Mechanical Properties of Polycrystalline Silicon Database
Last updated August 29, 1997
This is a collection of text files listing papers which report mechanical
properties of polycrystalline silicon.
I have categorized these papers into the following groups:
-
Elastic Constants (23 references)
- Papers reporting elastic constants such as Young's modulus, the bi-axial
modulus or Poisson's ratio of poly-Si.
-
Residual Strain (78 references)
- Papers reporting residual average strains (stresses) or strain gradients
in poly-Si.
-
Fracture (14 references)
- Papers reporting the fracture properties of poly-Si including fracture
strain, fracture stress, or fracture toughness.
-
Fatigue (3 references)
- Papers reporting life span or fatigue data of polysilicon devices.
-
Damping (32 references)
- Papers reporting the resonant quality or damping ratio of poly-Si.
-
Wear/Friction/Stiction/Surface Roughness (40 references)
- Papers pertaining to poly-Si's wear, friction, or stiction properties.
Also includes papers reporting surface roughness measurements.
-
Entire Database (150 references)
- A single list of all of the papers in the previous catagories.
-
Mechanical Devices Database (255 references)
- A collection of papers describing the use of micromechanical devices
machined from polysilicon. Currently, this collection only contains surface
micromachined devices. There are no Hexil or LIGA devices listed. Also, this
list may not be complete.
Plot of number of polysilicon mechanical property papers published each year
Database Layout
I have sorted these lists by: first, ascending year of publication (or year of presentation if no paper was published); second, the first author name; and finally, the second author name.
Searches
You can search these lists for particular word instances (such as "Guckel" or "1996") using the FIND command on the Netscape browser.
Information Sources
Library Catalogs
- INSPEC
- The INSPEC database of technical papers on the University of California Libraries' MELVYL system. Checked years 1980-1997.
- CURRENT CONTENTS (CC)
- The CURRENT CONTENTS database of papers on the University of California Libraries' MELVYL system.
-
Journals
- International Electron Devices Meeting Technical Digest (IEDM)
- 1982-1986,1988-1989,1992-1994
- Proceedings IEEE Micro Electro Mechanical Systems
- 1987,1990-1995
- Proceedings of the # Sensor Symposium
- 1981-1986,1988-1992
- Technical Digest IEEE Solid-State Sensors Workshop
- 1986,1988,1990,1992,1994
- Transucers - International Conference on Solid State Sensors and Actuators
- 1985,1987,1989 v1-2,1991,1993 digest & late papers,1997 tentative schedule
During the week 7/28 through 8/1, I will be adding a few more papers to this database. In addition, I will include a chart showing the number of papers published each year for every catagory.
Errors
There are undoubtedly some errors in the information I have gathered. If you find any mistakes, or know of any papers I don't have that deserve to be listed in this database, please let me know. My e-mail address is ptjones@bsac.eecs.berkeley.edu
