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BPN300: A Simple Process to Fabricate High-Performance Torsional Microscanners and Their Applications

Project ID BPN300
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Start Date Wed 2005-Aug-24 15:31:54
Last Updated Tue 2005-Aug-30 16:33:20
Abstract The first goal of this project is to demonstrate a high-yield, CMOS-compatible simple process to batch-fabricate self-aligned, high-performance torsional microscanners. The second goal is to demonstrate three different, commercially demanded applications for the fabricated torsional microscanners.
Status New
Funding Source Federal
IAB Research Area NanoPlasmonics, Microphotonics & Imaging
Researcher(s) Hyuck Choo
Advisor(s) Richard S. Muller
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