-> Home -> Projects -> Projects by Research Area (Thrusts) -> Package, Process & Microassembly

Here you will find Projects dealing with:

Low temperature MEMS-on-CMOS Silicon-Germanium process for adding MEMS to finished CMOS wafers or dice.
Silicon Carbide process for adverse environment MEMS and high frequency RF resonators.
Localized bonding: eutectic, fusion, solder, laser, inductive, rapid thermal processing, and ultrasonic; suitable for device level or wafer level packaging or sealing applications to plastic, glass, silicon and Bio materials, including liquid encapsulation.
Fluidic microassembly for post-process combining of dissimilarly processed microdevices.
Carbon nanotube and silicon nanowire directional growth in post-process, low ambient temperature environments.
Stiction mitigation for MEMS.

Current Active Projects:
A.M. Fitzgerald & Associates: MEMS R&D, Modeling and Analysis, Failure Prediction and Technology Strategy
Centura MXP Straight Sidewall Etch Characterization
Direct-write Piezoelectric PVDF Nanogenerator via Near-Field Electrospinning
Hermetic Bonding for Optical Feed-through
MEMS Microfabrication and Research Services at the Adriatic Research Institute
MEMS Supercapacitor
MEMS-Based Magnetic Probe Microscopy
MiNaSIP 2.C.1: MEMS Packaging Beyond Glass Frit
MiNaSIP 2.C.2: Room Temperature Synthesis of Carbon Nanotubes
MiNaSIP 2.C.2: Zero-Stress MEMS Packaging
Rapid Synthesis of Nanostructures via Induction Heating
SiC TAPS: Ion Beam Deposited SiC for MEMS Encapsulation
SiC TAPS: Rapid Bonding of SiC Sensors to Metal by Inductive Heating
The Nanoshift Concept: Process Development, Prototyping, Fabrication and Consultation Services for MEMS, Micro- and Nanotechnology at the U.C. Berkeley MicroLab

Indicates a MiNaSIP Project

Recently Ended Projects:
2D Individually-Addressable Nanowire Arrays
Adhesion in MEMS
Centura Deep Silicon and Oxide Etch Characterization
CMOS Integrated Nanowires/Nanotubes (CMOS-Inn)
Dedicated SiC MEMS LPCVD Reactor for Access through the DARPA MEMS Exchange Program
Disposable Microsyringe for Single Dose Vaccine Delivery
DRIE Process Optimization for Very Smooth Sidewall Etch
Effects of Boron Concentration on Si1-xGex Properties for Integrated MEMS Technology
Electrical Interconnect of Components Transferred by Fluidic Microassembly Using Capillary Forces
Fabrication of a High Aspect Ratio Piezoelectric Microactuator
Fluidic assembly of RF receiver with glass-substrate inductors & antenna
Fluidic Microassembly for Microfluidic Applications
FTIR In Situ Depth Measurement System for DRIE
Integration of NEMS and MEMS by Localized Growth of Nanowires
MEMS Biopolymer: Micro Plastic Injection Molded Fluidic Chip with Thermally Actuated Hydrogel Valves
MEMS Strain Gauge on Steel: Elastic Encapsulation
Micro Magnetic Shielded Packaging
Micro Plastic Injection Molding: Microneedle Molding
Micro/Nano Fluidic Interconnector
Microconnector
Modeling of Temperature Effects on Piezoresistor Sensitivity
Nano-Getters for MEMS Applications
Nanowire-Coupled Resonators
Nickel Nanocomposite Film for MEMS Applications
Non-magnetic Micro Heater
Novel SiGe Processes for Electrostatically Actuated MEMS Resonators
On-Chip DNA Transformation by Local Heat Shock and Cell Cryopreservation
Plastically Self-Alligned Micromirrors
Rapid Bonding of MEMS Strain Gauge to Steel
Reversible Bonding Process Development
SAM for MEMS Packaging/Fuel Cell Applications
Selective Induction Heating for MEMS Packaging
SiC TAPS: Characterization of Silicon Carbide Ion Beam Assisted Deposition (IBAD) Films
SiC TAPS: Ion Beam Assisted Deposition (IBAD) Encapsulation
SiGe Processing for the Fabrication of a Floating Electromechanical System (FLEMS) Gyroscope
Silicon carbide process development and characterization for harsh-environment sensors
Silicon on Insulator Microassembly
Stiction in MEMS
Tools for Microassembly
VUV Lamp Assembly for Wafer Scale Surface Modification