Research Review Project Abstracts (Public)

September 17-19, Berkeley, California

Report printed on Saturday 20th 2014f September 2014 05:06:34 PM

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Number of records: 98
RESEARCH THRUSTPOSTER #PROJECT ID
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PROJECT TITLEAdvisor
Physical Sensors & Devices1BPN770Chemical Sensitive Field Effect Transistor (CS-FET) New ProjectAli Javey
NanoTechnology: Materials, Processes & Devices2BPN776Wearable electronic-tape New ProjectAli Javey
Physical Sensors & Devices3BPN746Liquid Heterojunction SensorsAli Javey
Physical Sensors & Devices4BPN747Electronic Skin: Fully Printed Electronic Sensor NetworksAli Javey
NanoTechnology: Materials, Processes & Devices5BPN704Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on MetalAli Javey
NanoTechnology: Materials, Processes & Devices6BPN694Monolayer Semiconductor DevicesAli Javey
BioMEMS7BPN756MEMs Devices for Oral Delivery of Proteins and Peptides New ProjectDorian Liepmann, Niren Murthy
BioMEMS8BPN757Biosensors Based on Biologically Responsive Polymers New ProjectDorian Liepmann, Niren Murthy
BioMEMS9BPN622Design of an Ex-Vivo Prototype of a Bioartificial KidneyDorian Liepmann, Shuvo Roy
BioMEMS10BPN729Development of Microfluidic Devices with Embedded Microelectrodes using Electrodeposition and Hot EmbossingDorian Liepmann
Microfluidics11BPN711Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based SensorsDorian Liepmann
Microfluidics12BPN732The Role of Erythrocyte Size and Shape in Microchannel Fluid DynamicsDorian Liepmann
Microfluidics13BPN621Microfluidic Separation of Blood for SIMBAS BiosensorDorian Liepmann
Wireless, RF & Smart Dust14BPN766Active Q-Control for Improved Insertion Loss Micromechanical Filters New ProjectClark T.-C. Nguyen
Wireless, RF & Smart Dust15BPN767MEMS-Based Tunable Channel-Selecting Super-regenerative RF Transceivers New ProjectClark T.-C. Nguyen
Wireless, RF & Smart Dust16BPN359Micromechanical Disk Resonator-Based OscillatorsClark T.-C. Nguyen, Elad Alon
Wireless, RF & Smart Dust17BPN540Temperature-Stable Micromechanical Resonators and FiltersClark T.-C. Nguyen
Package, Process & Microassembly18BPN734Package-Derived Influences on Micromechanical Resonator StabilityClark T.-C. Nguyen
Physical Sensors & Devices19BPN534Fully-Integrated Micromechanical Clock OscillatorClark T.-C. Nguyen
Wireless, RF & Smart Dust20BPN707High-Order Micromechanical Electronic FiltersClark T.-C. Nguyen
Physical Sensors & Devices21BPN433A Micromechanical Power ConverterClark T.-C. Nguyen
Physical Sensors & Devices22BPN435A Micromechanical Power AmplifierClark T.-C. Nguyen
Wireless, RF & Smart Dust23BPN682Strong I/O Coupled High-Q Micromechanical FiltersClark T.-C. Nguyen
Wireless, RF & Smart Dust24BPN676Q-Boosted Optomechanical OscillatorsClark T.-C. Nguyen, Ming C. Wu
Wireless, RF & Smart Dust25BPN701Bridged Micromechanical FiltersClark T.-C. Nguyen
Wireless, RF & Smart Dust26BPN709Tunable & Switchable Micromechanical RF FiltersClark T.-C. Nguyen
NanoPlasmonics, Microphotonics & Imaging27BPN651Low Power, Low Noise Cavity Optomechanical OscillatorsMing C. Wu, Clark T.-C. Nguyen
NanoPlasmonics, Microphotonics & Imaging28BPN703Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light EmissionMing C. Wu
NanoPlasmonics, Microphotonics & Imaging29BPN721MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) Component Fabrication, Design, and CharcterizationMing C. Wu
NanoPlasmonics, Microphotonics & Imaging30BPN751Large-Scale MEMS Silicon Photonics SwitchMing C. Wu
NanoPlasmonics, Microphotonics & Imaging31BPN609Ultra-Sensitive Photodetectors on Silicon PhotonicsMing C. Wu
NanoPlasmonics, Microphotonics & Imaging32BPN458Optical Antenna-Based nanoLEDMing C. Wu
Microfluidics33BPN552Light-Actuated Digital Microfluidics (Optoelectrowetting)Ming C. Wu
Microfluidics34BPN733Optoelectronic Tweezers for Long-Term Single Cell CultureMing C. Wu, Song Li
Physical Sensors & Devices35BPN599MEMS Electronic Compass: Three-Axis MagnetometerDavid A. Horsley
Physical Sensors & Devices36BPN466Air-Coupled Piezoelectric Micromachined Ultrasound TransducersDavid A. Horsley
Physical Sensors & Devices37BPN628Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)David A. Horsley
Physical Sensors & Devices38BPN603Micro Rate-Integrating GyroscopeDavid A. Horsley
Physical Sensors & Devices39BPN655Materials for High Quality-Factor Resonating GyroscopesDavid A. Horsley
Physical Sensors & Devices40BPN684Integrated Microgyroscopes with Improved Scale-Factor and Bias StabilityDavid A. Horsley
Microfluidics41BPN773High-throughput hiPS-HP-based Organ-on-a-chip Platforms for Drug Development New ProjectLuke Lee
Microfluidics42BPN723Organ-on-a-Chip for Personalized Medicine DevelopmentLuke P. Lee
Microfluidics43BPN730Microfluidic Blood Plasma Separation for Point-of-Care DiagnosticsLuke P. Lee
NanoTechnology: Materials, Processes & Devices44BPN727On-Chip Single Molecule miRNA Detection for Cancer DiagnosisLuke P. Lee
Microfluidics45BPN679Integrated Quantitative Molecular Diagnostics on a Microfluidic ChipLuke P. Lee
Physical Sensors & Devices46BPN772Graphene for Flexible and Tunable Room Temperature Gas Sensors New ProjectLiwei Lin
Microfluidics47BPN7743D Printed Integrated Microfluidic Circuitry New ProjectLiwei Lin, Luke P. Lee
Microfluidics48BPN775Integrated Microfluidic Circuitry via Optofluidic Lithography New ProjectLiwei Lin, Luke P. Lee
Physical Sensors & Devices49BPN687Robust Optical Flame Detection in Harsh EnvironmentsLiwei Lin
NanoTechnology: Materials, Processes & Devices50BPN736Atomic Layer Deposition Ruthenium Oxide SupercapacitorsLiwei Lin
NanoTechnology: Materials, Processes & Devices51BPN672Solar Hydrogen Production by Photocatalytic Water SplittingLiwei Lin
Micropower52BPN737Graphene-based Microliter-scale Microbial Fuel CellsLiwei Lin
Micropower53BPN7423D Carbon-based Materials for Electrochemical ApplicationsLiwei Lin
Physical Sensors & Devices54BPN743Highly Responsive Curved pMUTsLiwei Lin
BioMEMS55BPN715Stimuli Responsive Capsules for Drug Delivery and Diagnostic ApplicationsLiwei Lin
Wireless, RF & Smart Dust56BPN574On-Chip Micro-InductorLiwei Lin
Microfluidics57BPN706Single-Layer Microfluidic Gain Valves via Optofluidic LithographyLiwei Lin
NanoTechnology: Materials, Processes & Devices58BPN606Carbon Nanotube Films for Energy Storage ApplicationsLiwei Lin
Physical Sensors & Devices59BPN764Untethered Stress-engineered MEMS MicroFlyers New ProjectIgor Paprotny
Physical Sensors & Devices60BPN738Sensor Instrumentation to Improve Safety of U.S. Underground Coal MinesRichard M. White, Igor Paprotny, Paul K. Wright, Lara Gundel
Wireless, RF & Smart Dust61BPN392Mobile Airborne Particulate Matter Monitor for Cellular DeploymentRichard M. White, Lara Gundel, Igor Paprotny
Micropower62BPN562AC Energy Scavenging for Smart Grid SensingRichard M. White, Igor Paprotny
Physical Sensors & Devices63BPN697Natural Gas Pipeline ResearchRichard M. White, Paul K. Wright, Igor Paprotny
Wireless, RF & Smart Dust64RMW29Electric Power Sensing for Demand ResponseRichard M. White, Paul K. Wright
Micropower65BPN654Electret-Based Voltage Sensing and Energy Harvesting from Energized ConductorsRichard M. White, Paul K. Wright, Igor Paprotny
Physical Sensors & Devices66BPN505Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart GridRichard M. White, Paul K. Wright, Igor Paprotny
Package, Process & Microassembly67BPN480AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Foundry TransferJohn M. Huggins
Package, Process & Microassembly68BPN354The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication for MEMS, Microfluidics, Nano and Clean Technologies at the UC Berkeley NanoLabJohn M. Huggins
Package, Process & Microassembly69BPN712Bridging Research-to-Commercialization Gaps through Facilitated IntermediariesJohn M. Huggins
Physical Sensors & Devices70BPN753Ratio-metric Readout Technique for MEMS Gyroscopes with Force FeedbackBernhard E. Boser
Physical Sensors & Devices71BPN608FM GyroscopeBernhard E. Boser
BioMEMS72BPN649Magnetic Particle Flow CytometerBernhard E. Boser
BioMEMS73BPN685Real-Time Intraoperative Fluorescent Imager for Microscopic Residual Tumor in Breast CancerBernhard E. Boser
Physical Sensors & Devices74BPN722Miniature Ultrasonic imaging system for portable personal health care and biometric identificationBernhard E. Boser
NanoPlasmonics, Microphotonics & Imaging75BPN665MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) System Demonstrator: High Resolution FMCW LADARBernhard E. Boser
Wireless, RF & Smart Dust76BPN683OpenWSN: A Standards-Based Low-Power Wireless Development EnvironmentKristofer S.J. Pister
Wireless, RF & Smart Dust77BPN735Autonomous Microrobotic SystemsKristofer S. J. Pister
Wireless, RF & Smart Dust78BPN744Self-Destructing SiliconKristofer S.J. Pister, Michel M. Maharbiz
Wireless, RF & Smart Dust79BPN713Ring GINA: Highly Miniaturized Ring-Format Wearable MoteKristofer S.J. Pister
Physical Sensors & Devices80BPN768Plug-Through Energy Monitor for Wall Outlet Electrical Devices New ProjectKristofer S.J. Pister
Micropower81BPN648Fully-Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting ApplicationsKristofer S.J. Pister
Physical Sensors & Devices82BPN705Standard CMOS-Based, Fully Integrated, Stick-On Electricity Meters for Building Sub-MeteringKristofer S.J. Pister, Steven Lanzisera
Wireless, RF & Smart Dust83BPN596Smart Fence and Other Wireless Sensing Applications for Critical Industrial EnvironmentsKristofer S.J. Pister
Physical Sensors & Devices84BPN765Full-field Strain Sensor for Hernia Mesh Repairs New ProjectMichel M. Maharbiz
BioMEMS85BPN769Acousto-optic modulation of brain activity: Novel techniques for optogenetic stimulation and imaging New ProjectMichel M. Maharbiz
BioMEMS86BPN699A Modular System for High-Density, Multi-Scale ElectrophysiologyMichel M. Maharbiz, Timothy J. Blanche
BioMEMS87BPN745Wafer-Scale Intracellular Carbon Nanotube-Based Neural ProbesMichel M. Maharbiz
BioMEMS88BPN716Neural Dust: An Ultrasonic, Low Power Solution for Chronic BrainMachine InterfacesMichel M. Maharbiz
BioMEMS89BPN718Direct Electron-Mediated Control of Hybrid Multi-Cellular RobotsMichel M. Maharbiz
Physical Sensors & Devices90BPN714Electronic Bandage for Wound HealingMichel M. Maharbiz
Physical Sensors & Devices91BPN731Flexible Electrodes and Insertion Machine for Stable, Minimally-Invasive Neural RecordingMichel M. Maharbiz, Philip N. Sabes
BioMEMS92BPN573Carbon Fiber Microelectrode Arrays for Chronic Stimulation and Recording in InsectsMichel M. Maharbiz, Kristofer S.J. Pister
BioMEMS93BPN571Implantable Microengineered Neural Interfaces for Studying and Controlling InsectsMichel M. Maharbiz
NanoTechnology: Materials, Processes & Devices94BPN518Synthetic Turing PatternsMichel M. Maharbiz, Murat Arcak
BioMEMS95BPN771Silicon Carbide ECoGs for Chronic Implants in Brain-Machine Interfaces New ProjectMichel M. Maharbiz, Roya Maboudian
Physical Sensors & Devices96BPN763Surface Acoustic Wave Based Sensors for Harsh Environment Applications New ProjectRoya Maboudian
NanoTechnology: Materials, Processes & Devices97BPN762Microheater-Based Platform for Catalytic Gas Sensing New ProjectRoya Maboudian, Willi Mickelson, Alex Zettl
Physical Sensors & Devices98BPN424Silicon Carbide Technology for Harsh Environment Sensing and Energy ApplicationsRoya Maboudian, Carlo Carraro




Research Abstracts


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Physical Sensors & Devices
ProjectIDBPN770 New Project
Project title Chemical Sensitive Field Effect Transistor (CS-FET)
Status of the Project New
fundingsource of the Project NSF
Keywords of the Project CS-FET, Gas Sensor, microfabrication, TMO
Researchers Hossain M. Fahad, Hiroshi Shiraki
Time submitted Tuesday 02nd of September 2014 08:48:54 AM
Abstract Silicon IC based fabrication processing will be used to develop novel compact gas sensors that, unlike current sensors, will operate at room temperature, consume minimal power, exhibit superior sensitivity, provide chemical selectivity and multi-gas detection capabilities and offer the prospect of very low cost replication for broad area deployment. We name this device structure “Chemical Sensitive FET” or “CS-FET”. The operation of the CS-FET involves transistor parametric differentiation under influence of differentiated gas exposures.
Contact Information hossain.fahad@berkeley.edu, shiraki@berkeley.edu
Advisor Ali Javey

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN776 New Project
Project title Wearable electronic-tape
Status of the Project New
fundingsource of the Project NSF
Keywords of the Project
Researchers Hiroki Ota, Kevin Chen
Time submitted Friday 15th of August 2014 09:50:03 PM
Abstract We demonstrate a high-performance wearable piezoelectric electronic-tape (E-tape) for motion sensing based on a carbon nanotube (CNT)/silver nanoparticle (AgNP) composite encased in PDMS and VHB flexible thin films. E-tape sensors directly attached to human skin exhibit fast and accurate electric response to bending and stretching movements which induce change in conductivity with high sensitivity. Furthermore, E-tape sensors for a wide range of applications can be realized by the combination of controlling the concentration of AgNPs in the CNT network and designing appropriate device architectures. The reliability and scalability of E-tape sensors combined with compatibility with conventional micro-fabrication open up new routes for integration of nanoelectronics into flexible human interfaces at the system level.
Contact Information hiroki.ota@berkeley.edu, kqchen37@gmail.com
Advisor Ali Javey

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Physical Sensors & Devices
ProjectIDBPN746
Project title Liquid Heterojunction Sensors
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project Microfluidics, flexible, sensor, hetero-junction
Researchers Kevin Chen, Hiroki Ota
Time submitted Wednesday 13th of August 2014 11:06:22 AM
Abstract In recent years, mechanically deformable devices and sensors have been widely explored for various applications such as paper-thin displays and electronic skin for prosthetics and robotics. Liquids are extremely deformable and have shown promise for these applications, with previous works demonstrating pressure sensors with the ability to be stretched by up to 250% before failure. However, current technology is limited to a single liquid material as liquids tend to intermix when placed together, limiting the range of sensors that can be achieved. Here, in this work, we show a new concept for a liquid-liquid “hetero-junction” temperature sensor with liquid InGaSn metal as a passive interconnect and an imidazolium based ionic liquid as the active sensing element. By proper choice of liquids and design of the liquid-liquid interface, we are able to prevent the liquids from mixing, leading to exciting prospects for more complex liquid based flexible electronics.
Contact Information kqchen@eecs.berkeley.edu, hiroki.ota@berkeley.edu
Advisor Ali Javey

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Physical Sensors & Devices
ProjectIDBPN747
Project title Electronic Skin: Fully Printed Electronic Sensor Networks
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project Flexible, printed electronics, thin film transistor
Researchers Kevin Chen
Time submitted Wednesday 13th of August 2014 10:50:28 AM
Abstract Large area networks of sensors which are flexible and can be laminated conformally on nonplanar surfaces can enable many different applications in areas such as prosthetics, display technology, and remote stimuli monitoring. For large area applications, printed electronics are favorable over traditional photolithography and shadow mask technology from a cost and throughput point of view and we demonstrate proof-of-concept for such a printed “electronic skin” system by printing a carbon nanotube based thin film transistor (TFT) active matrix backplane using a reverse roll to plate gravure printing design. This design allows for yields of up to 97% with printing conducted in an ambient environment and mobilities of up to 9 cm2/V⋅s, the highest reported for a fully printed TFT. Pressure sensors are then integrated onto the active matrix backplane, which enables mapping of the pressure profile across the active matrix area. In the future, this could be integrated with other types of sensors and devices to enable more functionality.
Contact Information kqchen@eecs.berkeley.edu
Advisor Ali Javey

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN704
Project title Vapor-Liquid-Solid Growth of Polycrystalline Indium Phosphide Thin Films on Metal
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project Solar Cells, Photovoltaics, Indium Phosphide, InP, VLS, Thin Film
Researchers Maxwell Zheng, Mark Hettick, Joy Wang, Weitse Hsu
Time submitted Tuesday 12th of August 2014 01:48:19 PM
Abstract Here, we develop a technique that enables direct growth of III-V materials on non-epitaxial substrates. Here, by utilizing a planar liquid phase template, we extend the VLS growth mode to enable polycrystalline indium phosphide (InP) thin film growth on Mo foils.
Contact Information mszheng@eecs.berkeley.edu
Advisor Ali Javey

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN694
Project title Monolayer Semiconductor Devices
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project Monolayer; Layered chalcogenide; Electronics
Researchers Mahmut Tosun
Time submitted Wednesday 13th of August 2014 11:04:21 AM
Abstract Monolayer chalcogenides have recently been shown promising for future scaled electronics. We've reported high performance field-effect transistors based on single layered (thickness, ~0.7 nm) WSe2 as the active channel with chemically doped source/drain contacts and high-κ gate dielectrics. The top-gated monolayer transistors exhibit a high effective hole (electron) mobility of ~250 (110) cm^2/Vs, perfect subthreshold swing of ~60 mV/dec, and ION/IOFF of >10^6 at room temperature. Special attention is given to lowering the contact resistance for electron or hole injection by degenerate surface dopings. The results here present a promising material system and device architecture for monolayer transistors with excellent characteristics.
Contact Information mtosun@lbl.gov
Advisor Ali Javey

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BioMEMS
ProjectIDBPN756 New Project
Project title MEMs Devices for Oral Delivery of Proteins and Peptides
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project MEMS, Oral Drug Delivery
Researchers Kiana Aran, Jacobo Paredes
Time submitted Tuesday 12th of August 2014 10:35:09 PM
Abstract Oral delivery of proteins and large molecule drugs has been a challenge due to the denaturing effects of digestive environment, enzymatic destruction and poor GI mucus permeability, leading to extremely low drug bioavailability and therapeutic efficacy. In spite of considerable efforts over the past decades, oral delivery of proteins and large molecule drugs with low therapeutic efficacy and bioavailability remains a major challenge. There is a great need for a suitable oral delivery system which can maintain the protein integrity, improve bioavailability and overcome the mucus barrier for maximum absorption. MucuJet is a high pressure jet-injector oral pill, for oral to systemic delivery of drugs. MucuJet can protect drugs from digestive destruction and can eject drugs with high pressure in the lumen of small intestine which can penetrate intestinal mucus, thereby overcoming the limitation associated with low diffusion rate across mucosal barrier. The feasibility of using MucuJet for enhancing intestinal absorption was tested in vitro which indicated that MucuJet is capable of high velocity drug release and is able to increase protein absorption in short amount of time with no significant effect on cell viability.
Contact Information k.aran@berkeley.edu
Advisor Dorian Liepmann, Niren Murthy

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BioMEMS
ProjectIDBPN757 New Project
Project title Biosensors Based on Biologically Responsive Polymers
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project Reactive oxygen species
Researchers Kiana Aran, Jacobo Paredes
Time submitted Tuesday 12th of August 2014 10:38:55 PM
Abstract This project presents the design, fabrication and testing of a novel lab-on-a-chip (LOC) sensor which utilizes a novel stimuli responsive polymer for early detection of circulating reactive oxygen species (ROS) such as hydroperoxides in blood. The portable lab-on-a-chip sensor, termed ROC, is composed of interdigitated electrodes (IDE) coated with a thin film of ROS responsive polymer. ROS leads to cleavage of the cross-linking moiety and degradation of the polymer from the surface of the IDE, and generates a measurable electrical signal that correlates with the amount of hydroperoxides present in the sample. Circulating hydroperoxides mainly lipid hydroperoxides are the primary biomarker of lipid oxidation, which lead to cell damage, inflammation and accumulation of lipid-loaded macrophages, key mediators in development of atherosclerosis. Moreover, circulating lipid hydroperoxides can predict cardiovascular events in patients with a history of cardiovascular diseases. Conventional fluorescence assays to quantify the amount of hydroperoxides in blood are expensive, require advanced instrumentation and have low sensitivity. This technology can be utilized as an accurate, cost-effective, and fast mean of assessing and monitoring lipid hydroperoxides, for effective management of cardiovascular diseases in routine clinical practices.
Contact Information k.aran@berkelely.edu
Advisor Dorian Liepmann, Niren Murthy

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BioMEMS
ProjectIDBPN622
Project title Design of an Ex-Vivo Prototype of a Bioartificial Kidney
Status of the Project Completed
fundingsource of the Project Fellowship
Keywords of the Project Microfluidics, BioMEMS, Artificial Kidney, Medical Devices
Researchers Peter Soler
Time submitted Monday 11th of August 2014 10:04:35 PM
Abstract The goal of this project is to design, fabricate, and study a bioartificial kidney. The motivation behind the project is to further the development toward an implantable bioartificial human kidney that will improve quality of life and reduce cost for end stage renal disease (ESRD) patients. My proposed device contains two units: i) a hemofilter based upon nanoporous silicon membranes, and ii) a bioreactor composed of kidney proximal tubule (PT) cells. The focus of my study is to develop a device design that is optimized for adequate mass transport so as to mimic natural kidney function. The Roy group has pioneered work in membranes that have been engineered with the use of silicon- based microfabrication techniques to attain pore slits with a height of 8 11 nm. The fabricated nanoporous membranes allow for a device with tight pore size distribution, complete immunoisolation, and durability. These are critical membrane specifications that make them well suited for this application.
Contact Information soler@berkeley.edu
Advisor Dorian Liepmann, Shuvo Roy

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BioMEMS
ProjectIDBPN729
Project title Development of Microfluidic Devices with Embedded Microelectrodes using Electrodeposition and Hot Embossing
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project
Researchers Jacobo Paredes, Kathryn Fink, Marc Chooljian
Time submitted Wednesday 13th of August 2014 08:34:20 AM
Abstract The use of microfluidic devices has experienced a tremendous increase over the last years, especially valuable for healthcare applications. In this context plastic materials are increasingly relevant especially for large scale fabrication and commercialization. However plastics are still not widely used at the research level due to the lack of available inexpensive industrial–like fabrication equipment. In this work we describe a rapid and highly cost-effective approach for fabricating plastic microfluidic devices with embedded microelectrodes allowing 2D and 3D configurations. We present an interdigitated microelectrode configuration applied to impedance cytometry and cellular electroporation/lysis on chip devices as an example of the great potential of this technology. Our long-term goals are to further explore the potential of hot-embossed microscale devices as platforms for complete BioMEMS devices. This includes the integration of functionalized elements and silicon-based biosensors.
Contact Information jparedes@berkeley.edu
Advisor Dorian Liepmann

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Microfluidics
ProjectIDBPN711
Project title Point-of-Care System for Quantitative Measurements of Blood Analytes Using Graphene-Based Sensors
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project Biosensor, healthcare, graphene, microfluidics
Researchers Jacobo Paredes, Kathryn Fink, Kiana Aran
Time submitted Monday 11th of August 2014 09:55:48 PM
Abstract Serum glucose, cholesterol, triglyceride and HbA1C monitoring are all valuable tools in the health management of the aging population, especially given the increase in diabetes and cardiovascular diseases. Even for glucose monitoring, the challenges obtaining sufficiently accurate and reliable measurements are so significant that the FDA is contemplating more stringent standards. Guido Freckmann, et al., J. Diabetes Sci. Tech. 6, 1060-1075, 2012, have compared 43 blood glucose self-monitoring systems. Out of this, 34 systems were completely assessed and 27 (79.4%) systems fulfilled the minimal accuracy requirements and only 18 (52.9%) of 34 systems fulfilled the requirements of the proposed tighter criteria in the current standards draft. None of them meet the even more stringent requirement of ISO 2012 and FDA. Because inaccurate systems bear the risk of false therapeutic decisions and rising health care costs, there is an urgent need for significantly enhanced BG monitoring systems for PC applications. POC tests for other biomedically important analytes are generally even less accurate. The overall goal of the proposed research is to develop new sensor platforms that will provide increased sensitivity and accuracy in point-of-care situations. This is a joint project with Harvard Medical School and Vanderbilt University.
Contact Information liepmann@berkeley.edu; jparedes@berkeley.edu
Advisor Dorian Liepmann

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Microfluidics
ProjectIDBPN732
Project title The Role of Erythrocyte Size and Shape in Microchannel Fluid Dynamics
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project
Researchers Kathryn Fink, Karthik Prasad
Time submitted Tuesday 12th of August 2014 04:12:28 PM
Abstract The unique properties of blood flow in microchannels have been studied for nearly a century; much of the observed blood-specific dynamics is attributed to the biconcave shape of red blood cells. However, for almost twice as long biologists have observed and characterized the differences in the size and shape of red blood cells among vertebrates. With a few exceptions, mammals share the denucleated biconcave shape of erythrocytes but vary in size; oviparous vertebrates have nucleated ovoid red blood cells with size variations of a full order of magnitude. We utilize micro-PIV and pressure drop measurements to analyze blood flow of vertebrate species in microchannels, with a focus on understanding how cell size and shape alter the cell-free layer and velocity profile of whole blood. The results offer insight into the Fahraeus-Lindqvist effect and the selection of animal blood for the design and evaluation of biological microfluidic devices.
Contact Information kdfink@berkeley.edu, liepmann@berkeley.edu
Advisor Dorian Liepmann

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Microfluidics
ProjectIDBPN621
Project title Microfluidic Separation of Blood for SIMBAS Biosensor
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project
Researchers Kathryn Fink, Karthik Prasad
Time submitted Tuesday 12th of August 2014 04:13:45 PM
Abstract The goal of this research is to characterize and optimize a continuous-flow, blood fractionation platform using particle image velocimetry to analyze the critical operating parameters. The microfluidic system will separate from a blood sample a platelet-enriched plasma containing pathogens and pathogenic biomarkers. It will also provide a stream of concentrated blood cells including pathogenic plasmodial cells.
Contact Information kdfink@berkeley.edu, liepmann@berkeley.edu
Advisor Dorian Liepmann

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Wireless, RF & Smart Dust
ProjectIDBPN766 New Project
Project title Active Q-Control for Improved Insertion Loss Micromechanical Filters
Status of the Project New
fundingsource of the Project DARPA
Keywords of the Project MEMS, Filters, Active Q-Control
Researchers Thura Lin Naing, Tristan Rocheleau
Time submitted Wednesday 13th of August 2014 12:57:26 AM
Abstract This project aims to develop channel-selecting Micromechanical filters with controllable bandwidth using resonators wired in closed-loop feedback with ASIC amplifiers.
Contact Information thura@eecs.berkeley.edu, tristan@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen

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Wireless, RF & Smart Dust
ProjectIDBPN767 New Project
Project title MEMS-Based Tunable Channel-Selecting Super-regenerative RF Transceivers
Status of the Project New
fundingsource of the Project DARPA
Keywords of the Project MEMS, Oscillators, Radio, Transceiver
Researchers Tristan Rocheleau, Thura Lin Naing
Time submitted Wednesday 13th of August 2014 12:59:33 AM
Abstract This project aims to achieve low-power micromechanical-based tunable RF channel-selecting transceivers.
Contact Information tristan@eecs.berkeley.edu, thura@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen

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Wireless, RF & Smart Dust
ProjectIDBPN359
Project title Micromechanical Disk Resonator-Based Oscillators
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project MEMS, Oscillators
Researchers Thura Lin Naing, Tristan Rocheleau
Time submitted Wednesday 13th of August 2014 01:23:46 AM
Abstract This project aims to build and test micromechanical-based frequency synthesizer components that meet or exceed the requirements of the GSM standard. Towards these goals, the project investigates short and long-term stability of MEMS-based oscillators, particularly, phase noise and acceleration sensitivity. In addition to providing a highly accurate, on-chip frequency reference, a fully-integrated oscillator can achieve greater stability (particularly acceleration sensitivity) and far less power consumption than any comparable off-chip oscillator. In the process of achieving a fully-integrated frequency synthesizer, much of the research is expected to focus on development of integrated resonators-ASIC oscillators, as well as other needed components such as MEMS-based frequency dividers.
Contact Information thura@eecs.berkeley.edu, tristan@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen, Elad Alon

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Wireless, RF & Smart Dust
ProjectIDBPN540
Project title Temperature-Stable Micromechanical Resonators and Filters
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project µmechanical resonator, electrical stiffness, compensation, frequency drift
Researchers Alper Ozgurluk
Time submitted Wednesday 13th of August 2014 05:56:29 PM
Abstract This project aims to suppress temperature-induced frequency shift in high frequency micromechanical resonators targeted for channel-select filter and oscillator applications. A novel electrical stiffness design technique is utilized to compensate for thermal drift, in which a temperature-dependent electrical stiffness counteracts the resonator’s intrinsic dependence on temperature caused mainly by Young’s modulus temperature dependence.
Contact Information ozgurluk@eecs.berkeley.edu, ctnguyen@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen

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Package, Process & Microassembly
ProjectIDBPN734
Project title Package-Derived Influences on Micromechanical Resonator Stability
Status of the Project Continuing
fundingsource of the Project Fellowship
Keywords of the Project vacuum, encapsulation, hermetic, package, stress, finite element analysis
Researchers Divya N. Kashyap
Time submitted Tuesday 12th of August 2014 10:26:46 AM
Abstract Vacuum encapsulation of RF disk and beam resonators is necessary in order to maintain high Q and frequency stability. However, the difference in the coefficient of thermal expansion of the package material and the substrate lead to package induced stress. This project aims to explore the effects of this stress on the frequency response of the resonators using finite element analysis (FEA) software. Simulations performed on resonators packaged using conventional hermetic encapsulation techniques such as anodic and fusion bonding will be compared to that of an in situ packaging method where the resonators are housed in a polysilicon shell.
Contact Information dnk003@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen

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Physical Sensors & Devices
ProjectIDBPN534
Project title Fully-Integrated Micromechanical Clock Oscillator
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project Oscillator, 32kHz, RTC, Real Time Clock, Fully Integrated MEMS
Researchers Henry G. Barrow
Time submitted Wednesday 13th of August 2014 08:58:38 AM
Abstract This project aims to develop a fully integrated micromechanical clock oscillator which outperforms current quartz-based clock oscillators in terms of both size and cost. A 32-kHz micromechanical resonator with a temperature coefficient better than 10 ppm over the commercial temperature range will act as the oscillator's reference. In addition, this oscillator will utilize an integrated fabrication process above modern transistor circuits in order to minimize device footprint and production expense.
Contact Information hbarrow@berkeley.edu
Advisor Clark T.-C. Nguyen

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Wireless, RF & Smart Dust
ProjectIDBPN707
Project title High-Order Micromechanical Electronic Filters
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project MEMS, micromechanical, filter, high-order, bandpass, rolloff, stopband, rejection
Researchers Henry G. Barrow
Time submitted Wednesday 13th of August 2014 09:01:49 AM
Abstract This project aims to develop multi-resonator micromechanical electronic filters for use in communication systems requiring bandpass filters with sharp rolloffs and large stopband rejections. A complete analysis of the design, fabrication and testing of filters comprised of 2-8 micromechanical resonators coupled by flexural mode springs will establish a greater understanding this exciting MEMS device. In addition, the implementation of an automated tuning scheme will provide complete corrective control over the filter’s passband by negating the effects of fabrication error.
Contact Information hbarrow@berkeley.edu
Advisor Clark T.-C. Nguyen

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Physical Sensors & Devices
ProjectIDBPN433
Project title A Micromechanical Power Converter
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project Power Converter, MEMS Switch
Researchers Yang Lin, Ruonan Liu
Time submitted Tuesday 12th of August 2014 10:37:56 PM
Abstract The overall goal of this project is to demonstrate a switched-mode power converter (e.g., a charge pump) using micromechanical switching elements that allow substantially higher voltages and potentially higher conversion efficiencies than transistor-switch based counterparts.
Contact Information liur@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen

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Physical Sensors & Devices
ProjectIDBPN435
Project title A Micromechanical Power Amplifier
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project MEMS switch, switching mode power amplifier, MEMS resonator
Researchers Wei-Chang Li
Time submitted Wednesday 13th of August 2014 11:26:57 AM
Abstract This overall project aims to demonstrate methods for amplifying signals with higher efficiency compared to transistor circuitry using strictly mechanical means for ultra-low-power signal processing applications.
Contact Information wcli@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen

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Wireless, RF & Smart Dust
ProjectIDBPN682
Project title Strong I/O Coupled High-Q Micromechanical Filters
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project
Researchers Robert A. Schneider
Time submitted Friday 22nd of August 2014 03:40:14 PM
Abstract This project applies some of the Q-factor improvement techniques currently used on capacitive resonators to realize better piezoelectric ones, thus enabling new narrowband filter and oscillator applications. Capacitive-piezo transduction provides a clear path for demonstrating low motional impedance (10-1000 Ohm) and high-Q (Q~10,000) AlN resonators at VHF and UHF frequencies, which notably possess much stronger coupling than capacitive resonators. Greatly improved Q- factors, afforded through capacitive-piezoelectric transduction, enable such AlN resonators to achieve higher kt^2-Q figures of merit than traditional AlN resonator counterparts having contacting electrodes. While resonator optimization is a necessary step that this project takes, the long range goal of this effort is to mechanically couple many such resonators to realize high- order, self-switchable, channel-select filters made from aluminum nitride with fractional bandwidths of 0.1-0.3%, insertion losses of less than 2-dB, stop-band rejection exceeding 50-dB, and handling capability for high out- of-band and in-band power.
Contact Information bschneid@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen

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Wireless, RF & Smart Dust
ProjectIDBPN676
Project title Q-Boosted Optomechanical Oscillators
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project
Researchers Turker Beyazoglu, Alejandro Grine, Tristan Rocheleau
Time submitted Tuesday 12th of August 2014 04:03:40 PM
Abstract This project aims to demonstrate Radiation Pressure driven Optomechanical Oscillators (RP-OMOs) with low phase noise and low power operation suitable for various applications in optical and RF communications. In particular, chip scale atomic clocks with low power consumption can be realized by replacing its power-hungry quartz-based microwave synthesizer with the proposed RP-OMO structure. The Q-boosted RP-OMO design approach of this work makes it possible to optimize both optical and mechanical design to simultaneously reduce the phase noise and threshold power of these oscillators while providing electromechanical coupling for electrical output and voltage controlled frequency tuning, as needed for the intended CSAC application.
Contact Information turker@eecs.berkeley.edu
Advisor Clark T.-C. Nguyen, Ming C. Wu

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Wireless, RF & Smart Dust
ProjectIDBPN701
Project title Bridged Micromechanical Filters
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project Micromechanical Filters, High-order Filters,
Researchers Jalal Naghsh Nilchi
Time submitted Tuesday 12th of August 2014 02:26:11 PM
Abstract The overall project aims to explore the use of bridging between non-adjacent resonators to generate loss poles in the filter response toward better filter shape factor, sharper passband-to- stopband roll-off and better stopband rejection.
Contact Information jalal.naghsh.nilchi@berkeley.edu
Advisor Clark T.-C. Nguyen

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Wireless, RF & Smart Dust
ProjectIDBPN709
Project title Tunable & Switchable Micromechanical RF Filters
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project micromechanical resonators, RF filters, channel selection
Researchers Lingqi Wu
Time submitted Wednesday 13th of August 2014 12:02:32 PM
Abstract This project aims to explore the use of on-chip capacitively transduced micromechanical resonators to realize RF filters with substantial size and performance advantages. With their extremely high quality factor in UHF range and strong coupling coefficient enabled by nanometer electrode-to-resonator gap spacings, capacitive-gap transduced micromechanical resonators should be able to realize reconfigurable RF channel select filters for future cognitive radio applications.
Contact Information wulingqi@berkeley.edu
Advisor Clark T.-C. Nguyen

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NanoPlasmonics, Microphotonics & Imaging
ProjectIDBPN651
Project title Low Power, Low Noise Cavity Optomechanical Oscillators
Status of the Project Completed
fundingsource of the Project DARPA
Keywords of the Project Optomechanics, Radiation Pressure
Researchers Alejandro J. Grine, Turker Beyazoglu, Tristan Rocheleau
Time submitted Wednesday 13th of August 2014 05:24:53 PM
Abstract Cavity optomechanics is a new and rapidly advancing field in which light is used to alter the properties of a mechanical element. Our project specifically aims to enhance mechanical motion by means of optical radiation pressure in a cavity of both high optical and mechanical quality factors. When enough light is built up in such a cavity, the mechanical self-oscillation results in precisely modulated light at the cavity output. Though there may be numerous applications for cavity optomechanics, we seek to use optomechanical oscillators as a replacement for power-hungry microwave oscillators in chip scale atomic clocks. This work focuses on the RF photonic experimentation necessary to characterize and improve microfabricated optomechanical devices for the target application which requires a low phase noise optical tone at 3GHz.We have performed both threshold power and phase noise studies on single material oscillators to elucidate the means to achieve both low phase noise and low threshold power. Optical interrogation includes both tapered microfiber and lensed fiber coupling with integrated waveguides.
Contact Information grine@eecs.berkeley.edu
Advisor Ming C. Wu, Clark T.-C. Nguyen

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NanoPlasmonics, Microphotonics & Imaging
ProjectIDBPN703
Project title Directly Modulated High-Speed nanoLED Utilizing Optical Antenna Enhanced Light Emission
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project nano-photonics, optical antenna, photonics, optical interconnect, nanotechnology, optoelectronics, plasmonics
Researchers Seth A. Fortuna, Michael Eggleston
Time submitted Thursday 07th of August 2014 11:16:24 AM
Abstract Coupling an optical antenna to a nanoscale light emitter has been shown to increase the spontaneous emission rate by compensating for the large size mismatch between the emitter and emission wavelength. This spontaneous emission rate enhancement has been predicted to be as large as several orders of magnitude, easily surpassing the stimulated emission rate and enabling high direct modulation bandwidths. The aim of this project is to utilize this concept to demonstrate a directly modulated nanoscale semiconductor light emitting diode (nanoLED) with modulation speeds in excess of 10s of GHz, exceeding the bandwidth of semiconductor lasers. Unlike lasers, such nanoLEDs are also inherently low-power and do not require minimum threshold current density for operation and are therefore a promising light generating source for use, for example, in intra-chip communication.
Contact Information fortuna@eecs.berkeley.edu
Advisor Ming C. Wu

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NanoPlasmonics, Microphotonics & Imaging
ProjectIDBPN721
Project title MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) Component Fabrication, Design, and Charcterization
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project optical phase-locked loop, silicon photonics, 3D integration, MEMS, CMOS, VCSEL, HCG, PIC, FMCW LADAR,
Researchers Phillip A.M. Sandborn, Behnam Behroozpour, Sangyoon Han
Time submitted Tuesday 12th of August 2014 11:15:37 PM
Abstract Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits in this project. The modular MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) platform will make use of the high performance of the individual components and integrate (1) MEMS tunable VCSEL with high-index-contrast grating (HCG) mirrors, (2) photodetectors, (3) Si photonic waveguides, couplers, and interferometers, (4) high-efficiency vertical optical coupler between III-V and Si waveguides, and (5) CMOS circuits for frequency control and temperature compensation. In order to demonstrate the capabilities of the proposed MEPHI platform, a frequency- modulated continuous-wave laser detection and ranging (FMCW LADAR) source is being developed. Results have shown that electronic-photonic 3D integration of optoelectronic components can greatly improve the performance of FMCW LADAR sources. We also demonstrate that optoelectronic integration improves the bandwidth of optical phase-locked loops (OPLLs).
Contact Information sandborn@berkeley.edu
Advisor Ming C. Wu

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NanoPlasmonics, Microphotonics & Imaging
ProjectIDBPN751
Project title Large-Scale MEMS Silicon Photonics Switch
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project optical switch, large scale, fast, small footprint
Researchers Sangyoon Han, Tae Joon Seok
Time submitted Wednesday 13th of August 2014 11:23:39 AM
Abstract Fast and large scale optical switch is demonstrated in this project. MEMS is integrated with Silicon photonics waveguides to actively route light. MEMS and Silicon photonics wavegudies are integrated in monotonically in SOI platform to make the fabrication easy and robust. We demonstrated 50x50 network with 2us switching time in a chip has area less than 1cmx1cm. Our near goal is to demonstrate scale larger than 200x200 with ~100ns switching time.
Contact Information sangyoon@eecs.berkeley.edu
Advisor Ming C. Wu

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NanoPlasmonics, Microphotonics & Imaging
ProjectIDBPN609
Project title Ultra-Sensitive Photodetectors on Silicon Photonics
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project phototransistor, silicon photonics, metal-optics
Researchers Ryan Going, Tae Joon Seok
Time submitted Wednesday 03rd of September 2014 11:38:36 AM
Abstract As CMOS devices shrink in physical size, electrical interconnects between the devices will consume an ever-greater proportion of total chip power. A promising solution is to use silicon photonics for intra- and inter-chip communications. To be cost effective, both the optical transmitter and receiver should be made small, highly efficient, and CMOS compatible. Shrinking the photodiode will increase sensitivity and energy efficiency, but as it gets very small, the capacitance of the wire to the first amplifying stage in the receiver becomes significant. We present a solution which integrates the photodiode and first stage transistor in the form of an integrated germanium phototransistor. The rapid melt growth technique is used to integrate high quality single crystal germanium onto a silicon waveguide integrated device in a CMOS process. Bipolar gain combined with extremely compact device dimensions produces high-speeed, high-sensitivity receivers which operate at 1550 nm on a silicon photonics platform.
Contact Information rwgoing@berkeley.edu
Advisor Ming C. Wu

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NanoPlasmonics, Microphotonics & Imaging
ProjectIDBPN458
Project title Optical Antenna-Based nanoLED
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project Plasmonics, Laser, Light Emitting Diode, Nanophotonics, Nanocavity, Optical Interconnects, Transition Metal Dichalcogenides
Researchers Michael Eggleston, Seth Fortuna
Time submitted Thursday 07th of August 2014 12:25:02 PM
Abstract Spontaneous emission has been considered slower and weaker than stimulated emission. As a result, light-emitting diodes (LEDs) have only been used in applications with bandwidth < 1 GHz. Spontaneous emission is inefficient because the radiating dipole is much smaller than wavelength and such short dipoles are poor radiators. By attaching an optical antenna to the radiating dipole at the nanoscale, the emission rate can be significantly increased enabling high modulation bandwidths theoretically >100 GHz. This project focuses on the physical demonstration of this new type of nanophotonic device. Current fabrication and experimental results of devices using transition metal dichalcogenides (TMDs) as an emitter material will be presented. Fundamental limits of rate enhancement will also be discussed.
Contact Information eggles@eecs.berkeley.edu
Advisor Ming C. Wu

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Microfluidics
ProjectIDBPN552
Project title Light-Actuated Digital Microfluidics (Optoelectrowetting)
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project Digital Microfluidics, Droplet Microfluidics, Electrowetting, Optoelectrowetting, EWOD, Optofluidics
Researchers Shao Ning Pei, Jodi Loo
Time submitted Tuesday 12th of August 2014 01:45:57 PM
Abstract The ability to quickly perform large numbers of chemical and biological reactions in parallel using low reagent volumes is a field well addressed by droplet-based digital microfluidics. Compared to continuous flow-based techniques, digital microfluidics offers the added advantages such as individual sample addressing and reagent isolation. We are developing a Light- Actuated Digital Microfluidics device (also known as optoelectrowetting) that optically manipulates nano- to micro-liter scale aqueous droplets on the device surface. The device possesses many advantages including ease of fabrication (no lithography required) and the ability for real-time, reconfigurable, large-scale droplets control (simply by altering the low-intensity projected light pattern). We hope to develop Light-Actuated Digital Microfluidics into a powerful platform for lab- on-a-chip (LOC) applications.
Contact Information shaoning@eecs.berkeley.edu
Advisor Ming C. Wu

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Microfluidics
ProjectIDBPN733
Project title Optoelectronic Tweezers for Long-Term Single Cell Culture
Status of the Project New
fundingsource of the Project BSAC Member Fees
Keywords of the Project Optoelectronic tweezers, OET, single cell, single cell analysis
Researchers Shao Ning Pei, Tiffany Dai
Time submitted Wednesday 03rd of September 2014 11:41:29 AM
Abstract In contrast to bulk analysis, analyzing biological samples on a single-cell level is a powerful tool in deriving a more complete, quantitative understanding of cellular behavior. The optoelectronic tweezers (OET) platform utilizes light-generated dielectrophoretic force to manipulate micro-scale objects reconfigurably on the device surface. Consequently, OET is able to select for individual cells and manipulate them into a specific configuration where these cells are cultured and studied for an extended period of time. Compared to trap-based single-cell techniques, the OET platform provides advantages such as specific selection of an individual cell and subsequent culturing over a larger-scale area at a particular address on the surface of the device. We are looking to apply the OET platform for long- term culture of single cells and gain useful insights into topics such as rate of proliferation, differentiation, and changes in morphology and protein expression.
Contact Information shaoning@eecs.berkeley.edu
Advisor Ming C. Wu, Song Li

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Physical Sensors & Devices
ProjectIDBPN599
Project title MEMS Electronic Compass: Three-Axis Magnetometer
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project
Researchers Vashwar T. Rouf, Mo Li, Soner Sonmezoglu
Time submitted Monday 11th of August 2014 08:56:46 PM
Abstract The goal of this is project is to develop a low-power three axis MEMS magnetic sensor suitable for use as an electronic compass in smart phones and portable electronics. Our objective is to achieve a resolution of 200 nT/rt Hz and power consumption of 5 mW/axis with DC power supply of 3.3V. To enable co-integration with a 3-axis accelerometer, we seek to optimize sensor performance without the need for a vacuum seal. Although past devices designed by our group have demonstrated that our resolution goal is reachable, these devices suffered from dc offset larger than Earth's field and required an external programmable oscillator for operation. Here, we aim to reduce offset by two orders of magnitude and develop self-oscillation loops to excite the sensor at its natural frequency.
Contact Information vtrouf@ucdavis.edu,dahorsley@ucdavis.edu,moxli@ucdavis.edu, ssonmezoglu@ucdavis.edu
Advisor David A. Horsley

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Physical Sensors & Devices
ProjectIDBPN466
Project title Air-Coupled Piezoelectric Micromachined Ultrasound Transducers
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project Aluminum Nitride, Piezoelectric, Ultrasound Transducers, MEMS
Researchers Ofer Rozen
Time submitted Wednesday 03rd of September 2014 11:58:00 AM
Abstract Characterize air-coupled aluminum nitride piezoelectric micromachined ultrasound transducers (pMUTs) for use in range finding and gesture recognition applications. MEMS Aluminum Nitride (AlN) piezoelectric sensor technology has been chosen due to the relatively simple deposition process and compatibility with CMOS technology which enables the potential integration of the sensor and drive electronics on the same chip. Guided by both analytic and finite element models the optimum design parameters are chosen to obtain the desired resonant frequency, bandwidth, and maximum output sound pressure for the transmitter, and maximum sensitivity for the receiver. We are currently exploring several conceptual designs, using different fabrication processes, to improve robustness while maintaining the performance.
Contact Information orozen@ucdavis.edu
Advisor David A. Horsley

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Physical Sensors & Devices
ProjectIDBPN628
Project title Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project piezoelectric, ultrasound transducers, medical imaging, fingerprint sensors
Researchers Yipeng Lu, Stephanie Fung, Hao-Yen Tang
Time submitted Friday 08th of August 2014 04:16:27 PM
Abstract The goal of this project is to design and fabricate a novel ultrasonic fingerprint sensor based on high-frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs). Present fingerprint sensors in portable devices, such as capacitive fingerprint sensors, have failed to gain wide acceptance due to their susceptibility to contamination from oils, perspiration and dirt. Ultrasonic fingerprint sensors solve these problems, but devices currently available are too large and costly for deployment in consumer devices. The proposed ultrasonic fingerprint sensors based on PMUTs are easy to integrate with circuits. A test chip of a 72x9 PMUT array with 60 um pitch and electronics for driving and receiving were fabricated and characterized, and high resolution images of a steel phantom were obtained. The second generation of test chips with PMUTs and electronics on the same die is fabricated and under characterization.
Contact Information yplu@ucdavis.edu, dahorsley@ucdavis.edu
Advisor David A. Horsley

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Physical Sensors & Devices
ProjectIDBPN603
Project title Micro Rate-Integrating Gyroscope
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project MEMS, Gyroscope, Silicon Wet Etch, Diamond
Researchers Amir Heidari, Chen Yang, Hadi Najar, Parsa Taheri-Tehrani
Time submitted Wednesday 03rd of September 2014 08:19:14 AM
Abstract The goal of this project is to realize a micro rate-integrating gyroscope that produces an output signal proportional to rotation angle rather than rotation rate. If successful, this device would eliminate the need of integrating the gyroscope's rate output to obtain the angle. Realizing a micro rate-integrating gyroscope can be achieved by fabricating hemispherical resonating shells with extremely close frequency matching (delta f < 10 Hz) and a very high quality factor (Q > 1 million). Structures must be highly axisymmetric and micro-finished to nanometer scale roughness.
Contact Information dahorsley@ucdavis.edu, aheidari@ucdavis.edu, chenyang@berkeley.edu, hnajar@ucdavis.edu, ptaheri@ucda
Advisor David A. Horsley

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Physical Sensors & Devices
ProjectIDBPN655
Project title Materials for High Quality-Factor Resonating Gyroscopes
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project MEMS gyroscopes, inertial sensors, surface micromachining, High Q materials, CVD diamond
Researchers Hadi Najar, Amir Heidari, Chen Yang
Time submitted Tuesday 12th of August 2014 10:40:16 AM
Abstract This project will investigate new materials suitable for achieving Q-factors in excess of 1 million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and surface losses will be performed using resonator test structures. The effect of doping and microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined cantilevers and double-ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels of Boron doping, Deposition temperature and methane flow rate. Higher boron doping resulted in reduced Q due to defect losses. Moreover, thermal conductivities of diamond films were measured using TDTR technique for further mapping of theory and experiment.
Contact Information dahorsley@ucdavis.edu, hnajar@ucdavis.edu, chenyang@berkeley.edu, aheidari@ucdavis.edu
Advisor David A. Horsley

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Physical Sensors & Devices
ProjectIDBPN684
Project title Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project gyroscope, inertial sensor, signal processing, CMOS
Researchers Jason Su, Sarah Nitzan
Time submitted Tuesday 12th of August 2014 09:41:04 AM
Abstract Despite their small size, low power dissipation, and low cost, the large bias and scale factor errors of current MEMS inertial sensors preclude using them for dead reckoning navigation. Although these shortcomings can be overcome with precision manufacturing and extensive calibration, such solutions suffer from high cost and secondary effects such as long term drift. Presently, the use of in-situ calibration techniques in MEMS sensors is limited to the electronic interfaces, where they are instrumental for reducing drift arising from electronic components. This project extends the benefit of electronic background calibration to the MEMS transducer to continuously reduce scale factor and bias errors arising from manufacturing tolerances and drift.
Contact Information dahorsley@ucdavis.edu, sarah.nitzan@gmail.com, thssu@ucdavis.edu
Advisor David A. Horsley

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Microfluidics
ProjectIDBPN773 New Project
Project title High-throughput hiPS-HP-based Organ-on-a-chip Platforms for Drug Development
Status of the Project New
fundingsource of the Project NIH
Keywords of the Project Organ-on-a-chip, Drug discovery microsystems, Tissue engineering
Researchers Alireza Salmanzadeh
Time submitted Thursday 14th of August 2014 12:57:53 AM
Abstract Drug discovery and development is hampered by high failure rates attributed to reliance on non-human animal models employed during safety and efficacy testing. On the other hand, with conventional cell culture technology, as in vitro models of clinical behavior, isolated cells often rapidly lose tissue specific functions. With the discovery of human induced pluripotent stem (hiPS) cells, the tissue engineering community is now in position to develop in vitro model tissues to be used for high content drug screening and patient specific medicine. The use of human tissues organized into microphysiological analysis platforms could have an enormous impact on the early screening of candidate drugs. In this project we engineer a microfluidic in vitro platform based on the reconstitution of synthetic models of human liver with populations of hiPS cells differentiated into hepatocytes (hiPS-HPs). This platform can recapitulate the functional behavior of the liver tissue and is suitable for drug toxicity screening and hepatic disease modeling. We envision expanding this work into modeling other organs such pancreas, brain, and lung.
Contact Information alirezas@berkeley.edu, lplee@berkeley.edu
Advisor Luke Lee

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Microfluidics
ProjectIDBPN723
Project title Organ-on-a-Chip for Personalized Medicine Development
Status of the Project Continuing
fundingsource of the Project NIH
Keywords of the Project Organ-on-a-chip, Induced pluripotent stem cell, human-on-a-chip, microfluidics
Researchers SoonGweon Hong, Sang Hun Lee
Time submitted Wednesday 13th of August 2014 11:26:21 AM
Abstract A new era of drug discovery and development is being marched with the concept of “personalized medicine”. “Organ-on-a-chips or OCs” are one of the movements, which are to recapitulate 3-dimensional organ models in microfluidic culture platforms. By combining iPSC-derived human organ cells, individuals’ physiological response can be investigated so that the needs of animal model, inadequately representing human physiology, will be vanished in drug development in a near future. Herein,we are challenging the development of liver-, heart-, and brain-on-a-chip for the organs most frequently facing drug failure issues in the current market. Also we envision to expand the types of OCs to muscle, gut and lung, in order to ultimately represent physiological response of human on a chip. Based on personalized iPSC-derived cells, investigations on individual OCs as well as interconnection between OCs will bring meaningful inquiries in pharmacokinetics and pharmacodynamics in personalized medicine.
Contact Information gweon1@berkeley.edu
Advisor Luke P. Lee

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Microfluidics
ProjectIDBPN730
Project title Microfluidic Blood Plasma Separation for Point-of-Care Diagnostics
Status of the Project Continuing
fundingsource of the Project Foundation
Keywords of the Project Microfluidic, Blood plasma separation, Point-of-care
Researchers Jun Ho Son, Sang Hun Lee
Time submitted Wednesday 13th of August 2014 11:27:40 AM
Abstract Microfluidic lab-on-a-chip (LOC) device for point-of-care (POC) diagnostics have been widely developed for the rapid detection of infectious diseases such as HIV, TB and Malaria. Blood plasma separation is an initial step for most blood-based diagnostics. Although, centrifuge method is the classical bench- top technique, it is time and labor intensive, and therefore, automation and integration of blood plasma separation in the LOC device is ideal for POC diagnostics. Here, we propose a novel microfluidic blood plasma separation device for POC diagnostics. This investigation will hopefully lead to a simple and reliable blood plasma separation device that can be utilized by individuals with minimal training in resource-limited environments for POC diagnostics. This blood plasma separation device will be integrated with downstream detection module for single-step POC diagnostics.
Contact Information jhson78@berkeley.edu, sanghun.lee@berkeley.edu, lplee@berkeley.edu
Advisor Luke P. Lee

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN727
Project title On-Chip Single Molecule miRNA Detection for Cancer Diagnosis
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project miRNA, Detection, Cancer
Researchers Julian A. Diaz, Chi-Cheng Fu, Sang Hun Lee
Time submitted Thursday 14th of August 2014 03:01:01 PM
Abstract Early stage cancer diagnosis may mean the difference between a successful or an ineffective treatment. Therefore, development of methods that allow the detection of premature signatures of cancer are necessary. Mature microRNAs are short non-coding RNAs strands (~18-21 nt) involved in gene regulation of eukaryotic cells. In cancer cells some miRNAs appear over or under expressed, and serve as a markers to signal the presence of these malignancies. MicroRNAs, however, are present in very low concentrations, thus sensitive and multiplexed methods that detect specific miRNAs are needed to enable the patient with timely and better treatment of this disease. Currently, we are developing a method that offers sensitive, fast, and multiplexed detection of miRNAs in blood samples. This method can be easily adapted to chip technology paving the way to recognize miRNAs without the need of either sample preparation or enzymatic/chemical modification. Due to the multiplexed and sensitive capabilities of our device, we also expect it to provide accurate cancer type characterization.
Contact Information jdiaz1@berkeley.edu
Advisor Luke P. Lee

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Microfluidics
ProjectIDBPN679
Project title Integrated Quantitative Molecular Diagnostics on a Microfluidic Chip
Status of the Project Continuing
fundingsource of the Project Foundation
Keywords of the Project point-of-care, diagnostics, microfluidics, rapid test, isothermal, amplification
Researchers Erh-Chia Yeh
Time submitted Thursday 14th of August 2014 11:37:04 PM
Abstract We propose a one-step diagnostic device using isothermal nucleic acid detection to detect infectious diseases.
Contact Information erh-chia-yeh@berkeley.edu
Advisor Luke P. Lee

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Physical Sensors & Devices
ProjectIDBPN772 New Project
Project title Graphene for Flexible and Tunable Room Temperature Gas Sensors
Status of the Project New
fundingsource of the Project Federal
Keywords of the Project Chemical Sensor, Graphene, Flexible electronics
Researchers Yumeng Liu
Time submitted Wednesday 13th of August 2014 03:53:19 PM
Abstract As air pollution from industrial and automobile emission becomes more and more severe, the personalized, integrated gas sensor is desirable for everyone to monitor everyday's air quality. Such sensor should have the desirable features like energy efficient, miniature size, accurate response (down to ppm level) and flexibility. Traditional 3D semiconductor based gas sensor works in the temperature range of 300 to 400 oC, which requires large amount of energy to power the heater. We here to propose using 2D graphene based flexible field effect transistor to sense gas (N2O, NH3, H2S...) precisely, and further derive the gas selective response by measuring its electrical properties at room temperature. Due to the zero band gap of graphene, such flexible graphene FET gas sensor will build new platform for large amount of volatile chemicals ranging from emission waste to explosive chemicals.
Contact Information yumengliu@berkeley.edu
Advisor Liwei Lin

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Microfluidics
ProjectIDBPN774 New Project
Project title 3D Printed Integrated Microfluidic Circuitry
Status of the Project New
fundingsource of the Project BSAC Member Fees
Keywords of the Project Lab-on-a-Chip, 3D Printing, Microfluidics,
Researchers Ryan D. Sochol, Sunita Venkatesh, Eric Sweet, Kjell F. Ekman, Ashley Tsai, Kevin Korner
Time submitted Thursday 14th of August 2014 07:52:12 PM
Abstract In President Barack Obama’s 2013 State of the Union Address, he remarked that 3D printing-based manufacturing could change “the way we make almost everything.” Similar to the way in which the shift from vacuum tube-based technologies to solid-state components transformed the field of electronics, the shift from standard “top-down” fabrication methods (e.g., soft lithography) to emerging “bottom-up” micro/nanoscale 3D printing processes could revolutionize both chemical and biological fields.
Contact Information rsochol@mit.edu, sunitav@berkeley.edu, ericsweet2@gmail.com, kfekman@berkeley.edu, ashleytsai@berkel
Advisor Liwei Lin, Luke P. Lee

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Microfluidics
ProjectIDBPN775 New Project
Project title Integrated Microfluidic Circuitry via Optofluidic Lithography
Status of the Project New
fundingsource of the Project BSAC Member Fees
Keywords of the Project Lab-on-a-Chip, Microfluidics, Optofluidic Lithography,
Researchers Ryan D. Sochol, Pranjali Beri, Anish Khare, Kevin Korner
Time submitted Thursday 14th of August 2014 08:15:41 PM
Abstract Mechanical engineering methods and microfabrication techniques offer powerful means for solving biological challenges. In particular, microfabrication processes enable researchers to develop technologies at scales that are biologically relevant and advantageous for executing biochemical reactions. Here, optofluidic lithography-based methodologies are employed to develop autonomous single-layer microfluidic components, circuits, and systems for chemical and biological applications.
Contact Information rsochol@mit.edu, pranjalib@berkeley.edu, anishkhare@gmail.com, kevin_korner@berkeley.edu
Advisor Liwei Lin, Luke P. Lee

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Physical Sensors & Devices
ProjectIDBPN687
Project title Robust Optical Flame Detection in Harsh Environments
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project UV sensor
Researchers Kaiyuan Yao
Time submitted Wednesday 03rd of September 2014 12:07:31 PM
Abstract The goal of this project is to create a UV sensor for use as a flame detection system in gas turbine engine applications. In many gas-turbine engines, unnecessary engine shutdowns arise from sensors failing to detect the engine flame because of deep films of oil and/or water that block the sensor. In the infrared- and visible-light regions of the optical spectrum there is limited penetration through oil/water mixtures. A UV sensor is to be designed that will be able to robustly detect flames through oil/water mixtures that may build up on lenses in the gas turbine engine. For this purpose, we're exploring difference device possibilities based on ZnO nanowires, graphene, diamond, etc.
Contact Information pencilyao@gmail.com
Advisor Liwei Lin

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN736
Project title Atomic Layer Deposition Ruthenium Oxide Supercapacitors
Status of the Project New
fundingsource of the Project Industry
Keywords of the Project Atomic layer deposition, supercapacitor, energy storage
Researchers Roseanne H. Warren
Time submitted Wednesday 13th of August 2014 10:26:23 AM
Abstract This work presents the first demonstration of atomic layer deposition (ALD) ruthenium oxide (RuO2) and its conformal coating onto vertically aligned carbon nanotube (CNT) forests as supercapacitor electrodes. Specific accomplishments include: (1) successful demonstration of ALD RuO2 deposition, (2) uniform coating of RuO2 on a vertically aligned CNT forest, and (3) an ultra-high specific capacitance of 100 mF/cm2 from prototype electrodes with a scan rate of 100 mV/s. Advantages of the ALD method include precise control of the RuO2 layer thickness and composition without the use of CNT- binder molecules. In addition to high capacitance, preliminary results indicate that the ALD RuO2- CNTs have good stability over repeated cycling. Besides its use in supercapacitors, ALD-RuO2 has potential NEMS applications: in biosensors and pH sensing, as a strong oxidative material in multiple chemical processes, and in catalytic reactions for photocatalytic systems.
Contact Information warrenr@berkeley.edu
Advisor Liwei Lin

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN672
Project title Solar Hydrogen Production by Photocatalytic Water Splitting
Status of the Project Continuing
fundingsource of the Project KAUST
Keywords of the Project Solar energy, photocatalysis, nano materials
Researchers Roseanne H. Warren, Emmeline Kao
Time submitted Wednesday 13th of August 2014 10:31:29 AM
Abstract Hydrogen is a promising, environmentally-friendly fuel source for replacing fossil fuels in transportation and stationary power applications. Currently, most hydrogen is produced from non-renewable sources including natural gas, oil, and coal. Photoelectrochemical (PEC) water splitting is a new renewable energy technology that aims to generate hydrogen from water using solar energy. When light is absorbed by the photocatalyst, an electron-hole pair is generated that interacts with water molecules in a surface reduction-oxidation reaction to decompose the water into hydrogen and oxygen. The current challenge in PEC water splitting is finding low-cost, stable materials with good visible light absorption and high efficiency for water splitting. Silicon has demonstrated promising capabilities as photocatalysts due to its high visible light absorption, low cost, and high abundance. This project aims to improve the performance of silicon for water splitting by developing new high-surface area silicon photoelectrodes using chemical vapor deposition silicon.
Contact Information warrenr@berkeley.edu
Advisor Liwei Lin

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Micropower
ProjectIDBPN737
Project title Graphene-based Microliter-scale Microbial Fuel Cells
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project
Researchers Vishnu Jayaprakash, Roseanne Warren, Casey Glick
Time submitted Wednesday 03rd of September 2014 03:04:47 PM
Abstract Microbial fuel cells (MFCs) are energy harvesters that use the anaerobic respiration of micro- organisms to generate electricity. With the increase in demand for micro-scale, low power output energy harvesters over the last five years, microliter-scale microbial fuel cells (µMFCs) have received a great deal of scientific interest. Previously, researchers have operated these fuel cells under controlled anodic conditions to attain high current densities and columbic efficiencies. However, relatively low power outputs, inadequate working potentials, complex fabrication processes and tedious operating techniques have limited µMFCs from implementation in practical applications. To improve such performance and enhance the practicality of these fuel cells, this project presents new fuel cell architectures, electrode materials, fabrication techniques and operating procedures.
Contact Information soorse@berkeley.edu
Advisor Liwei Lin

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Micropower
ProjectIDBPN742
Project title 3D Carbon-based Materials for Electrochemical Applications
Status of the Project New
fundingsource of the Project BSAC Member Fees
Keywords of the Project
Researchers Xining Zang
Time submitted Tuesday 12th of August 2014 03:00:40 PM
Abstract Carbon-based materials such as CNT (1D) and graphene (2D) have been widely studied as electrode materials in various applications, including sensing, catalyst and energy storage. The extraordinary properties of these carbon-based materials provide possible advantages in reduced reaction potential, low surface fouling, and large surface area. This project aims to investigate possible combination of the 1D and 2D carbon-based materials in the form of 3D structures. The possible new structure could exhibit the following desirable characteristics: 1) conformal deposition with ordered 3D CNT/graphene structures; 2) high surface area with active surfaces; 3) feasibility of embedding other catalysts for electrochemical reactions. The long term goals are to optimize the 3D graphene/CNT materials both structurally and functionally for applications in electrochemical sensors, catalysts, and energy storage devices.
Contact Information xining.zang.me@berkeley.edu
Advisor Liwei Lin

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Physical Sensors & Devices
ProjectIDBPN743
Project title Highly Responsive Curved pMUTs
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project Piezoelectric Micromachined Ultrasonic Transducers (pMUTs), curved pMUTS, spherical piezoelectric elastic shells
Researchers Sina Akhbari
Time submitted Thursday 14th of August 2014 10:26:05 AM
Abstract Ultrasonic imaging is one of the most important and widely used medical imaging techniques, which uses high-frequency sound waves to view soft tissues such as muscles, internal organs as well as blood flowing through blood vessels in real time. With the advancement of microelectromechanical systems (MEMS), ultrasonic devices operated based on plate flexural mode have shown remarkable improvements in bandwidth, cost, and yield over the conventional thickness- mode PZT sensors. MEMS fabrication technologies can be utilized to realize both capacitive (cMUTs) and piezoelectric (pMUTs) micromachined ultrasonic transducers However, these devices could enjoy much more widespread applications if they were adjustable, better focused with lower energy requirements. This project aims to highly responsive pMUTs based on CMOS compatible fabrication processes with the potential to replace the plate-based pMUTs for high electromechanical coupling ultrasonic transducer arrays for applications in fingerprint IDs, body movement sensors, and hand- held medical imagers
Contact Information sina.akhbari68@gmail.com
Advisor Liwei Lin

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BioMEMS
ProjectIDBPN715
Project title Stimuli Responsive Capsules for Drug Delivery and Diagnostic Applications
Status of the Project Continuing
fundingsource of the Project KAUST
Keywords of the Project Core-Shell Particles, Smart Capsules, Stimuli Responsive Capsules, Drug Delivery, Diagnostics
Researchers Kosuke Iwai, Chen Yang
Time submitted Tuesday 12th of August 2014 09:08:58 PM
Abstract Particulate-based vaccines offer a safer alternative to traditional organism-based vaccines; however, their effectiveness to provoke immune response largely depends on the micro/nano- delivery systems carrying the antigen. In this project, we introduce a new class of functional microcapsules that offer the potential to not only overcome a number of hurdles associated with current particulate vaccine manufacturing technology (e.g., exposure of antigens to organic solvents or degradation during encapsulation), but also enable new functionalities for transporting the microcapsules and releasing their contents on-demand.
Contact Information k.iwai@berkeley.edu, chenyang@berkeley.edu
Advisor Liwei Lin

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Wireless, RF & Smart Dust
ProjectIDBPN574
Project title On-Chip Micro-Inductor
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project Inductor, On-Chip, RF
Researchers Kisik Koh, Chen Yang
Time submitted Tuesday 12th of August 2014 02:04:17 PM
Abstract On-chip inductors are key passive elements to high-power and radio frequency (RF) integrated circuits (ICs). This project aims to realize super-compact on-chip micro-inductor with magnetic media for high-power and RF IC's, including: 1) to explore low-loss, high resonance frequency magnetic material for inductor application; 2) to develop magnetic-material integration process; 3) to realize the super-compact magnetic-embedded inductor. The long-term objectives for this project are to resolve the current problem of lacking compact-size high-performance on-chip inductors, and then reduces the whole circuit cost significantly and helps the practical realization of RF systems-on-a- chip (SoCs) for real-world applications.
Contact Information kskoh@berkeley.edu, chenyang@berkeley.edu, lwlin@me.berkeley.edu
Advisor Liwei Lin

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Microfluidics
ProjectIDBPN706
Project title Single-Layer Microfluidic Gain Valves via Optofluidic Lithography
Status of the Project Continuing
fundingsource of the Project Fellowship
Keywords of the Project microfluidic, gain, valve
Researchers Casey C. Glick, Ryan D. Sochol, Christopher Deeble, Ki Tae Wolf, Vishnu Jayaprakash, Kosuke Iwai
Time submitted Tuesday 12th of August 2014 11:24:49 PM
Abstract This project aims to create single-layer microfluidic gain valves for use in microfluidic devices. Autonomous microfluidic devices are essential for the long-term development of versatile biological and chemical platforms; however, the challenges of creating effective control mechanisms – e.g., the need for variable pressure sources, signal degradation in cascaded devices, and multi-stage manufacture methods – have proven considerable. Using in situ optofluidic lithography, we develop a single-layer pressure-based valve system with a static gain greater than unity. We will demonstrate the device in several microfluidic circuits, including logic gates and amplifiers. These pressure gain-based systems will enable microfluidic devices with a wide range of applications, such as flow rectifiers, oscillators, and high-precision pressure measurements. Due to ease of manufacture and design flexibility, this valve design could have widespread Lab-on- a-Chip applications by enabling self-regulation of microfluidic devices.
Contact Information cglick@berkeley.edu, rsochol@gmail.com, k.iwai@berkeley.edu, lwlin@me.berkeley.edu
Advisor Liwei Lin

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN606
Project title Carbon Nanotube Films for Energy Storage Applications
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project Carbon Nanotube, Supercapacitor, Energy Storage, Flexible
Researchers Alina Kozinda
Time submitted Wednesday 13th of August 2014 10:12:12 AM
Abstract As energy demands continue to rise, it becomes imperative to develop efficient energy storage devices with high energy and power density. At the same time, the space inside devices continues to shrink, making energy storage devices which possess not only high energy/power density, but also an adjustable shape to fit into various form factors an ideal solution. Energy storage devices made from flexible electrodes are attractive in a roll-up or surface-conformed format to minimize space usage. A mechanically flexible CNT supercapacitor electrode is demonstrated, as well as a lithium-ion battery electrode using a high-surface area silicon-conformally-coated CNT forest. The CNT supercapacitor electrode is demonstrated using a water solution-assisted film lift-off and densification process. This electrode exhibits the following three features: (1) each CNT has a natural contact to its as- fabricated current-collecting metal layer; (2) the CNTs and the bottom metal layer are intact during the water-assisted lift-off process; and (3) the in-situ liquid evaporation and densification process naturally occurs to dramatically increase volumetric energy density. Because of the ability of the film to be lifted off of its original growth substrate, the application for same-chip CMOS energy storage devices is feasible. In addition, this flexible CNT supercapacitor electrode has the potential to conform to various surfaces, as well as to be implemented in devices which are required to bend with use, such as in roll-up electronics.
Contact Information kozinda@berkeley.edu
Advisor Liwei Lin

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Physical Sensors & Devices
ProjectIDBPN764 New Project
Project title Untethered Stress-engineered MEMS MicroFlyers
Status of the Project New
fundingsource of the Project State
Keywords of the Project
Researchers Omid Mahdavipour
Time submitted Wednesday 13th of August 2014 08:10:41 AM
Abstract In this project, we are developing and testing microscale flying structures, called Microflyers. The microflyers consist of a 300 µm × 300 µm sized chassis fabricated from polycrystalline silicon using surface micromachining. At present, the flyers are levitated using microfabricated heaters attached to an underlying substrate. A novel, in-situ masked post-release stress-engineering process is used to generate a concave upwards curvature of the flyers chassis, causing static pitch and roll stability during flight, take-off, and landing. The initial experiments have demonstrated stable levitation. The microflyers represent an attractive airborne reconnaissance platform due to their microscale size, and thus stealth operation.
Contact Information omahda2@uic.edu
Advisor Igor Paprotny

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Physical Sensors & Devices
ProjectIDBPN738
Project title Sensor Instrumentation to Improve Safety of U.S. Underground Coal Mines
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project coal mine, wireless sensor network, sensing inertness, data rate, power supply
Researchers Pit Pillatsch, Omid Mahdavipour
Time submitted Wednesday 13th of August 2014 01:31:01 PM
Abstract Coal mining is recognized as a dangerous undertaking. Explosions of coal dust and gases that may exist underground (such as methane) are well-known hazards, in addition to which are unexpected structural collapses. In order to prevent the propagation of coal dust explosions, regulations require that inert rock dust is applied in underground areas of a coal mine. This project is aimed at creating real-time sensors to determine the explosibility of a coal and rock dust mixture and to communicate the results from inside the mine to safety personnel above ground.
Contact Information paprotny@uic.edu, rwhite@eecs.berkeley.edu, pwright@me.berkeley.edu, ppillatsch@berkeley.edu, omahda
Advisor Richard M. White, Igor Paprotny, Paul K. Wright, Lara Gundel

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Wireless, RF & Smart Dust
ProjectIDBPN392
Project title Mobile Airborne Particulate Matter Monitor for Cellular Deployment
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project MEMS, Wireless, Particulates, Sensor, Mobile
Researchers Ben Gould
Time submitted Thursday 07th of August 2014 11:23:41 AM
Abstract This project involves optimization of a portable MEMS-based instrument that quantifies and differentiates fine airborne particulate matter concentrations of such substances as diesel engine exhaust, environmental tobacco smoke, and wood smoke. The goal of the project is integration with and interfacing of the instrument to a cellular telephone for mobile monitoring.
Contact Information rwhite@eecs.berkeley.edu, paprotny@uic.edu, lagundel@lbl.gov, bgould@lbl.gov
Advisor Richard M. White, Lara Gundel, Igor Paprotny

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Micropower
ProjectIDBPN562
Project title AC Energy Scavenging for Smart Grid Sensing
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project
Researchers Son Duy Nguyen, Richard Xu, Chris Sherman
Time submitted Wednesday 13th of August 2014 10:44:15 AM
Abstract The goal of this project is to devise small, inexpensive modules for indoor or outdoor deployment that sense electrical variables on, and scavenge energy from, energized conductors such as appliance cords and the conductors on high-voltage power transmission lines and equipment. In addition to an energy scavenging element, the modules will contain sensors, their associated signal conditioning circuitry, power conditioning and storage elements, and a wireless radio and antenna. We have recently demonstrated the ability to scavenge 2mW from a nearby conductor carrying 20 Arms, which is 10-100x more than can be extracted using comparable coil-based approaches.
Contact Information nguyen.duyson@berkeley.edu, qlxu@berkeley.edu, rwhite@eecs.berkeley.edu, paprotny@uic.edu
Advisor Richard M. White, Igor Paprotny

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Physical Sensors & Devices
ProjectIDBPN697
Project title Natural Gas Pipeline Research
Status of the Project Continuing
fundingsource of the Project State
Keywords of the Project Gas, pipeline, sensor, pressure, flow, vibration, methane, wireless, ultrasonic, laser, weld, crack
Researchers Son Duy Nguyen
Time submitted Monday 11th of August 2014 02:42:26 PM
Abstract The goal is to develop technologies for natural gas pipelines that provide increased system awareness and reliability, lower system costs, better assessment of pipeline integrity, and provide tangible benefits for utility customers. The benefits sought are natural gas pipelines that are more reliable, efficient, and secure. The BSAC research can be divided into three areas: 1. Microfabricated MEMS natural gas sensors 2. Low-power wireless sensor communication infrastructure 3. Ultrasonic diagnostic and test devices for natural gas pipelines.
Contact Information nguyen.duyson@berkeley.edu, rwhite@eecs.berkeley.edu, paprotny@uic.edu
Advisor Richard M. White, Paul K. Wright, Igor Paprotny

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Wireless, RF & Smart Dust
ProjectIDRMW29
Project title Electric Power Sensing for Demand Response
Status of the Project Continuing
fundingsource of the Project State
Keywords of the Project demand response, magnetic field, voltage sensor, current sensor, piezoelectric, smart dust
Researchers Christopher Sherman
Time submitted Tuesday 12th of August 2014 02:49:54 PM
Abstract The overarching goal of this UCB project is to identify and develop technology to enable more-effective use of electric power. This phase has primarily focused on the development of small, inexpensive, low-power proximity-based sensors for voltage and current monitoring for better granularity of monitoring at multiple levels of the power grid (distribution, customer, and individual appliances). The term 'demand response' (DR) refers to the ability of electricity users to respond automatically to time- and location-dependent electric energy price and supply contingency information in order to tailor their electric energy usage.
Contact Information ctsherman@berkeley.edu, rwhite@eecs.berkeley.edu
Advisor Richard M. White, Paul K. Wright

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Micropower
ProjectIDBPN654
Project title Electret-Based Voltage Sensing and Energy Harvesting from Energized Conductors
Status of the Project Continuing
fundingsource of the Project State
Keywords of the Project Electret, voltage sensor, energy harvester, energized conductors, Smart Grid, Demand Response
Researchers Richard Xu
Time submitted Wednesday 13th of August 2014 10:46:05 AM
Abstract The goal of this project is to design and fabricate electret-based voltage sensors and energy harvesters for Smart Grid and Demand Response applications. The functions of the proposed devices are to sense the voltage variation and harvest energy from energized conductors such as appliance cords and high-voltage power transmission lines and equipment.
Contact Information qlxu@berkeley.edu, rwhite@eecs.berkeley.edu, paprotny@uic.edu
Advisor Richard M. White, Paul K. Wright, Igor Paprotny

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Physical Sensors & Devices
ProjectIDBPN505
Project title Deployment of Wireless Stick-On Circuit Breaker PEM AC Sensors for the Smart Grid
Status of the Project Continuing
fundingsource of the Project State
Keywords of the Project Power; Passive Proximity Electric Sensors; MEMS; Wireless; Energy Scavenging
Researchers Richard Xu
Time submitted Wednesday 13th of August 2014 10:45:29 AM
Abstract The electric power consumption of the entire Berkeley campus ranges from 18MW to 30MW,of which Cory Hall, the Electrical Engineering building, comprises from 3% to 5%. Presently, the power entering the building is metered monthly at the primary terminals of its 12.4 kilovolt distribution step-down transformer. In order to increase energy efficiency and to experiment with, and further develop, our miniature electrical sensors, we are in the process of installing proximity sub-metering of loads accessed through a standard circuit breaker panel to which miniature proximity-based current sensors have been attached. We have made a two-minute video, available from the BSAC website, demonstrating the sensors in action.
Contact Information qlxu@berkeley.edu, rwhite@eecs.berkeley.edu, paprotny@uic.edu
Advisor Richard M. White, Paul K. Wright, Igor Paprotny

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Package, Process & Microassembly
ProjectIDBPN480
Project title AM Fitzgerald: MEMS Design, Prototyping, Modeling, Failure Prediction and Foundry Transfer
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project
Researchers Carolyn D. White
Time submitted Friday 08th of August 2014 04:34:47 PM
Abstract A.M. Fitzgerald & Associates provides product development and technical consulting services to clients ranging from start-ups to companies in the Fortune 500. Our capabilities include MEMS/Microsystems design and fabrication, multiphysics finite element analysis, failure prediction, and foundry transfer. We are experts at developing MEMS devices and can design and build a finished device from sketched concepts. Via our RocketMEMS™ program, customers can get customized MEMS sensors built in proven standard foundry processes. Our clients benefit from rapid prototype fabrication thus reducing their time, cost and risk of product development, and speeding time-to-market.
Contact Information cdw@amfitzgerald.com, amf@amfitzgerald.com
Advisor John M. Huggins

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Package, Process & Microassembly
ProjectIDBPN354
Project title The Nanoshift Concept: Innovation through Design, Development, Prototyping and Fabrication for MEMS, Microfluidics, Nano and Clean Technologies at the UC Berkeley NanoLab
Status of the Project Continuing
fundingsource of the Project Industry
Keywords of the Project Nanoshift, nanolab, microlab, process, recharge, commercial
Researchers Ning Chen, Salah Uddin
Time submitted Tuesday 12th of August 2014 03:14:22 PM
Abstract Nanoshift, LLC is a privately-held Emerging Technology research and development company specializing in Bio-MEMS, MEMS, Microfluidics and Nanotechnologies. Nanoshift's talented team and use of flexible lab facilities provides high quality, flexible, custom services for process design, development, rapid prototyping, low-volume fabrication and consultation. Typical projects arrive from academics, government and industry; Nanoshift is positioned as the road map for the concept to commercialization process. Nanoshift collaborates with BSAC to make powerful resources available for BSAC members, such as offering valuable services and technical expertise to both academic and industrial members, while improving BSAC's visibility and funding.
Contact Information nchen@nanoshift.net, suddin@nanoshift.net
Advisor John M. Huggins

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Package, Process & Microassembly
ProjectIDBPN712
Project title Bridging Research-to-Commercialization Gaps through Facilitated Intermediaries
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project Commercialization,Industry,Nanoshift,AMFitzgerald,MIG,Standards,SBIR, Intermediaries
Researchers John M. Huggins
Time submitted Tuesday 12th of August 2014 01:23:39 PM
Abstract Some BSAC members have, in our surveys and at IAB meetings, vocalized that we need to help bridge commercialization gaps and increase the speed of commercialization. Traditional University research commercialization paths through passive licensing to start-ups, are often highly successful and will remain the dominant path. But such paths do not leverage the sophisticated manufacturing, marketing, and sales channels of our larger Industrial members who could rapidly exploit certain research discoveries. While any such commercialization facilitation programs cannot compromise the fundamental research mission of the Center, new proactive development models are sought. This project and the new model involves joint efforts of multiple Industrial members with specialized or focused non-University agents who can facilitate the transition from laboratory proof of concept vehicles to precommercial prototypes to commercial production. The facilitated intermediaries provide boundary spanning between university research and commercialization, including active participation in formalized multi-industrial participant university-based research projects with specific transition plans to industrial partners.
Contact Information jhuggins@berkeley.edu
Advisor John M. Huggins

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Physical Sensors & Devices
ProjectIDBPN753
Project title Ratio-metric Readout Technique for MEMS Gyroscopes with Force Feedback
Status of the Project New
fundingsource of the Project Federal
Keywords of the Project MEMS Gyroscope, Inertial Sensors, Force Feedback
Researchers Burak Eminoglu, Igor Izyumin, Yu-Ching Yeh
Time submitted Tuesday 12th of August 2014 04:12:01 PM
Abstract Scale factor accuracy is critical for navigation grade gyroscopes. Traditional MEMS vibratory gyroscopes with force feedback provide good resolution, but their scale factor depends on a plethora of parameters including proof mass bias voltage, drive mode velocity,dimensions of the forcer electrodes,and mass. This project develops a ratio-metric readout technique for force feedback gyroscopes that provides a precise scale factor. Scale factor variations over 12 days are reduced from 547ppm p-p to 23ppm p-p, and temperature coefficient of the scale factor is reduced from 560ppm/C to 4ppm/C at room temperature.
Contact Information eminoglu@eecs.berkeley.edu
Advisor Bernhard E. Boser

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Physical Sensors & Devices
ProjectIDBPN608
Project title FM Gyroscope
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project gyroscope, calibration
Researchers Igor Izyumin, Yu-Ching Yeh, Burak Eminoglu
Time submitted Tuesday 12th of August 2014 02:36:25 PM
Abstract MEMS gyroscopes for consumer devices, such as smartphones and tablets, suffer from high power consumption and drift which precludes their use in inertial navigation applications. Conventional MEMS gyroscopes detect Coriolis force through measurement of very small displacements on a sense axis, which requires low-noise, and consequently high-power, electronics. The sensitivity of the gyroscope is improved through mode-matching, but this introduces many other problems, such as low bandwidth and unreliable scale factor. Additionally, the conventional Coriolis force detection method is very sensitive to asymmetries in the mechanical transducer because the rate signal is derived from only the sense axis. Parasitic coupling between the drive and sense axis introduces unwanted bias errors which could be rejected by a perfectly symmetric readout scheme. This project develops frequency modulated (FM) gyroscopes that overcome the above limitations. FM gyroscopes also promise to improve the power dissipation and drift of MEMS gyroscopes. We present results from a prototype FM gyroscope with integrated CMOS readout electronics demonstrating the principle.
Contact Information izyumin@eecs.berkeley.edu, ycyeh@eecs.berkeley.edu, eminoglu@eecs.berkeley.edu
Advisor Bernhard E. Boser

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BioMEMS
ProjectIDBPN649
Project title Magnetic Particle Flow Cytometer
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project magnetic flow cytometry
Researchers Pramod Murali
Time submitted Tuesday 12th of August 2014 01:36:42 PM
Abstract The goal of this project is to come up with a low cost, portable and disposable alternative to a flow cytometer, a powerful tool used in health and disease diagnostics. Commercial flow cytometers use fluorescent labels and optical detectors. These equipments are expensive, bulky and suffer from optical background noise. We have replaced the fluorescent markers with magnetic labels and detected them with a CMOS chip.
Further, we have developed a unique hot embossing technique for integration of CMOS chips with microfluidics. This technique can potentially benefit large scale production of chip scale cytometers. Our current focus is to design the system for detection of circulating tumor cells for metastatic breast or prostate cancer.
Contact Information pramodm@eecs.berkeley.edu
Advisor Bernhard E. Boser

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BioMEMS
ProjectIDBPN685
Project title Real-Time Intraoperative Fluorescent Imager for Microscopic Residual Tumor in Breast Cancer
Status of the Project Continuing
fundingsource of the Project NIH
Keywords of the Project cancer, imaging, radiation, surgery, breast, oncology
Researchers Efthymios P. Papageorgiou, Mekhail Anwar
Time submitted Thursday 04th of September 2014 02:37:20 PM
Abstract Successful treatment of early stage cancer depends on the ability to resect both gross and microscopic disease. Microscopic residual disease (MRD) can lead to increased risk for local recurrence (LR) and reduced overall survival (OS). Currently, no methods exist to intraoperatively assess whether individual cancer cells remain in the tumor bed; only post- operative pathologic evaluation of the tumor for molecular tumor markers, requiring several days in a laboratory setting, can definitely identify MRD. A prime example of this occurs in the over 50,000 women each year who are diagnosed with breast cancer, and are found to have MRD after lumpectomy. Elimination of MRD in breast cancer is known to reduce the need for second surgical procedures, half the LR rate from 30% to 15%, and increase breast cancer survival. Therefore a method of imaging MRD intraoperatively to guide complete resection is essential. This projects seeks to develop a method for intraoperatively identifying microscopic residual disease.
Contact Information epp@berkeley.edu, anwarme@radonc.ucsf.edu
Advisor Bernhard E. Boser

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Physical Sensors & Devices
ProjectIDBPN722
Project title Miniature Ultrasonic imaging system for portable personal health care and biometric identification
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project Fingerprints, fat, body-index, ultrasonic, MEMS, integrated circuits
Researchers Hao-Yen Tang, Yipeng Lu
Time submitted Tuesday 12th of August 2014 09:56:21 PM
Abstract Ultrasonic imaging system is well-suited for biometric identification and body-index monitoring thanks to it's penetration nature. For example, an ultrasonic fingerprint penetrate contamination such as oil, dirt, and perspiration to obtain real fingerprint from human finger, and an ultrasonic imaging system could look deeper inside your body to tell you several critical body-index such as fat- muscle composition and visceral fat thickness. However, current ultrasonic systems for medical imaging are bulky, complicated to use, expensive, and have high power dissipation. The goal of this project is to derive a miniature ultrasonic system to enable new applications in portable personal health care and biometric identification. Currently a MEMS piezoelectric ultrasonic transducer (pMUT) and a custom integrated interface circuit (ASIC) that overcome these limitations is fabricated and measured. The ASIC operates from a single 1.8V supply with 7 channels, programmable timing for phased array operation at up to 40 MHz, and 32V output using an on-chip charge pump. A monolithic MEMS-ASIC 8*24 array with <100um pitch is also fabricated for further investigating the possibility of PMUT-based ultrasonic fingerprint sensor and now under testing.
Contact Information b96901108@eecs.berkeley.edu
Advisor Bernhard E. Boser

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NanoPlasmonics, Microphotonics & Imaging
ProjectIDBPN665
Project title MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) System Demonstrator: High Resolution FMCW LADAR
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project Photonics, LADAR, LIDAR, MEMS Tuning, EOPLL, Optoelectronics, Ranging
Researchers Behnam Behroozpour, Phillip Sandborn
Time submitted Friday 08th of August 2014 10:50:45 AM
Abstract In recent years we have seen a growing demand for 3D cameras for applications such as gaming, entertainment, and autonomous vehicles. Present solutions suffer from high power dissipation and large size. This project leverages heterogeneous integration of standard CMOS electronics with high performance optical components including lasers, photo-diodes, interferometers and waveguides to reduce size, cost, and power dissipation.
Contact Information behroozpour@berkeley.edu, sandborn@eecs.berkeley.edu
Advisor Bernhard E. Boser

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Wireless, RF & Smart Dust
ProjectIDBPN683
Project title OpenWSN: A Standards-Based Low-Power Wireless Development Environment
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project Wireless Sensor Networks, Protocol Stack, Ultra Low Power, Embedded systems, 802.15.4e, 6TiSCH, RPL, 6LoWPAN, CoAP
Researchers Nicola Accettura
Time submitted Wednesday 13th of August 2014 01:53:23 PM
Abstract The OpenWSN project is an open-source implementation of a fully standards-based protocol stack for capillary networks, rooted in the new IEEE802.15.4e Time Synchronized Channel Hopping standard. The novel IETF 6TiSCH protocols make IEEE802.15.4e TSCH perfectly interfaced with well-known Internet-of-Things IETF standards, such as 6LoWPAN, RPL and CoAP, thus enabling ultra-low power and highly reliable mesh networks which are fully integrated into the Internet. The resulting protocol stack will be cornerstone to the upcoming Machine-to-Machine revolution. OpenWSN is ported to numerous commercial available platforms from older 16-bit micro- controller to state-of-the-art 32-bit Cortex-M architectures. The tools developed around the low- power mesh networks include visualization and debugging software, a simulator to mimic OpenWSN networks on a PC, and the environment needed to connect those networks to the Internet. OpenWSN projects leads standardization efforts for ultra low power M2M networks while contributing with innovative protocols for scalable, distributed and energy efficient communications.
Contact Information nicola.accettura@eecs.berkeley.edu, pister@eecs.berkeley.edu
Advisor Kristofer S.J. Pister

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Wireless, RF & Smart Dust
ProjectIDBPN735
Project title Autonomous Microrobotic Systems
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project Microrobotics, electrostatics, actuators, MEMS, autonomous sensors
Researchers Daniel Contreras, Daniel Drew, Brad Wheeler, David Burnett, Joseph Greenspun, Michael Lorek
Time submitted Thursday 07th of August 2014 12:58:59 PM
Abstract Recent advances in MEMS technology have enabled a new generation of microrobotic engineering applications. This project aims at developing micro-scale actuation and transduction mechanisms for mobility. Currently, electrostatic inchworm motors in conjunction with microfabricated leg linkages are being investigated for walking while atmospheric ion thrusters are investigated for flying. A motivation behind this research is the development of truly mobile, high resolution, and autonomous sensor networks. One of the key elements towards autonomy is the fusion of these mobility mechanisms with energy harvesting capabilities, including high-voltage solar arrays. In addition, ultra-low power control and communications platforms must be designed with the constraints of a microrobotic system in mind.
Contact Information dscontreras@eecs.berkeley.edu
Advisor Kristofer S. J. Pister

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Wireless, RF & Smart Dust
ProjectIDBPN744
Project title Self-Destructing Silicon
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project
Researchers Brad Wheeler, Joey Greenspun, Konlin Shen
Time submitted Monday 11th of August 2014 04:20:49 PM
Abstract Funded under the DARPA Vanishing Programmable Resources (VaPR) program, this project explores the fundamental issues associated with making wireless sensor nodes disappear after they have achieved their goal. Near-term goals include electro-chemical dissolution of circuit wiring, and XeF2 etch of the silicon substrate. The ultimate goal is to demonstrate a single-chip mote capable of self-destruction on receipt of specific RF command or environmental change.
Contact Information ksjp@berkeley.edu, brad.wheeler@berkeley.edu, greenspun@eecs.berkeley.edu, konlin@berkeley.edu, maha
Advisor Kristofer S.J. Pister, Michel M. Maharbiz

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Wireless, RF & Smart Dust
ProjectIDBPN713
Project title Ring GINA: Highly Miniaturized Ring-Format Wearable Mote
Status of the Project New
fundingsource of the Project Federal
Keywords of the Project
Researchers Joseph Greenspun, David Burnett
Time submitted Wednesday 13th of August 2014 11:48:28 AM
Abstract Computer input devices such as mice and keyboards have remained largely unchanged since the dawn of the personal computer. The Ring GINA platform is capable of sensing and interpreting a user’s hand and finger movements to emulate and enhance the functions of these standard input devices. A wearable platform frees the user from the need to know hand position relative to a keyboard or mouse, and grants the ability to perform gestures in open space or on any surface. Here, a method is presented that utilizes these rings as a text input system. In moving forward, efforts are being focused on developing new revisions of the GINA platform that can communicate using not only 802.15.4, but also Bluetooth.
Contact Information greenspun@eecs.berkeley.edu, db@eecs.berkeley.edu
Advisor Kristofer S.J. Pister

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Physical Sensors & Devices
ProjectIDBPN768 New Project
Project title Plug-Through Energy Monitor for Wall Outlet Electrical Devices
Status of the Project New
fundingsource of the Project BSAC Member Fees
Keywords of the Project energy monitor, wireless, 802.15.4, plug load
Researchers Michael C. Lorek, Fabien Chraim
Time submitted Wednesday 13th of August 2014 08:54:59 AM
Abstract This project focuses on the development of a Plug-Through Energy Monitor (PTEM) for electrical devices connected to wall outlets. Using a non-intrusive inductive current sensing technique, the load current can be measured without requiring a series sensing element that breaks the circuit. This enables slim profile sensing hardware, and eliminates the power dissipated across series elements as in traditional current measurement techniques. This work aims to design a PCB-based solution that measures load current & line voltage, accurately calculates real power dissipated by a plug load, and reports its information using 802.15.4 wireless technology. Careful system-level optimization is required to minimize component costs, mitigate unwanted 60 Hz noise coupling, and maintain a small PCB footprint. We hope a low-cost device such as this will enable the widespread adoption of electrical energy metering in building wall outlets.
Contact Information mlorek@eecs.berkeley.edu
Advisor Kristofer S.J. Pister

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Micropower
ProjectIDBPN648
Project title Fully-Integrated, Low Input Voltage, Switched-Capacitor DC-DC Converter for Energy Harvesting Applications
Status of the Project Continuing
fundingsource of the Project BSAC Member Fees
Keywords of the Project DC-DC Converter, Switched-Capacitor, Charge Pump, Energy Harvesting, Photovoltaics, Micropower
Researchers Michael C. Lorek
Time submitted Tuesday 12th of August 2014 09:20:42 PM
Abstract This project explores the design of a fully integrated, switched-capacitor DC-DC converter to convert small amounts of energy from photovoltaic or other low voltage energy sources. Clever bootstrapping techniques are used to ensure circuit startup without high-voltage or mechanical assists. Nanopower oscillator topologies are being investigated for minimum power and input voltage operation. Advanced timing schemes are used to minimize charge reversion loss and clock driver short circuit currents for increased efficiency. A boosted output voltage around 1.5V is targeted for compatibility with older CMOS technologies, offering a power advantage in heavily duty cycled applications where leakage is dominant. This work will enable the integration of CMOS circuitry and power supply on the same substrate for true single-chip, autonomous computing platforms.
Contact Information mlorek@eecs.berkeley.edu
Advisor Kristofer S.J. Pister

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Physical Sensors & Devices
ProjectIDBPN705
Project title Standard CMOS-Based, Fully Integrated, Stick-On Electricity Meters for Building Sub-Metering
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project
Researchers Michael C. Lorek
Time submitted Tuesday 12th of August 2014 09:20:59 PM
Abstract We propose the development and testing of a system of technologies to minimize the installed cost of electricity sub-metering in buildings. This system utilizes non-contact, self-calibrating voltage and current sensors and wireless communication to eliminate the need for installation by an electrician, installation of conduit and enclosures, and installation of wired communication infrastructure. Electricity sub-metering is a critical component for continuous commissioning, fault detection and diagnosis, demand response, and other energy efficiency opportunities.
Contact Information mlorek@eecs.berkeley.edu
Advisor Kristofer S.J. Pister, Steven Lanzisera

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Wireless, RF & Smart Dust
ProjectIDBPN596
Project title Smart Fence and Other Wireless Sensing Applications for Critical Industrial Environments
Status of the Project Completed
fundingsource of the Project Industry
Keywords of the Project Gas Monitoring, Mobile Gas Sensing, Valve Position Monitoring, Fence Monitoring, Machine Vibration Sensing, WirelessHART, Wireless Sensor Networks
Researchers Fabien J. Chraim
Time submitted Friday 08th of August 2014 03:18:40 PM
Abstract Following the successful showcase of the Smart Fence technology, this project aims at using MEMS and Optical Sensors in combination with Low-Power radios to implement industrial wireless sensing applications. Using inertial sensors, valve position monitoring and machine vibration sensing are added for safeguarding both personnel and equipment. Finally, gas leak detection and localization is implemented and tested using IR combustible gas sensors. This project is concerned both with the COTS-based hardware and software behind each application.
Contact Information chraim@eecs.berkeley.edu
Advisor Kristofer S.J. Pister

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Physical Sensors & Devices
ProjectIDBPN765 New Project
Project title Full-field Strain Sensor for Hernia Mesh Repairs
Status of the Project New
fundingsource of the Project NSF
Keywords of the Project strain
Researchers Amy Liao
Time submitted Tuesday 12th of August 2014 10:09:06 PM
Abstract Each year, more than 400,000 ventral hernia repairs are performed in the United States. A hernia is the protrusion of an organ through a weak spot in the surrounding muscle or connective tissue that normal contains it. Large ventral hernias (hernias that occur in the abdominal wall) are typically treated by suturing in a surgical mesh to cover and overlap the hernia defect. The surgical mesh provides additional support to the damaged tissue surrounding the hernia. However, in 25-40% of patients, the hernia repair fails, resulting in recurrence of the hernia, along with other complications including infection and intestinal obstruction. We hypothesize that a major cause of hernia recurrence is the unequal distribution of stress across the mesh resulting in high stress concentrations at the tissue-mesh interface, particularly at the site of mesh fixation to the abdominal wall muscles. Over time the mesh is pulled away from the abdominal wall at the high stress concentrations and the hernia defect recurs. We propose to design a biocompatible, instrumented patch, capable of mapping the 2D strain topography placed on the mesh. The sensor will enable surgeons to actively identify and address areas of high stress during the surgery by modifying the surgical procedure to redistribute stress more evenly, thus decreasing the rate of hernia recurrence. Furthermore, our long term goal is to design a hernia mesh that contains strain gauges and the associated circuitry such that once implanted in the body the prosthetic can alert patients when they are engaging in activities that place high stress on the implant. Such a dynamic, interactive hernia mesh would empower patients to actively participate in their post-operative care in a way that is personalized and unprecedented in surgery.
Contact Information amy.liao@berkeley.edu
Advisor Michel M. Maharbiz

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BioMEMS
ProjectIDBPN769 New Project
Project title Acousto-optic modulation of brain activity: Novel techniques for optogenetic stimulation and imaging
Status of the Project New
fundingsource of the Project Tri-Institutional Brain R&D Initiative
Keywords of the Project Acousto-optics, Nonlinear nanocrystals, Brain, Central nervous system
Researchers Maysam Chamanzar
Time submitted Wednesday 13th of August 2014 03:27:02 PM
Abstract One of the fundamental challenges in monitoring and modulating the central nervous system (CNS) activity is the lack of tools for non-invasive interrogation of of local neuronal ensembles simultaneously in different regions of the brain. Despite recent advances in neural modulation techniques, including a rapidly expanding optogenetic and imaging toolset, still we lack a robust, minimally- invasive optogenetic stimulation platform. The ability to independently deliver light to multiple, highly localized regions of the brain would drastically improve in-vivo optogenetic experiments. Illuminating a large volume of brain using light sources above the brain surface does not provide the requisite spatial resolution and since the intensity falls off rapidly, only a small fraction of target neurons in the vicinity of the light source (~200 μm) will be excited. Increasing the light source power, on the other hand, results in the generation of excessive heat in the brain and the potential for tissue damage. In this project, we use specially designed up converting nano crystal particles (UCNP) to deliver light locally to neurons. We use an acoustic-optics modality to deliver and steer light in the brain from outside without causing damage to the brain tissue.
Contact Information chamanzar@berkeley.edu
Advisor Michel M. Maharbiz

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BioMEMS
ProjectIDBPN699
Project title A Modular System for High-Density, Multi-Scale Electrophysiology
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project Neuroengineering, Nanoprobes, Optogenetics, ASIC, BioMEMS
Researchers Maysamreza Chamanzar
Time submitted Tuesday 12th of August 2014 10:03:17 PM
Abstract Truly large-scale electrophysiology simultaneous recording of thousands of individual neurons in multiple brain areas remains an elusive goal of neuroscience. The traditional approach of studying single neurons in isolation assumes that the brain can be understood one component at a time. However, in order to fully understand the function of whole brain circuits, it is essential to observe the interactions of large numbers of neurons in multiple brain areas simultaneously with high spatiotemporal resolution. This project will establish a complete system for multi-scale electrophysiology in awake, freely behaving mice, using state-of-the-art nano neural interfaces comprising of tiny silicon probes integrated with on- chip optical waveguides and compliant monolithic polymer cables connected to a unique light-weight head-mounted recording system built around a commercially available application specific integrated circuit (ASIC) that has been custom designed for electrophysiological recordings, combining signal amplification, filtering, signal multiplexing, and digital sampling on a single chip. We demonstrate the high-resolution excitation of channelrhodopsin-expressing neurons imaged on a two-photon microscope by evoking action potentials in different parts of cortex. The entire process, including post-fabrication system integration, has been designed to leverage existing consumer manufacturing processes, making our probe technology mass- producible and widely accessible at low cost.
Contact Information chamanzar@berkeley.edu
Advisor Michel M. Maharbiz, Timothy J. Blanche

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BioMEMS
ProjectIDBPN745
Project title Wafer-Scale Intracellular Carbon Nanotube-Based Neural Probes
Status of the Project Continuing
fundingsource of the Project Fellowship
Keywords of the Project
Researchers Konlin Shen
Time submitted Tuesday 12th of August 2014 01:29:16 PM
Abstract Current in-vivo methods of electrical recordings of the brain are hampered by low spatial resolution, invasiveness to the surrounding tissue, and scalability. Carbon nanotube based electrodes are ideal for intracellular neural recordings due to their small size and flexibility, allowing for higher density arrays and less damage to the brain. However, current methods for selective placement and alignment of carbon nanotubes cannot be done easily on a wafer scale. This project aims to solve this issue in order to create wafer-scale carbon nanotube based neural probes for intracellular recordings.
Contact Information konlin@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor Michel M. Maharbiz

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BioMEMS
ProjectIDBPN716
Project title Neural Dust: An Ultrasonic, Low Power Solution for Chronic BrainMachine Interfaces
Status of the Project Continuing
fundingsource of the Project Fellowship
Keywords of the Project brain-machine interfaces, ultrasonic energy transfer and harvesting, backscatter communication
Researchers Dongjin Seo
Time submitted Wednesday 13th of August 2014 09:54:23 PM
Abstract A major hurdle in brain-machine interfaces (BMI) is the lack of an implantable neural interface system that remains viable for a substantial fraction of a primate lifetime. Recently, sub-mm implantable, wireless electromagnetic (EM) neural interfaces have been demonstrated in an effort to extend system longevity. However, EM systems do not scale down in size well due to the severe inefficiency of coupling radio waves at mm and sub-mm scales. We propose an alternative wireless power and data telemetry scheme using distributed, ultrasonic backscattering systems to record high frequency (~kHz) neural activity. Such systems will require two fundamental technology innovations: 1) thousands of 10 – 100 um scale, free-floating, independent sensor nodes, or neural dust, that detect and report local extracellular electrophysiological data via ultrasonic backscattering, and 2) a sub-cranial ultrasonic interrogator that establishes power and communication links with the neural dust. We performed the first in vitro experiments which verified that the predicted scaling effects follow theory and that the extreme efficiency of ultrasonic transmission can enable the scaling of the sensing nodes down to 10's of um. Such ultra-miniature as well as extremely compliant implantable neural interface would pave the way for both truly chronic BMI and massive scaling in the number of neural recordings from the nervous system.
Contact Information djseo@eecs.berkeley.edu
Advisor Michel M. Maharbiz

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BioMEMS
ProjectIDBPN718
Project title Direct Electron-Mediated Control of Hybrid Multi-Cellular Robots
Status of the Project Continuing
fundingsource of the Project Office of Naval Research (ONR)
Keywords of the Project microbiorobotics, synthetic biology, biosensors, stochastic control, hybrid biological systems, bacterial electrophysiology
Researchers Tom J. Zajdel
Time submitted Thursday 07th of August 2014 03:06:15 PM
Abstract We propose to design, fabricate and test a millimeter-scale, programmable cellular- synthetic hybrid robot capable of autonomous motility, sensing and response in aqueous environments. Three integrated technologies will make this possible: 1) two-way electron transfer between an electrode and E. coli for rapid communication between abiotic core and cells; 2) a flexible polymer + CMOS sensing and computation abiotic core; 3) synthetic cell adhesion genes which allow for patternable self-assembly of bacterial cells onto the abiotic substrate. If successful, this will be the first demonstration of a millimeter-scale synthetic autonomous multi- cellular hybrid with organic and man-made components. A primary goal of this work will be to enable abiotic/biotic two-way communication via electron transfer channels engineered into cells in contact with microelectrodes. We suggest that such a fusion would enable control techniques that rely on combinations of gene expression, cell- level sensing / actuation and CMOS digital computation.
Contact Information zajdel@eecs.berkeley.edu, maharbiz@berkeley.edu
Advisor Michel M. Maharbiz

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Physical Sensors & Devices
ProjectIDBPN714
Project title Electronic Bandage for Wound Healing
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project Wound Healing, Impedance Spectroscopy
Researchers Amy Liao, Monica Lin
Time submitted Monday 11th of August 2014 11:09:45 AM
Abstract Chronic cutaneous wounds affect millions of people each year and take billions of dollars to treat. Formation of pressure ulcers is considered a "never event" - an inexcusable, adverse event that occurs in a healthcare setting. Current monitoring solutions (pressure-distributing beds, repositioning patients every few hours, etc) are very expensive and labor intensive. In response to this challenge, we are developing a novel, flexible monitoring device that utilizes impedance spectroscopy to measure and characterize tissue health, thus allowing physicians to objectively monitor progression of wound healing as well as to identify high-risk areas of skin to prevent formation of pressure ulcers. Previous studies that examined the dielectric response of cell suspensions and tissues have identified several distinct dispersions associated with particular molecular-level processes that can be used to distinguish between tissue types. We are utilizing impedance spectroscopy to detect subtle changes in tissue, enabling objective assessment and providing a unique insight into the condition of a wound. Wireless capability can be implemented to allow for remote monitoring. In parallel, efforts are being made to transfer this technology onto resorbable substrates to create a device that can monitor internal wound healing and readily dissolve after healing.
Contact Information amy.liao@berkeley.edu, monica.lin@berkeley.edu
Advisor Michel M. Maharbiz

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Physical Sensors & Devices
ProjectIDBPN731
Project title Flexible Electrodes and Insertion Machine for Stable, Minimally-Invasive Neural Recording
Status of the Project Continuing
fundingsource of the Project DARPA
Keywords of the Project neural recording, scalable, flexible, surgical robot, minimally invasive
Researchers Timothy L. Hanson
Time submitted Tuesday 12th of August 2014 02:02:26 PM
Abstract Current approaches to interfacing with the nervous system mainly rely on stiff electrode materials, which work remarkably well, but suffer degradation from chronic immune response due to mechanical impedance mismatch and blood-brain barrier disruption. This current technology also poses limits on recording depth, spacing, and location. In this project we aim to ameliorate these issues by developing a system of very fine and flexible electrodes for recording from nervous tissue, a robotic system for manipulating and implanting these electrodes, and a means for integrating electrodes with neural processing chips. We have fabricated three versions of the electrodes, and have demonstrated their manual and automated insertion into an agarose brain tissue proxy using a notched tungsten needle. We have also fabricated and tested in agarose three revisions of the inserter robot. The most recent inserter robot design uses a replaceable electrode cartridge to which electrodes are mounted; these electrodes are made on a 5um thick polyimide substrate with a parylene peel-away backing. The parylene backing holds the fine wires and keeps them from tangling until they are inserted, and provides a more robust means of handling and mounting the structures. We hope to test the full system in rats within 2 months.
Contact Information tlh24@phy.ucsf.edu
Advisor Michel M. Maharbiz, Philip N. Sabes

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BioMEMS
ProjectIDBPN573
Project title Carbon Fiber Microelectrode Arrays for Chronic Stimulation and Recording in Insects
Status of the Project Continuing
fundingsource of the Project State
Keywords of the Project carbon fiber microelectrode electrode array insect electrophysiology chronic stimulation recording fly beetle
Researchers Travis L. Massey
Time submitted Tuesday 12th of August 2014 10:47:41 PM
Abstract This project aims to create an array of carbon fibers for insect electrophysiology.
Contact Information tlmassey@eecs.berkeley.edu
Advisor Michel M. Maharbiz, Kristofer S.J. Pister

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BioMEMS
ProjectIDBPN571
Project title Implantable Microengineered Neural Interfaces for Studying and Controlling Insects
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project insect, vision, neural interface, micro aerial vehicle
Researchers Joshua van Kleef, Kaylee Mann
Time submitted Wednesday 13th of August 2014 11:12:30 AM
Abstract Our goal is to control the flight of an insect by hijacking its sensory systems. Although significant funding has gone into developing micro air vehicles (MAVs, wingspan< 15cm), flying insects still significantly outperform the most sophisticated flying robots in efficiency, flight time, stability and maneuverability. The restrictions that such a small spatial scale places on the amount of energy that can be stored on-board and on actuator efficiency, means this gap is expected to continue for some years to come. We are therefore pursuing a novel MAV design that uses an actual flying insect. We aim to produce small insect backpacks capable of receiving commands remotely and providing power to a combination of neural and optical stimulators. The patterns of stimulation will allow us to trick the insects motor-sensory system into responding to fictitious self-movements. We aim to use these ‘ghost’ stimuli to remote-control the insect’s flight while at the same time capitalizing on their remarkable natural flying abilities. The project has now advanced to testing devices in free flight and optimizing the stimulation parameters.
Contact Information vankleef@berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor Michel M. Maharbiz

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN518
Project title Synthetic Turing Patterns
Status of the Project Continuing
fundingsource of the Project Federal
Keywords of the Project synthetic biology, pattern generation, developmental biology
Researchers Justin Hsia
Time submitted Tuesday 05th of August 2014 03:29:04 PM
Abstract Understanding symmetry breaking is at the heart of developmental biology, from the origins of polarity, cellular differentiations, and how the leopard got its spots, as well as crucial to the future engineering of complex cellular ensembles. Alan Turing proposed a simple mathematical model that explains how the reaction-diffusion mechanism can cause an initially uniform concentration in an ensemble of cells to spontaneously become non-uniform and form patterns (Turing patterns). To date, no true synthetic Turing patterns have been created using gene networks, so our goal is to design and implement the first synthetic gene circuit that can spontaneously produce patterning via diffusion-driven instability in an ensemble of cells (E. coli). In addition, the main engine driving Turing pattern formation is a robust nonlinear circuit, such as a bistable or oscillatory network. Creating these nonlinear circuits will be beneficial both as a major step in the eventual creation of Turing pattern generators as well as modular circuits for synthetic biology.
Contact Information jhsia@eecs.berkeley.edu, arcak@eecs.berkeley.edu, maharbiz@eecs.berkeley.edu
Advisor Michel M. Maharbiz, Murat Arcak

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BioMEMS
ProjectIDBPN771 New Project
Project title Silicon Carbide ECoGs for Chronic Implants in Brain-Machine Interfaces
Status of the Project New
fundingsource of the Project BSAC Member Fees
Keywords of the Project
Researchers Camilo A. Diaz-Botia, Lunet E. Luna
Time submitted Wednesday 13th of August 2014 02:43:32 PM
Abstract Electrocorticography (ECoG) is an excellent brain mapping technique that places large arrays of electrodes directly on the cortex of the brain, and has been used in patients for several decades. Utilization of this technique results in an improved trade-off between spatial and temporal resolution. In recent years, the development of high-density, polymer-based micro- ECoGs has pushed the field even further, allowing even better neural circuit observation in acute recordings. Despite these advances, an unsolved challenge remains in terms of device longevity. Polymer-based micro-ECoGs are not suitable for chronic implantation within brain tissue, the interfacial layers within the device allow molecule penetration causing delamination, which overtime leads to device failure. However, silicon carbide (SiC)-based micro ECoGs are expected to enhance device structural and chemical stability, and thus lengthen the device lifetime compared to polymer-based micro- ECoGs. SiC is a biocompatible that can provide micro-ECoGs with the mechanical and chemical stability they are currently lacking within the reactive or harsh-environment of the body. Our goal is to design SiC- based micro-ECoG arrays that can serve as effective, robust chronic implants.
Contact Information cadiazb@berkeley.edu, lunet@berkeley.edu
Advisor Michel M. Maharbiz, Roya Maboudian

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Physical Sensors & Devices
ProjectIDBPN763 New Project
Project title Surface Acoustic Wave Based Sensors for Harsh Environment Applications
Status of the Project New
fundingsource of the Project Foundation
Keywords of the Project SiC, SAW, MEMS, Harsh Environment
Researchers Shuo Chen
Time submitted Tuesday 12th of August 2014 08:12:31 PM
Abstract Sensing in harsh environment, especially high temperature environment, is drawing more attention, with potential applications in energy sector. The motivations are that enhanced (pressure, temperature, chemical) sensing will allow more efficient operation, enabling condition-based monitoring and reducing unwanted emission. State-of-the-art sensing technology remains limited, either not capable of long-term online monitoring under high temperature due to materials failure or, occupying too much space. We propose to adapt MEMS fabrication process and concepts to our proposed research, by combining it with the acoustic wave based sensing methodology and high-temperature compatible materials, to make small, low power consuming sensors. While most of the SAW devices utilize bulk piezoelectric substrates, we propose to apply piezoelectric thin films to our sensors, combined with substrates commonly used in MEMS and microfabrication technologies, such as silicon, in order to achieve MEMS and CMOS compatible sensors.
Contact Information stevechen2013@berkeley.edu
Advisor Roya Maboudian

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NanoTechnology: Materials, Processes & Devices
ProjectIDBPN762 New Project
Project title Microheater-Based Platform for Catalytic Gas Sensing
Status of the Project New
fundingsource of the Project NSF
Keywords of the Project
Researchers Anna Harley-Trochimczyk, Jiyoung Chang, Qin Zhou, Jeffrey Dong
Time submitted Thursday 14th of August 2014 03:18:25 PM
Abstract Accurate detection of flammable gases is essential for safe operation of many industrial processes. Installing networks of combustible gas monitors in industrial settings can allow for rapid leak detection and increased safety and environmental protection. However, existing combustible gas monitors are not suitable for use in wireless sensor networks due to the high power consumption. We have developed an ultra-low power combustible gas sensor with competitive sensitivity and lifetime characteristics that will enable ubiquitous wireless monitoring of combustible gases in industrial settings, resulting in enhanced safety. The core technology is a suspended microheater coated with a novel nanotechnology-based sensing material that catalyzes hydrocarbon combustion. Hydrogen gas sensing has been demonstrated with only a few mW of power required to reach operation temperatures. Ongoing research includes improving sensing material deposition and stability and tailoring the sensing materials for hydrocarbon specificity.
Contact Information anna.harleytr@berkeley.edu
Advisor Roya Maboudian, Willi Mickelson, Alex Zettl

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Physical Sensors & Devices
ProjectIDBPN424
Project title Silicon Carbide Technology for Harsh Environment Sensing and Energy Applications
Status of the Project Continuing
fundingsource of the Project NSF
Keywords of the Project Silicon Carbide, LPCVD, Nanowires, RF MEMS, Harsh Environment, Supercapacitors
Researchers Lunet E. Luna, Shuo Chen
Time submitted Sunday 10th of August 2014 05:20:01 PM
Abstract Silicon Carbide (SiC) is a material of interest to fabricate sensors and actuators able to operate in harsh environments. Particularly, its mechanical and electrical stability and its chemical inertness make SiC well suited for designing devices capable of operation in high temperature and corrosive environments. Harsh-environment stable metallization remains one of the key challenges with SiC technology. We are developing novel metallization schemes, utilizing solid-state graphitization, to improve the long-term reliability of metal/SiC contacts in high temperature environments. In addition, we are investigating the growth mechanism of SiC nanowires (NWs) to understand how growth parameters may be manipulated to achieve specific SiC NW properties. The ability to control SiC NW polytype, growth orientation, and shape is essential for obtaining specific optical and electronic NW characteristics. SiC NWs with tailored properties are attractive candidates for applications requiring high surface area coupled with extreme physicochemical stability (such as field-emission displays and high-temperature energy storage devices).
Contact Information lunet@berkeley.edu, stevechen2013@berkeley.edu, maboudia@berkeley.edu, carraro@berkeley.edu
Advisor Roya Maboudian, Carlo Carraro