| Project ID |
BPN308 |
| Website |
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| Start Date |
Fri 2005-Aug-26 17:23:07 |
| Last Updated |
Wed 2008-Apr-09 02:22:23 |
| Abstract |
This project aims to use the plastic deformation of single-crystal-silicon as the key process to make Angular Vertical Comb-drive (AVC) torsional microactuators using a simple three-mask process on silicon-on-insulator wafer and yet providing versatility for the potential applications in Optical MEMS (switches, bi-directional free-space laser communications), RF MEMS (variable capacitor), Image/display (head mount display) and the others. |
| Status |
Continuing |
| Funding Source |
Other |
| IAB Research Area |
NanoPlasmonics, Microphotonics & Imaging |
| Researcher(s) |
SangHoon Lee, Chieh Chang |
| Advisor(s) |
Liwei Lin, Ming Wu |
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