BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
     
 

APP36: GHz Nano-Mechanical Resonators

Project ID APP36
Website
Start Date NO START DATE RECORDED
Last Updated Wed 2004-Sep-08 20:10:34
Abstract The objective of this project is to design, fabricate, and demonstrate Nano-Mechanical Resonators (NMRs) with GHz natural frequencies. The Radial Bulk Annular Resonator (RBAR), our newest concept, represents a breakthrough in NMR design. Unlike its contemporaries, the RBAR can be arbitrarily sized for any given frequency. This provides design flexibility and increases the mechanical Q of the RBAR. Most importantly, the arbitrary sizing of the RBAR means tremendous reductions in the device’s equivalent resistance, Req. This leads to drastically reduced insertion loss, lower power consumption, and lower unit cost. Theoretically, the RBAR enables: · < 100uW power consumption per node · Ad-hoc, “pico-cell” wireless sensor networks · Adaptive/secure telecom systems · High-scale integration of RF components Recently, a poly-SiGe 200 MHz Bulk Longitudinal Resonator (BLR) was successfully fabricated by Emmanuel Quevy using the blade damascene process. The characteristics of the fabricated device correlates excellently with theoretical models, and demonstrates that electrostatic RF MEMS resonators can indeed be fabricated in a CMOS-compatible SiGe technology. Sub-100 nm gaps have also been successfully created in 2um poly-Si films using a focused ion beam. Such a technique may prove useful for demonstration devices, quick-turn prototyping, and frequency tuning of fabricated devices.
Status Continuing
Funding Source Federal
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Brian Bircumshaw
Advisor(s) Albert P. Pisano
Detailed Information
Secure Access

Private Abstract
Research Report
Poster Slide
Summary Slide
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: September 1, 2014, 9:25 pm