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APP53: MEMS Strain Gauge on Steel: Resonant Sensor Design and Fabrication

Project ID APP53
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Start Date NO START DATE RECORDED
Last Updated Tue 2003-Aug-12 10:52:09
Abstract To fabricate a strain sensor capable of measuring micro-strain (10e-6) with a gauge length no greater then 1 mm. The sensor will be capable of in-situ mounting on pre-existing, minimally treated steel substrates. In addition, the sensor will also have a dynamic range of at least 0-1000 Hz, and maintain sensitivity and linearity over a range of temperatures and environmental conditions. In particular, this project is examining the use of a resonant element (tuning fork) to transduce strain into a electrical signal via capacitive sensing (both comb finger and parallel plate.)
Status Continuing
Funding Source Industry
IAB Research Area Physical Sensors & Devices
Researcher(s) Julian Lippmann
Advisor(s) Albert P. Pisano
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