Mechanical Properties - All Number of Records: 188 Chen, C.P. Leipold, M.H. Fracture Toughness of Silicon Ceramic Bulletin, Vol. 59, No. 4 (1980) Ternisien Duy-Phach Vu Perio, A. Lerme, M. and others Influence of laser power and scan rate on CW laser annealing of phosphorus-doped in-situ polycrystalline silicon 11th European Solid State Device Research Conference ESSDERC 81 and the 6th Symposium on Solid State Device Technology SSSDT 81, Toulouse, France, 14-17 Sept. 1981. p. 226-7 Kamins, T.I. Chiang, K.L. Properties of plasma-enhanced CVD silicon films. II. Films doped during deposition Journal of the Electrochemical Society, Oct. 1982, vol.129, (no.10):2331-5 Harbeke, G. Krausbauer, L. Steigmeier, E.F. Widmer, A.E. and others LPCVD polycrystalline silicon: growth and physical properties of in-situ phosphorus doped and undoped films RCA Review, June 1983, vol.44, (no.2):287-312 Howe, R.T. Muller, R.S. Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties Sensors and Actuators, Nov. 1983, vol.4, (no.3):447-54 Howe, R.T. Muller, R.S. Polycrystalline silicon micromechanical beams Journal of the Electrochemical Society, June 1983, vol.130, (no.6):1420-3 Howe, R.T. Muller, R.S. Stress in polycrystalline and amorphous silicon thin films Journal of Applied Physics, Aug. 1983, vol.54, (no.8):4674-5 Murarka, S.P. Retajczyk, T.F., Effect of phosphorus doping on stress in silicon and polycrystalline silicon Journal of Applied Physics, April 1983, vol.54, (no.4):2069-72 Monday, August 17, 1998 Page 1 of 24 Toncheva, L.T. Christova, K.K. Process-induced bending and mechanical stress in silicon wafers Crystal Lattice Defects and Amorphous Materials, 1983, vol.10, (no.2):89-93 Choi, M.S. Hearn, E.W. Stress effects in boron-implanted polysilicon films. Journal of the Electrochemical Society, Oct. 1984, vol.131, (no.10):2443-6 Harbeke, G. Krausbauer, L. Steigmeier, E.F. Widmer, A.E. and others Growth and physical properties of LPCVD polycrystalline silicon films Journal of the Electrochemical Society, March 1984, vol.131, (no.3):675-82 Guckel, H. Randazzo, T. Burns, D.W. A simple technique for the determination of mechanical strain in thin films with applications to polysilicon Journal of Applied Physics, 1 March 1985, vol.57, (no.5):1671-5 Howe, R.T. [Polycrystalline silicon micromachining: a new technology for integrated sensors] (Engineering and the Quantitive Methods in Microcirculation. Biomedical Engineering Society 1985 Symposium, Anaheim, CA, USA, 22-25 April 1985). Annals of Biomedical Engineering, 1986, vol.14, (no.2):187-97. Translation: Joubert, P. Loisel, B. Chouan, Y. Haji, L. [The effect of low pressure on the structure of LPCVD polycrystalline silicon films] Journal of the Electrochemical Society, Oct. 1987, vol.134, (no.10):2541-5. Translation: (A22) Ohlckers, P. Eriksen, O. Jenssen, H. A Mechanical Silicon Sensor Element with Low Deflection and HIgh Resonance Frequency Transducers 87, 332 Bart, S.F. Lober, T.A. Howe, R.T. Lang, J.H. and others [Design considerations for micromachined electric actuators] Sensors and Actuators, July 1988, vol.14, (no.3):269-92.Translation: (A08) Monday, August 17, 1998 Page 2 of 24 Fan, L.-S. Tai, Y.-C. Muller, R.S. Integrated movable micromechanical structures for sensors and actuators IEEE Transactions on Electron Devices, June 1988, vol.35, (no.6):724-30 Fan, L.S. Muller, R.S. As-deposited low-strain LPCVD polysilicon 1988 Solid State Sensor and Actuator Workshop. Technical Digest (Cat. No.88TH0215-4), Hilton Head Island, SC, USA, 6-9 June 1988. p. 55-8 Guckel, H. Burns, D.W. Tilmans, H.A.C. Visser, C.C.G. and others Processing Conditions for Polysilicon Films with Tensile Strain for Large Aspect Ratio Microstructures Solid-State Sensor and Actuator Workshop 1988, 51-4 Guckel, H. Burns, D.W. Visser, C.C.G. Tilmans, H.A.C. Deroo, D. Fine-Grained Polysilicon Films with Built-In Tensile Strain IEEE Trans. on Electron Devices, 35 (1988) 800-1 Guckel, H. Burns, D.W. Tilmans, H.A.C. DeRoo, D.W. Rutigliano, C.R. Mechanical Properties of Fine Grained Polysilicon - The Repeatability Issue Solid State Sensor and Actuator Workshop 1988, 96-9 Howe, R.T. Surface Micromachining for Microsensors and Microactuators J. Vaccuum Sci. Tech. B, 6 (1988) 1809-13 Howe, R.T. Applications of polysilicon films in microsensors and microactuators Polysilicon Films and Interfaces. Symposium, Boston, MA, USA, 1-3 Dec. 1987). 1988. p. 213-24 Jiahua Huang Lober, T.A. Schmidt, M.A. Senturia, S.D. The maximum free-standing length of polycrystalline silicon microbeams Proceedings of the International Conference on Materials and Process Characterization for VLSI, 1988 (ICMPC '88), Shanghai, China, 24-29 Oct. 1988). p. 130-3 Monday, August 17, 1998 Page 3 of 24 Kamins, T.I. Polycrystalline Silicon for Integrated Circuit Applicaitons Kluwer Academic Publishers, Boston 1988 Koleshko, V.M. Belitsky, V.F. Kiryushin, I.V. Mechanical Stresses in Low Pressure Chemically Vapour Deposited Silicon Films Thin Solid Films, 165 (1988) 181-91 Koleshko, V.M. Belitsky, V.F. Kiryushin, I.V. Stresses in thin polycrystalline silicon films Thin Solid Films, Aug. 1988, vol.162:365-74 Lober, T.A. Huang, J. Schmidt, M.A. Senturia, S.D. Characterization of the mechanisms producing bending moments in polysilicon micro-cantilever beams by interferometric deflection measurements 1988 Solid State Sensor and Actuator Workshop. Technical Digest (Cat. No.88TH0215-4), Hilton Head Island, SC, USA, 6-9 June 1988. p. 92-5 Tai, Y.C. Muller, R.S. Fracture strain of LPCVD polysilicon 1988 Solid State Sensor and Actuator Workshop. Technical Digest (Cat. No.88TH0215-4), Hilton Head Island, SC, USA, 6-9 June 1988. p. 88-91 Fan, L.-S. Howe, R.T. Muller, R.S. Microstructures for fracture toughness characterization of brittle thin films Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989. p. 40-1 Fan, L.S. Howe, R.T. Muller, R.S. Fracture toughness characterization of brittle thin films (5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Montreux, Switzerland, 25-30 June 1989). Sensors and Actuators A (Physical), April 1990, vol.A23, (no.1-3):872-4 Guckel, H. Sniegowski, J.J Christenson, T.R. Raissi, F. The application of fine-grained tensile polysilicon to mechanically resonant transducers Transducers 89, 346. Sensors and Actuators, 1990, 346-51 Monday, August 17, 1998 Page 4 of 24 Guckel, H. Sniegowski, J.J. Christenson, T.R. Advances in processing techniques for silicon micromechanical devices with smooth surfaces Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989. p. 71-5 Guckel, H. Sniegowski, J.J. Christenson, T.R. Mohney, S. and others Fabrication of micromechanical devices from polysilicon films with smooth surfaces Sensors and Actuators, 15 Nov. 1989, vol.20, (no.1-2):117-22 Hijab, R.S. Muller, R.S. Residual strain effects on large aspect ratio micro-diaphragms (capacitance transducer) Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989. p. 133-8 Howe, R.T. Silicon microdynamic systems-recent development in microactuators and micromachinery IN: Wescon/89. Conference Record. (Wescon/89. Conference Record, San Francisco, CA, USA, 14-15 Nov. 1989). Ventura, CA, USA: Electron. Conventions Manage, 1989. p. 202-5 Liao, J.C. Crowley, J.L. Kamins, T.J. Chemical vapor deposition of polycrystalline silicon in a rapid thermal processor Microelectronic Manufacturing and Testing, Nov. 1989, vol.12, (no.12):29-30 Liao, J.C. Crowley, J.L. Kamins, T.I. Chemical vapor deposition of polycrystalline silicon in a rapid thermal processor Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing Symposium, San Diego, CA, USA, 25-28 April 1989). p. 97-102 Putty, M.W. Chang, S.C. Howe, R.T. Robinson, A.L. and others One-port active polysilicon resonant microstructures Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989. p. 60-5 Sugiyama, S. Tabata, O. [Mechanical property measurement of thin films for micromechanism] Journal of the Society of Instrument and Control Engineers, June 1989, vol.28, (no.6):485-8 Monday, August 17, 1998 Page 5 of 24 Tabata, O. Kawahata, K. Sugiyama, S. Igarashi, I. Mechanical property measurements of thin films using load-deflection of composite rectangular membrane Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989. p. 152-6 Tai, Y.-C. Fan, L.-S. Muller, R.S. IC-processed micro-motors: design, technology, and testing Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989). New York, NJ, USA: IEEE, Tang, W.C. Nguyen, T.-C.H. Judy, M.W. Howe, R.T. Electrostatic-comb drive of lateral polysilicon resonators Transducers 89, 328-331 Tang, W.C. Nguyen, T.-C.H. Howe, R.T. Laterally driven polysilicon resonant microstructures Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989. p. 53-9 Tang, W.C. Tu-Cuong Nguyen, H. Howe, R.T. Laterally driven polysilicon resonant microstructures Sensors and Actuators, 15 Nov. 1989, vol.20, (no.1-2):25-32 Trimble, L.E. Celler, G.K. Evaluation of polycrystalline silicon membranes on fused silica for x-ray lithography masks (33rd International Symposium on Electron, Ion and Photon Beams, Monterey, CA, USA, 30 May-2 June 1989). Journal of Vacuum Science & Technology B (Microelectronics Processing and Phenomena), Nov.-Dec. 1989, vol.7, (no.6):1675-9 Yang, K.L. Wilcoxen, D. Gimpelson, G. The effects of post-process techniques and sacrificial layer materials on the formation of free standing Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), Salt Lake City, UT, USA, 20-22 Feb. 1989. p. 66-70 Burns, D.W. Guckel, H. Thin films for micromechanical sensors Topical Conference on Surface Microengineering, Boston, MA, USA, 23-24 Oct. 1989). Journal of Vacuum Science & Technology A (Vacuum, Surfaces, and Films), July-Aug. 1990, vol.8, (no.4):3606-13 Monday, August 17, 1998 Page 6 of 24 Chang, S.C. Putty, M.W. Hicks, D.B. Li, C.H. Howe, R.T. Resonant-bridge two-axis microactuator Transducers 89, 342-345 Chau, K, Fung, C. Harris, P.R. Panagou, J. High-Stress and Overrange Behaviour of Sealed-Cavity Polysilicon Pressure Sensors Solid State Sensor and Actuator Workshop 1990, 181-3 Fan, L.-S. Muller, R.S. Yun, W. Howe, R.T. and others Spiral microstructures for the measurement of average strain gradients in thin films Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), Napa Valley, CA, USA, 11-14 Feb. 1990). New York, NY, USA: IEEE, 1990. p. Fan, L.S. Integrated Micromachinery - Moving Structures on Silicon Chips Ph.D. dissertation, U. of C. at Berkeley, 1990 Gabriel, K.J. Behi, F. Mahadevan, R. Mehregany, M. In situ friction wear measurements in integrated polysilicon mechanisms Transducers 89, 184. Sensors and Actuators, Feb. 1990, vol.A21, 184-8 Huang, J. Krulevitch, P. Johnson, G.C. Howe, R.T. Wenk, H.R. Investigation of Texture and Stress in Undoped Polysilicon Films Mat. Res. Sec. Symp. Proc., 182 (1990) 201-206 Kamins, T.I. Design properties of polycrystalline silicon (for sensor application) (5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Montreux, Switzerland, 25-30 June 1989). Sensors and Actuators A (Physical), April 1990, vol.A23, (no.1-3):817-24 Kawata, M. Nadahara, S. Shiozawa, J. Watanabe, M. and others Characterization of stress in doped and undoped polycrystalline silicon before and after annealing or oxidation with laser Raman spectroscopy Journal of Electronic Materials, May 1990, vol.19, (no.5):407-11 Monday, August 17, 1998 Page 7 of 24 Lim, M.G. Chang, J.C. Schultz, D.P. Howe, R.T. White, R.M. Polysilicon Microstructures to Characterize Static Friction IEEE Micro Electro Mechanical Systems 1990, 82-8 Pisano, A,P. Cho, Y.-H. Mechanical design issues in laterally-driven microstructures Transducers 89, 1060. Sensors and Actuators A, 1990, vol.A23, 1060-4 Sniegowski, J.J. Guckel, H. Christenson, T.R. Performance Characteristics of Second Generation Polysilicon Resonating Beam Force Transducers Solid State Sensor and Actuator Workshop 1990, 9-12 Tabata, O. Sugiyama, S. Takigawa, M. Control of internal stress and Young's modulus of Si/sub 3/N/sub 4/ and polycrystalline silicon thin films using the ion implantation technique Applied Physics Letters, 2 April 1990, vol.56, (no.14):1314-16 Tai, Y.-C. Muller, R.S Measurement of Young's modulus on microfabricated structures using a surface profiler Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), Napa Valley, CA, USA, 11-14 Feb. 1990. p. 147-52 Tai, Y.C. Muller, R.S. Frictional Study of IC processed micromotors Transducers 89, 180. Sensors and Actuators A, Feb. 1990, vol.A22, 410-3 Trimble, L.E. Celler, G.K. Frackoviak, J. Control of optical and mechanical properties of polycrystalline silicon membranes for X-ray masks Electron-Beam, X-Ray and Ion-Beam Technology: Submicrometer Lithographies IX, San Jose, CA, USA, 7-8 March 1990). Proceedings of the SPIE - The International Society for Optical Engineering, 1990, vol.1263:251-8 Walker, J.A. Gabriel, K.J. Mehregany, M. Mechanical Integrity of Polysilicon Films Exposed to Hydrofluoric Acid Solutions IEEE Micro Electro Mechanical Systems 1990, 56-60 Monday, August 17, 1998 Page 8 of 24 Akagi, Y. Nakamura, Y. Okamoto, Y. Morita, T. and others Structural investigations of polycrystalline silicon films prepared by plasma enhanced CVD Extended Abstracts of the 1991 International Conference on Solid State Devices and Materials, Yokohama, Japan, 27-29 Aug. 1991). Tokyo, Japan: Bus. Center Acad. Soc. Japan, 1991. p. 727-8 Farooqui, M.M. Evans, A.G.R. Polysilicon microstructures Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), Nara, Japan, 30 Jan.-2 Feb. 1991. p. 187-91 Judy, M.W. Cho, Y.-H. Howe, R.T. Pisano, A.P. Self Adjusting Microstructures (SAMS) IEEE Micro Electro Mechanical Systems 1991, 51 Kissinger, G. Kissinger, W. Neubert, M. Deposition of thick polysilicon layers on stress-reduced silicon wafers Crystal Research and Technology, April 1991, vol.26, (no.4):K73-6 Krulevitch, P. Growth Stresses in Undoped LPCVD Polycrystalline Silicon Films Research Proj., U. of C. Berkeley (1991) Krulevitch, P. Howe, R.T. Johnson, G.C. Huang, J. Stress in undoped LPCVD polycrystalline silicon TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5), San Francisco, CA, USA, 24-27 June 1991. p. 949-52 Krulevitch, P. Johnson, G.C. Howe, R.T. Stress and Microstructure in LPCVD Polycrystalline Silicon Films. Experimental Results and Closed Form Modeling of Mat. Res. Soc. Symp. Proc., 239 (1991) 13 Krulevitch, P. Nguyen, T.D. Johnson, G.C. Howe, R.T. and others LPCVD polycrystalline silicon thin films: the evolution of structure, texture and stress Evolution of Thin-Film and Surface Microstructure Symposium, Boston, MA, USA, 26 Nov.-1 Dec. 1990. 1991. p. 167-72 Monday, August 17, 1998 Page 9 of 24 Lee, A.P. Pisano, A.P. Lin, L. Normal and Tangential Impact in Micro Electomechanical Structures IEEE Micro Electro Mechanical Systems 1991, 21-6 Marco, S. Samiter, J. Ruiz, O. Morante, J.R. Stress Measurements of SiO/sub 2/-Polycrystalline Silicon Structures for Micromechanical Devices by Means of Infared Spectroscopy Technique Transducers 91, 209-212 Muro, H. Hoshino, S. Semiconductor or vibration sensors using multiple cantilever beams with different lengths Electronics and Communications in Japan, Part 2 (Electronics), Aug. 1991, vol.74, (no.8):109-16 Orpana, M. Korhonen, A.O. Control of residual stress of polysilicon thin films by heavy doping in surface micromachining TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5), San Francisco, CA, USA, 24-27 June 1991. p. 957-60 Pratt, R.I . Johnson, G.C. Howe, R.T. Chang, J.C. Micromechanical Structures for Thin Film Characterizaton Transducers 91, 205-8 TAKAI, M. KATO, K. NAMBA, S. PFANNENMULLER, U. and others EFFECT OF DEPOSITION TEMPERATURE OF ARSENIC IMPLANTED POLY-SI-ON-INSULATOR ON GRAIN SIZE AND RESIDUAL STRESS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991 APR, V55 N1-4:870-872 Zook, J.D. Burns, D.W. Guckel, H. Sniegowski, J.J. and others Resonant Microbeam Strain Transducers Transducers 91, 529 Zook, J.D. Burns, D.W. Guckel, H. Sniegowski, J.J. and others Characteristics of polysilicon resonant microbeams Sensors and Actuators A (Physical), Oct. 1992, vol.A35, (no.1):51-9 Monday, August 17, 1998 Page 10 of 24 Alley, R.L. Cuan, G.J. Howe, R.T. Komvopoulos, K. The effect of release-etch processing on surface microstructure stiction Technical Digest. IEEE Solid-State Sensor and Actuator Workshop (Cat. No.92TH0403-X), Hilton Head Island, SC, USA, 22-25 June 1992. p. 202-7 Fan, L.-S. Muller, R.S. Yun, W. Howe, R.T. Huang, J. Spiral Microstructures for the Measurement of Average Strain Gradients in Thin Films IEEE Micro Electro Mechanical Systems 1992, 177 Guckel, H. Burns, D. Rutigliano, C. Lovell, E. and others Diagnostic microstructures for the measurement of intrinsic strain in thin films Journal of Micromechanics and Microengineering, June 1992, vol.2,(no.2):86-95 Guckel. H. Rypstat, C. Nesnidal, M. Zook, J.D. and others Polysilicon Resonant Microbeam Technology for High Performance Sensor Applicatons Solid State Sensor and Actuator Workshop 1992, 153 Ismail, M.S. Bower, R.W. Roberds, B.E. Polysilicon and Titanium Disilicide and Polycide Fusion Bonding for 3-D Microdevices Applications Solid State Sensor and Actuator Workshop 1992, 86 Krulevitch, P. Johnson, G.C. Howe, R.T. Stress and microstructure in phosphorus doped polycrystalline silicon Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems, San Francisco, CA, USA, 28-30 April Lee, A.P. Ljung, P.B. Pisano, A.P. Polysilicon micro vibromotors Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots(Cat. No.92CH3093-2), Travemunde, Germany, 4-7 Feb. 1992. p. 177-82 Lee, A.P. Pisano, A.P. Lim, M. G. Impact, friction, and wear testing of microsamples of polycrystalline silicon Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems, San Francisco, CA, USA, 28-30 April Monday, August 17, 1998 Page 11 of 24 Lee, A.P. Pisano, A.P. Polysilicon angular microvibromotors Journal of Microelectromechanical Systems, June 1992, vol.1, (no.2):70-6 Lee, P.A. Impact Actuation of Polysilicon Micromechanical Structures Ph.D. dissertaion, U. of C. at Berkeley, 1992 Lin, L. Nguyen, C.T.-C. Howe, R.T. Pisano, A.P. Microelectromechanical filters for signal processing Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots(Cat. No.92CH3093-2), Travemunde, Germany, 4-7 Feb. 1992. p. 226-31 Maier-Schneider, Maibach, J. Obermeier, E. Computer-aided characterization of the elastic properties of thin films Journal of Micromechanics and Microengineering, Sept. 1992, vol.2, (no.3):173-5 Mehregany, M. Senturia, S.D. Lang, J.H. Measurement of wear in polysilicon micromotors IEEE Transactions on Electron Devices, May 1992, vol.39, (no.5):1136-43 Nguyen, C. Howe, R. Quality Factor Control for Micromechanical Resonators International Electron Devices Meeting. Technical Digest. San Francisco, CA, 13-16 Dec. 1992, p. 505-8 Nguyen, C.T.-C. Howe, R.T. Quality factor control for micromechanical resonators International Electron Devices Meeting 1992. Technical Digest (Cat. No.92CH3211-0)Proceedings of IEEE International Electron Devices Meeting, San Francisco, CA, USA, 13-16 Dec. 1992). New York, NY, USA: IEEE, 1992. p. 505-8 Oei, D.-G. McCarthy, S.L. The effect of Temperature and Pressure on Residual Stress in LPCVD Polysilicon Films Mat. Res. Soc. Symp. Proc., 276 (1992) 85 Monday, August 17, 1998 Page 12 of 24 Pratt, R.I. Johnson, G.C. Howe, R.T. Nikkel, D.J., Jr. Characterization of Thin Films Using Micromechanical Structures Smart Materials Fabrication and Materials For Micro-Electro-Mechanical Systems. San Francisco, CA, USA, 28-30 April van Drieenhuizen, Goosen, J.F.L. French, P.J. Wolffenbuttel, Comparison of techniques for measuring both compressive and tensile stress in thin films (EUROSENSORS VI, San Sebastian, Spain, 5-7 Oct. 1992). Sensors and Actuators A (Physical), June-Aug. 1993, Alley, R.L. Mai, P. Howe, R.T. Komvopulos, K. Surface Roughness Modification of Interfacial Contacts in Polysilicon Microstructures Transducers 93, The 7th Int. Conference on Solid-State Sensors and Actuators, p. 288-291 Benitez, A. Bausells, J. Cabruja, E. Esteve, J. and others Stress in low pressure chemical vapour deposition polycrystalline silicon thin films deposited below 0.1 Torr Sensors and Actuators A (Physical), June-Aug. 1993, vol.A37-A38:723-6 Brand, O. Lenggenhager, R. Baltes, H. Influence of Air Pressure on Resonating and Thermoelectric Microstructures Realized with Standard IC Technologies International Electron Devices Meeting. Technical Digest. Washington, D.C., 5-8 Dec. 1993, p. 195-8 Cho, Y.-H. Kwak, B.M. Pisano, A.P. Howe, R.T. Viscous energy dissipation in laterally oscillating planarmicrostructures: a theoretical and experimental study Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6)Proceedings of Micro Electro Mechanical Systems, Fort Lauderdale, FL, USA, Gupta, B.K. Chevallier, J. Bhushan, B. Tribology of ion bombarded silicon for micromechanical applications Transactions of the ASME. Journal of Tribology, July 1993, vol.115, (no.3):392-9 Hong, Q.Z. d'Heurle, F.M. Harper, J.M.E. Hong, S.Q. Stresses and morphological instabilities in silicide/polycrystalline Si layered structures Applied Physics Letters, 24 May 1993, vol.62, (no.21):2637-9 Monday, August 17, 1998 Page 13 of 24 Hong, Q.Z. d'Heurle, F.M. Harper, J.M.E. Hong, S.Q. Stresses and morphological instabilities in silicide/polycrystalline Si layered structures Applied Physics Letters, 24 May 1993, vol.62, (no.21):2637-9 Jones, S.K. Hill, C. Process and device modelling of VLSI polysilicon components IEE Colloquium on 'Poly-Si Devices and Applications' (Digest No.067), London, UK, 23-24 March 1993. p. 14/1-4 Judy, M.W. Howe, R.T. Polysilicon Hollow Beam Lateral Resonators IEEE Micro Electro Mechanical Systems 1993, 265 Judy, M.W. Howe, R.T. HIghly Compliant Lateral Suspensions Using Sidewall Beams Transducers 93, The 7th Int. Conference on Solid-State Sensors and Actuators, p. 54-57 Koskinen, J. Steinwall, J.E. Soave, R. Johnson, H.H. Microtensile testing of free-standing polysilicon fibers of various grain sizes Journal of Micromechanics and Microengineering, March 1993, vol.3, (no.1):13-17 Lee, A.P. Pisano, A.P. Repetitive impact testing of micromechanical structures Sensors and Actuators A (Physical), Sept. 1993, vol.A39, (no.1):73-82 Legtenberg, R. Tilmans, H.A.C. Elders, J. Elwenspoek, M. Stiction of Surface Micromachined Structures after Rinsing and Drying: Model and Investigation of Adhesion Transducers 93, ?. Sensors and Actuators A (Physical), May 1994, vol.A43, (no.1-3):230-8 Monk, D.J. Krulevitch, P. Howe, R.T. Johnson, G.C. Stress Corrosion Cracking and Blistering of Thin Polycrystalline Silicon Films in Hydrofluoric Acid Mat. Res. Soc. Symp. Proc., 308 (1993) 641 Monday, August 17, 1998 Page 14 of 24 Benrakkad, M.S. Perez-Rodriguez, Jahwari, T. 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