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 Lee
 Lin
 Wu
 

Prof. Richard S. Muller
(510) 642-0614
muller@berkeley.edu
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Titles of Current Projects:

 DARPA Center for Micro/Nano Scaling-Induced Physics


Recently Ended Projects:
BPN337: Fast, MEMS-Based Phase-Shifting Interferometer
KSJP30/JD: Electrometrology with MEMS
BPN390: Fluid microlens for MEMS
RSM36: Selectively Addressed MEMS Digital-Mirror Arrays for Adaptive Optics
RSM33: MEMS Microlenses and Lenslets: Their Application to Shack-Hartmann Sensors
BPN300: A Simple Process to Fabricate High-Performance Torsional Microscanners and Their Applications
RSM37: Design of Controls for MEMS Adaptive Optics
RSM38: MEMS Integrable Temperature Sensor
RSM35: MEMS barcode reader
RSM34: Feedback Control and Electronics for Deformable Mirrors
RSM29: Micromirror Arrays for Adaptive Optics


 

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