-> Home -> Projects -> Projects by Research Area (Thrusts) -> Physical Sensors & Devices

Here you will find Projects dealing with:

Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

Current Active Projects:
A Micromechanical Power Amplifier
A Micromechanical Power Converter
AlN Piezo: Low Cross-Axis Sensitivity Inertial Instruments
AlN Piezo: MEMS Aluminum Nitride Technology for Inertial Sensors (MANTIS)
Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers
CMOS Circuits for MEMS Aluminum Nitride Inertial Sensors
CMOS-Integrated Nanowire-Based Molecular and Gas Sensors
High Z Materials for Nuclear Detection
Improving Energy Efficiency Through Exploratory Sub-Metering of Cory Hall
Inkjet Interfaces for Controlling Biological Pattern Formation
Integrity Assessment of Underground Power Distribution Cables
MEMS Poly/Nano: Biomimetic, Polymeric Transistor-based Biosensor Technology
MEMS Poly/Nano: Compact, Organic RRAM for Transparent and Flexible Electronic Application
MEMS Poly/Nano: Polymer Coated Cantilevers for Infrared Heat Sensing
MEMS-Based Magnetic Probe Microscopy
Micro Autonomous Air Vehicles
Micromechanical Resonant Displacement Gain Stages
Parametrically-Amplified MEMS Magnetometer
Pipelined ADC Utilizing Passive Inter-stage Gain
SiC TAPS Sensors for Extreme Harsh Environments
SiC TAPS: Pressure Sensor Design and Optimization
Silicon Carbide Thin Film Development for TAPS Project

Indicates a MiNaSIP Project

Recently Ended Projects:
A MEMS Optical Modulator and Filter
A Sub-mW Mode Matching Sigma-Delta Vibratory Gyroscope Readout Circuit with a 0.004 deg/sec/rtHz Noise Floor over a 50Hz Band
Aluminum Nitride Ultrasonic Doppler Velocity Sensor
Background Calibration for Low-Power High-Performance A/D Conversion
Background calibration techniques for digitally assisted ADC
Bi-directional Electrothermal Electromagnetic Actuators and Relays
Biomimetic Infrared sensor based on the nanogap junction array
Design of a Smart Universal Game Board
Electronic Interface for Micromachined Gyroscope Sensors
Electrostatic Actuator Design for a Digital Output Gyroscope
Floating Electro Mechanical Systems (FLEMS)
Limits to Micromechanical Resonator Performance
Low-Power High-Performance Analog-to-Digital Converters
MEMS Biopolymer: Polymer Coated Cantilevers for Infrared Heat Sensing
MEMS Integrable Temperature Sensor
MEMS Metal Gimbal: Design and Fabrication
MEMS Metal Gimbal: Design and FEM
MEMS REPS: Assembly of a MEMS Compressed Air Expander Unit
MEMS Sensor for Hard Disk Glide Test
MEMS Strain Gauge on Steel - Miniaturization of Transduction Circuits
MEMS Strain Gauge on Steel: Elastic Encapsulation
MEMS Strain Gauge on Steel: Resonant Sensor Design and Fabrication
MEMS Strain Gauge on Steel: Selective Strain Isolation
MEMS Strain Gauge on Steel: Test Fixture Design
MEMS Strain Gauge on Steel: Testing Localized Silicon-Steel Bonds
MEMS Strain Gauges on Steel: Electronic Interfaces for Resonant Sensors
Micro, Tunable, Check Valves for Surgical Applications
Microfabricated Torsional Actuator by Self-Aligned Plastic Deformation
Micromachined Electrodes for Capacitive Sensors
Microrobots
Multidirectional Force and Torque Sensor for Insect Flight Research
Nanostructure-Based Nanoactuator
Non-dispersive IR gas detection with a MEMS scanning mirror and Linear Variable Filter
Off-the-Shelf Distributed Robots (COTS-BOTS)
Phase Noise Considerations of a MEMS Oscillator
Scanning Probe Methods for the Characterization of Nanomechanical Resonators
SiC TAPS: Capacitive Sensors Design and Fabrication
SiC TAPS: Ion Beam Assisted Deposition (IBAD) Encapsulation
SiC TAPS: Strain Gauge System Design
SiC TAPS:Pressure Sensor Design for Harsh Environments
Silicon carbide process development and characterization for harsh-environment sensors
Strain Sensors for Wind Turbines
TFT Modeling for Single Transistor Sensors
Thermally-induced residual stresses in MEMS sensors
Tribology Test Chip for Contacting NEMS design
Ultra High Shock Resistant Sensors
Ultra-smooth conducting parallel plates with nanoscale separation for single molecule sensing and investigation of Casimir force
VLSI MEMS Switch