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APP89: Monolithic Piezoelectrically-Actuated MEMS Tunable VCSEL

Project ID APP89
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Start Date Mon 2004-Feb-09 10:11:04
Last Updated Thu 2006-Jan-12 18:49:59
Abstract A novel piezoelectrically-actuated microelectromechanical system (MEMS) tunable vertical-cavity surface emitting laser (VCSEL) is to be designed, fabricated and evaluated to provide improved wavelength control with lower power supply voltages and reduced external losses. Applications include signal routing and switching in modern optical communication networks and VCSEL-pumped atomic clocks. The project will focus on device design, modeling and monolithic integration of piezoelectric controlled MEMS with VCSEL for wavelength control.
Status Continuing
Funding Source Federal
IAB Research Area NanoPlasmonics, Microphotonics & Imaging
Researcher(s) Benjamin Cheng, Mike Huang
Advisor(s) Albert P. Pisano, Connie Chang-Hasnain
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