| Project ID |
BEB6 |
| Website |
|
| Start Date |
NO START DATE RECORDED |
| Last Updated |
Tue 2003-Aug-19 11:08:18 |
| Abstract |
This research investigates the dynamics, design, and control of gap-closing, electrostatic actuators. Because of nonlinearity, gap-closing actuators can give rise to complicated behavior, such as instability, frequency tuning, and parametric resonance. We have demonstrated charge control circuits that stabilize gap-closing actuators and increase the range of motion from 33% of the gap to more than 90% of the gap. We have designed a gyroscope proof-mass with parallel-plate actuators for low voltage oscillation in air with frequency tuning. We have identified parasitic effects, such as high-frequency vibrations and parametric resonance, that reduce stability and introduce quadrature errors. Currently we are designing the control to stabilize the proof-mass oscillations and minimize the oscillator phase noise. |
| Status |
Continuing |
| Funding Source |
Federal |
| IAB Research Area |
Physical Sensors & Devices |
| Researcher(s) |
Joseph Seeger |
| Advisor(s) |
Bernhard E. Boser |
|
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