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Projects by Director
     
 Lee
 Lin
 Wu
 Howe
 Tien
 

Prof. Roger T. Howe
(650) 723.8030
rthowe@stanford.edu
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Recently Ended Projects:
Dedicated SiC MEMS LPCVD Reactor for Access through the DARPA MEMS Exchange Program
Synchronization and interaction of MEMS oscillators
Nanowire-Coupled Resonators
Silicon carbide process development and characterization for harsh-environment sensors
Lateral-Mode NEMS Resonators Using Internal Electrostatic Transduction
Novel SiGe Processes for Electrostatically Actuated MEMS Resonators
MEMS Resonator Simulation
Diatom-Inspired Microfluidic Generation of Tunable Emulsions for Macroporous Silica
SiGe Processing for the Fabrication of a Floating Electromechanical System (FLEMS) Gyroscope
Biomimetic Nanofabrication of Silica Structures Based on Diatoms
Effects of Boron Concentration on Si1-xGex Properties for Integrated MEMS Technology
Post-process of GHz-range SiGe Resonators Over Standard RF CMOS Circuitry for Transceiver Applications
Self-Healing RF MEMS Switch
Nanoresonator Interface Electronics
Electrical Interconnect of Components Transferred by Fluidic Microassembly Using Capillary Forces
Fluidic Microassembly for Microfluidic Applications
Micromachined Electrodes for Capacitive Sensors
Fluidic assembly of RF receiver with glass-substrate inductors & antenna
As-Grown SiGe Thin Film with Low Stress and Low Strain Gradient
A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays


 

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