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Projects by Director
     
 Lee
 Lin
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Prof. Richard S. Muller
(510) 642-0614
muller@eecs.berkeley.edu
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Titles of Current Projects:

 DARPA Center for Micro/Nano Scaling-Induced Physics

Recently Ended Projects:
Fast, MEMS-Based Phase-Shifting Interferometer
Electrometrology with MEMS
Fluid microlens for MEMS
Selectively Addressed MEMS Digital-Mirror Arrays for Adaptive Optics
MEMS Microlenses and Lenslets: Their Application to Shack-Hartmann Sensors
A Simple Process to Fabricate High-Performance Torsional Microscanners and Their Applications
Design of Controls for MEMS Adaptive Optics
MEMS Integrable Temperature Sensor
MEMS barcode reader
Feedback Control and Electronics for Deformable Mirrors
Micromirror Arrays for Adaptive Optics


  

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