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Boser
Horsley
Javey
Lee
Liepmann
Lin
Maharbiz
Muller
Nguyen
Pisano
Pister
White
Wu
Huggins (Executive Director)
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Mr. John M. Huggins
(510) 643-5663
jhuggins@eecs.berkeley.edu
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Titles of Current Projects:
A.M. Fitzgerald & Associates: MEMS R&D, Modeling and Analysis, Failure Prediction and Technology Strategy
Centura MXP Straight Sidewall Etch Characterization
MEMS Microfabrication and Research Services at the Adriatic Research Institute
The Nanoshift Concept: Process Development, Prototyping, Fabrication and Consultation Services for MEMS, Micro- and Nanotechnology at the U.C. Berkeley MicroLab
DARPA Center for Micro/Nano Scaling-Induced Physics
Recently Ended Projects:
VUV Lamp Assembly for Wafer Scale Surface Modification
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