APP51/RM: Silicon Carbide–Coated Microcomponents for the Rotary Engine–Based Power System

Project ID APP51/RM Website Start Date NO START DATE RECORDED Last Updated Thu 2004-Aug-26 16:30:23 Abstract The goal of this project is to develop a facile method for the realization of SiC-coated Si and SiC-based components for MEMS-based micropower systems. Status Continuing Funding Source Federal IAB Research Area Micropower Researcher(s) Muthu B.J. Wijesundara, Jingchun Zhang, Carlo Carraro, Bob Ashurst Advisor(s) Albert P. Pisano, Roya Maboubian

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