer is also part of the promise of this project. This accelerometer will be capable of high-g shocks measurement.
• Babak Jamshidi

SiC TAPS: Characterization of Silicon Carbide Ion Beam Assisted Deposition (IBAD) Films

• Silicon Carbide (SiC) is an appealing material for harsh environment MEMS applications. It can be sputteblack at low temperatures by an Ion-Beam Assisted Deposition (IBAD) system to produce amorphous thin-films and vacuum encapsulations. The goal of this project is to investigate the stress-temperature relation of these amorphous SiC films in order to calculate their biaxial moduli and coefficients of thermal expansion. The “double-substrate technique?is employed to compare the differences in these properties for films that are sputteblack both with and without ion-beam assistance on quartz and silicon substrates. Characterizing these films will determine if certain issues, such as thermal and stress mismatches, will pose a problem in certain applications.
• Matt Chan

SiC TAPS: Ion Beam Assisted Deposition (IBAD) Encapsulations

• The goal of this project is to develop a low temperature, wafer-level vacuum encapsulation technique for harsh environment, silicon carbide (SiC) sensors.
• Debbie G. Jones

SiC TAPS: Resonator Design and Optimization

• The goal of this work is to deliver a sensor module with MEMS-based silicon carbide TAPS sensors integrated with SiC interface circuits for extreme harsh environment applications.
• Benjamin Cheng

MEMS/NEMS RF Resonator

MEMS Aluminum Nitride: RF Filters

• The goal of this project is to use piezoelectric Aluminum Nitride (AlN) MEMS contour mode resonators to develop RF bandpass filters which can achieve multi-frequency per chip, CMOS compatibility and high quality factor Q. The highly-integrated bandpass filter arrays with low power dissipation and small form factor, will be promising technology to accomplish next-generation wireless communication systems.
• Yun-Ju (Matilda) Lai

MiNaSIP 2.B.2/3: MEMS Aluminum Contour Mode Accelerometer

• The purpose of this project is to investigate the use of Aluminum-Nitride (AlN) thin films in accelerometer design. Aluminum Nitride is attractive in this regard as the piezoelectric properties of AlN remove the need for electrostatic comb structures for position sensing and the deposition of AlN is viable material for post-CMOS MEMS fabrication. The long-term objective of this project is to realize self-temperature compensating resonators through choice of electrode, sacrificial, and substrate materials; and to quantify energy dissipation caused by thermo piezo elastic dissipation at piezo/electrode boundary in piezoelectrical RF resonators.
• Andrew Cardes

MiNaSIP 2.B.2: MEMS Aluminum Nitride Resonance Mechanisms

• The long-term objective of this project is to realize self-temperature compensating resonators through choice of electrode, sacrificial, and substrate materials. In this work, a post-CMOS compatible 3-D AlN-DETF accelerometer is being designed which uses strain in double ended tuning fork (DETF) resonators to determine local accelerations. As the resonant frequency of MEMS devices is a function of strain, measuring the frequency change allows calculation of the force. However, frequency fluctuation induced by temperature variations is the primary concern to the ultimate performance of this and other devices, currently limiting reference oscillator performance in terms of frequency stability and phase noise. Careful control of the interfaces between electrode, resonator, and potentially other materials, should allow the implementation of very efficient and passive schemes for temperature compensation. As a result, ultra stable and temperature insensitive frequency reference elements will be possible.
• Ernest Ting-Ta Yen

MiNaSIP 2.B.3: MEMS Aluminum Nitride Resonant Accelerometers

• The aim of this project is to design a Double Ended Tuning Fork (DETF) based accelerometer made of Aluminium Nitride (AlN) ?a piezoelectric material ?and through this structure to study the energy loss caused by thermo piezo elastic damping. These studies will result in improvements in Q of piezoelectric resonant devices and structures. Differently from conventional DETF accelerometers, where the acceleration is measublack by sensing the shift of the natural frequency of axially loaded vibrating beams, the device we intend to investigate will take advantage of other beam deformations for which the flexural natural frequency will be more sensitive. The long-term objective of this project is to quantify energy dissipation caused by thermo piezo elastic dissipation at piezo/electrode boundary in piezoelectrical RF resonators.
• Gabriele Vigevani