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APP66: Piezoelectric MEMS for Resonator Applications

Project ID APP66
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Start Date Fri 2003-Feb-07 15:08:19
Last Updated Wed 2006-Aug-23 12:38:19
Abstract The goal of this project is to develop piezoelectric aluminum nitride (AlN) MEMS resonators for frequency reference and bandpass filtering applications to enable novel, highly-integrated radio front ends. The demand for highly-integrated analog filtering and frequency reference elements has spurred rapid innovation in the area of vibrating RF MEMS. To date however, no single technology has emerged that can simultaneously deliver monolithic, post-CMOS integration of intermediate frequency (IF) and radio frequency (RF) components that can readily interface with 50 Ohm RF systems.
Status Continuing
Funding Source Federal
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Andrew S. Cardes, Philip J. Stephanou
Advisor(s) Albert P. Pisano
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